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Optical profilometry
Optical profilometry
Optical profilometry is a non-contact form of profilometry that can be used to characterise the surface steps and the roughness of a material. Optical profilometry employs phase-shifting and/or vertical scanning interferometry to resolve the topology of complex 3D structures. The technique marries precision z-axis control with interference-based techniques to resolve features from the angstrom to millimetre scale. The technique lends itself well to die-based measurements for ISO/QA and large area mapping.Profilometry is useful in process control steps such as measuring etch depth and lithography patterns.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
KLA Zeta 300
Optical profilometer
QLD Node
University of Queensland
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
Measures multilayer film thickness, surface roughness and step heights, CD measurement and 3D profiling. Automated metrology and data analysis. Substrate size up to 6 inch wafer and 100 mm thick. Z resolution of 1 nm. Lateral resolution >370 nm at 150x.
Tool Contact
anff@uq.edu.au
Veeco Wyko NT1100
Optical profilometer
QLD Node
University of Queensland
Description
For optical 3D profiling of samples and surface roughness measurements of most materials. Uses an interference technique to construct 3D images of nanofabricated structures
Related Information
Substrates with a scan area of 2 x 2.5 mm. White light interferometer for vertical measurement range of 0.1 nm to 2 mm with a vertical resolution 1 < 1 Å.
Tool Contact
anff@uq.edu.au
Veeco Wyko NT9100
Optical profilometer
SA Node
University of South Australia
Description
Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.
Related Information
Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics.
Tool Contact
Simon.Doe@unisa.edu.au
Zygo NewView6300
Optical profilometer
University of Western Australia
WA Node
Description
Non-contact 3D scanning white light and optical phase-shifting interferometer. Featured modes: Microscope, Films, Stitch and Dynamic MEMS.
Related Information
Vertical resolution up to 0.1 nm. Field of view from 0.04 to 14 mm.
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
KLA Zeta 300
Optical profilometer
University of Western Australia
WA Node
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
Measures multilayer film thickness, surface roughness and step heights, CD measurement and 3D profiling. Automated metrology and data analysis. Substrate size up to 6 inch wafer and 100 mm thick. Z resolution of 1 nm. Lateral resolution >370 nm at 150x.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Veeco Wyko NT1100
Optical profilometer
University of Western Australia
WA Node
Description
For optical 3D profiling of samples and surface roughness measurements of most materials. Uses an interference technique to construct 3D images of nanofabricated structures
Related Information
Substrates with a scan area of 2 x 2.5 mm. White light interferometer for vertical measurement range of 0.1 nm to 2 mm with a vertical resolution 1 < 1 Å.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Veeco Wyko NT9100
Optical profilometer
University of Western Australia
WA Node
Description
Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.
Related Information
Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics.
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Zygo NewView6300
Optical profilometer
University of Western Australia
WA Node
Description
Non-contact 3D scanning white light and optical phase-shifting interferometer. Featured modes: Microscope, Films, Stitch and Dynamic MEMS.
Related Information
Vertical resolution up to 0.1 nm. Field of view from 0.04 to 14 mm.
Tool Contact
anff-wa@uwa.edu.au