
Maskless lithography
Maskless lithography
Maskless lithography can be used to speed up the lithography process, and to save money by negating the need to fabricate steps required. Micropatterning is a lithography process that involves an image being projected directly onto a photoresist without the use of a mask.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
Direct writer, DMO ML3 Pro
ANFF NSW UNSW
Maskless UV exposure system, Intelligent Micropatterning SF100 XPRESS
ANFF VIC MCN
Maskless Writer with backside alignment, ML3 Pro DMO
ANFF NSW UNSW