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Fumehoods
Fumehoods
Fumehoods offer a safe space to process materials that may produce harmful gases.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fumehoods Biological Safety Cabinets
Topsafe Class II
Melbourne Centre for Nanofabrication
VIC Node
Description
A recirculating fume cupboard with a spin coater and a hot plate.
Related Information
Standard equipment for photolithography, using a wide range of photoresists (AZ, SU8, PPA, PMMA) and various substrates.
Tool Contact
mcn-enquiries@nanomelbourne.com
Fumehoods Process specific
Fumehoods for lithography processes
QLD Node
University of Queensland
Description
This recirculating fume cupboard houses a spin coater, a hot plate, and a development station which are used for processing AZ photoresists.
Related Information
Standard equipment for photolithography, such as spin coating AZ photoresists onto various substrates. Can be used to support a range of applications including MEMS, photonics, microfluidics, micropatterning, optics, electronics etc
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fumehoods Biological Safety Cabinets
Topsafe Class II
QLD Node
University of Queensland
Description
A recirculating fume cupboard with a spin coater and a hot plate.
Related Information
Standard equipment for photolithography, using a wide range of photoresists (AZ, SU8, PPA, PMMA) and various substrates.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fumehoods Process specific
Fumehoods for lithography processes
QLD Node
University of Queensland
Description
This recirculating fume cupboard houses a spin coater, a hot plate, and a development station which are used for processing AZ photoresists.
Related Information
Standard equipment for photolithography, such as spin coating AZ photoresists onto various substrates. Can be used to support a range of applications including MEMS, photonics, microfluidics, micropatterning, optics, electronics etc
Tool Contact
anff@uq.edu.au