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He Ion Microscope (HIM) Etching
He Ion Microscope (HIM) Etching
He Ion Microscopy(HIM) combines milling of samples along with imaging at sub-nanometre resolution. Ion microscopy is a type of microscopy that uses a beam of ions (charged atoms or molecules) to image the surface or the interior of a sample. Ion microscopy can achieve high resolution, high sensitivity, and high depth of field.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
He Ion Microscope
No need for conductive coatings traditionally required by SEM
University of Melbourne
VIC Node
Description
Gas field ion source based equipment for nanofabrication and high resolution imaging
Related Information
He/Ne beam for nano-scale milling
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
He Ion Microscope
No need for conductive coatings traditionally required by SEM
University of Melbourne
VIC Node
Description
Gas field ion source based equipment for nanofabrication and high resolution imaging
Related Information
He/Ne beam for nano-scale milling
Tool Contact
elena.taran@unimelb.edu.au
