Focused Ion Beam (FIB) milling
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Focused Ion Beam (FIB) milling

Focused Ion Beam (FIB) milling provides significant advantages as a single-step, nanoscale prototyping method that doesn’t require a mask or resist. It is capable of performing: subtractive lithography in which atoms are locally milled away by physical sputtering with sub-10nm resolution; additive lithography in which materials are locally deposited with sub-10nm resolution; local ion implantation for fabrication of an etching mask for subsequent pattern transfer; and direct material modification by ion-induced mixing.FIB milling is a versatile technique with a wide range of applications including advanced materials development/characterisation; resist-free, high-resolution patterning of nanostructures; cross-sectional analysis of samples; sample preparation for transmission electron microscopy (TEM) and for atom probe analysis.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
FEI Helios NanoLab 600 Dual Beam SEM/FIB
Scanning electron microscope with focused ion beam for milling (FIB-SEM)
ACT Node Australian National University (ANU)
Description
A multifunction system for nanofabrication, characterisation, and high-resolution imaging
Related Information
Offers high-resolution imaging, milling, patterning, EDS, EBSD and EBIC
Tool Contact
horst.punzmann@anu.edu.au
FEI Helios NanoLab 600 Dual Beam
Scanning electron microscope with focused ion beam for milling (FIB-SEM)
Melbourne Centre for Nanofabrication VIC Node
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and maskless ion beam direct lithography.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6-inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface. Ion beam patterning with 30 kV accelerating voltage and variable currents.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
FEI Helios NanoLab 600 Dual Beam SEM/FIB
Scanning electron microscope with focused ion beam for milling (FIB-SEM)
Melbourne Centre for Nanofabrication VIC Node
Description
A multifunction system for nanofabrication, characterisation, and high-resolution imaging
Related Information
Offers high-resolution imaging, milling, patterning, EDS, EBSD and EBIC
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
FEI Helios NanoLab 600 Dual Beam
Scanning electron microscope with focused ion beam for milling (FIB-SEM)
Melbourne Centre for Nanofabrication VIC Node
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and maskless ion beam direct lithography.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6-inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface. Ion beam patterning with 30 kV accelerating voltage and variable currents.
Tool Contact
mcn-enquiries@nanomelbourne.com