Cleaning
Home > Equipment > Cleaning
Cleaning

Cleaning, an essential step when operating on the micro and nanoscale, is used to remove contaminants from the surface of the substrate before it is used in another fabrication process. This can be achieved through various methods, including the use of an ultrasonic bath or an asher. Ultrasonic baths use high-frequency sound waves to agitate a cleaning solution, effectively removing contaminants from the substrate surface. Ashers, on the other hand, use heat to remove unwanted material, such as photoresist. Both methods are often used to clean wafers, although ashers can also be used to selectively etch away material.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
Electrocleaning, DigitalMatrix PMT-16
ANFF VIC MCN
Large ultrasonic wash tank system
ANFF OPTOFAB ANU
Medium ultrasonic wash tank
ANFF OPTOFAB ANU
Microwave plasma asher, AlphaPlasma Q235 Asher
ANFF NSW UNSW
O2 plasma asher, Custom Asher
ANFF NSW UNSW
O2 plasma asher, Denton Asher
ANFF NSW UNSW
OEM Spin Rinse Dryer, Etch
ANFF NSW USYD
Plasma Asher, Gasonics L3510
ANFF QLD Griffith
Plasma Asher, PlasmaTech V50
ANFF SA
Plasma Cleaner, Diener Zepto
ANFF ACT
Plasma cleaner, Harrick Plasma PDC-002
ANFF QLD UQ - AIBN
Small ultrasonic wash tank
ANFF OPTOFAB ANU
Spin Rinse Dryer, OEM
ANFF NSW USYD
Ultrasonic bath, Elma Sonicator
ANFF ACT
Wash Station, Semi-automated large substrate
ANFF OPTOFAB ANU