
Multiple mask lithography
Multiple mask lithography
Photolithography is a technique that transfers a pattern from a photomask to a substrate coated with a light-sensitive material called photoresist. The pattern is created by exposing the photoresist to light from a source through the mask, and then developing it in a solution. The substrate can then undergo other processes such as deposition or etching. Some devices may require multiple photolithography steps with different masks, which need to be aligned precisely to the previous layers. For this purpose, mask aligners are used to ensure accuracy and control the exposure conditions.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
Contact / Proximity Mask Aligner, Karl Suss MA6
ANFF OPTOFAB ANU
Displacement Talbot Lithography, Eulitha PhableR
ANFF VIC MCN
Mask aligner, EVG610
ANFF NSW USYD
Mask aligner, EVG 620
ANFF QLD UQ - AIBN
Mask Aligner, EVG 620
ANFF SA
Mask Aligner, Karl SUSS
ANFF ACT
Mask Aligner, Karl Suss MA6
ANFF NSW UNSW
Mask Aligner, Karl Suss MA6
ANFF VIC MCN
Mask Aligner, Neutronix Quintel
ANFF QLD Griffith
Mask Aligner, UV NIL EVG
ANFF VIC MCN
Maskless aligner, Heidelberg MLA100
ANFF NSW USYD
Photolithography Mask Aligner, Suss Microtek MA6
ANFF WA
Projection Mask Aligner, Canon MPA500-FAB 1x
ANFF OPTOFAB ANU
UV Mask Aligner, MJB3
ANFF NSW UNSW