Nano Imprint Lithography
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Nano Imprint Lithography

Nanoimprint lithography uses a transparent mould to deform a layer of photoresist into a desired topography. Light is then passed through the clear mould to cure the resist and make these deformations permanent. This technique relies on the accuracy of the mould but can be used to create many identical versions of the same structure.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
Mask Aligner, EVG 620 with UV Nanoprint
ANFF VIC MCN
Nano-imprint Lithography, EVG 620
ANFF ACT