Focused Ion Beam (FIB) EBIC Add-on
Focused Ion Beam (FIB) EBIC Add-on
An advantage of this technique over other probing techniques is that the passivation layer does not need to be removed before analysis can begin. Measurements can be performed without damaging the surface of the integrated circuit.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
Kleindiek Nanotechnik EBIC/EBAC add-on for FEI FIB/SEM
ANFF ACT
TOOL MAKE AND MODEL
LOCATION
Kleindiek Nanotechnik EBIC/EBAC add-on for FEI FIB/SEM
The EBIC/EBAC is an add-on option for FEI FIB/SEM analysis.
Description
The EBIC/EBAC with PC remote control is an add-on option for FEI FIB/SEM analysis.
Related Information
The Electron Beam Induced Current (EBIC) nanoprobing analysis technique use the electron beam to generate a signal inside the sample, which is amplified for imaging purposes to detect failures in semiconductors.
Tool Contact
horst.punzmann@anu.edu.au