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Maskless lithography
Maskless lithography
Maskless lithography can be used to speed up the lithography process, and to save money by negating the need to fabricate steps required. Micropatterning is a lithography process that involves an image being projected directly onto a photoresist without the use of a mask.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Intelligent Micropatterning SF100 XPRESS
Maskless micropatterning system
Melbourne Centre for Nanofabrication
VIC Node
Description
A maskless photolithography system capable of writing features down to 1 μm, that offers speed and cost benefits over masked systems.
Related Information
A wide range of materials can be processed, and provides great control in writing and aligning fine features on smaller substrates. The process us non-contact, which reduces risk of damaged samples. Commonly used to quickly and accurately create photomasks.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Intelligent Micropatterning SF100 XPRESS
Maskless micropatterning system
Melbourne Centre for Nanofabrication
VIC Node
Description
A maskless photolithography system capable of writing features down to 1 μm, that offers speed and cost benefits over masked systems.
Related Information
A wide range of materials can be processed, and provides great control in writing and aligning fine features on smaller substrates. The process us non-contact, which reduces risk of damaged samples. Commonly used to quickly and accurately create photomasks.
Tool Contact
mcn-enquiries@nanomelbourne.com