
Microwave Plasma Enhanced Chemical Vapour Deposition (MPCVD)
Microwave Plasma Enhanced Chemical Vapour Deposition (MPCVD)
MPCVD is a chemical vapour deposition process which uses a continuous microwave source to create and help to maintain a highly reactive plasma made up of the reacting chemicals and necessary catalysts. MPCVD is heavily used in the ANFF network to deposit layers of diamond – methane and hydrogen are introduced and used to grow new diamond on a diamond-seeded substrate. ANFF equipment can introduce dopants to the carbon structure while its being grown. These include boron which can create superconducting diamond, and nitrogen vacancies which can produce interesting photo-luminescence properties that are being exploited for quantum information systems.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
CVD, Seki AX6300
ANFF OPTOFAB Macquarie
Microwave Diamond Deposition, BDD
ANFF VIC MCN
Microwave Diamond Deposition, NV
ANFF VIC MCN
Microwave Plasma Deposition System (MWCVD), Astex PDS-17
ANFF NSW UTS
Microwave Plasma Deposition System (MWCVD), Seki Plasma Deposition System
ANFF NSW UTS
TOOL MAKE AND MODEL
LOCATION
CVD, Seki AX6300
MPCVD system for deposition of diamond
Description
CVD reactor for growing polydiamond films from methane/hydrogen chemistries.
Related Information
2 inch sample stage MPCVD system for deposition of diamond
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
LOCATION
Microwave Plasma Deposition System (MWCVD), Seki Plasma Deposition System
MPCVD system for deposition of doped diamond
Description
Small bell-jar type reactor for growing small samples of doped diamond films
Related Information
Doped films. Nitrogen, Boron, Germanium, Nickel etc. MPCVD system for deposition of doped diamond
Tool Contact
Toby.Shanley-1@uts.edu.au
TOOL MAKE AND MODEL
LOCATION
Microwave Diamond Deposition, BDD
Description
Used to coat seeded samples of any shape with boron-doped diamond.
Related Information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Microwave Diamond Deposition, NV
Description
Used to coat seeded samples of any shape with nitrogen-vacancy (NV) doped diamond.
Related Information
Tool Contact
mcn-enquiries@nanomelbourne.com