Optical Profilometry
Optical Profilometry
Optical profilometry is a non-contact form of profilometry that can be used to characterise the surface steps and the roughness of a material. Optical profilometry employs phase-shifting and/or vertical scanning interferometry to resolve the topology of complex 3D structures. The technique marries precision z-axis control with interference-based techniques to resolve features from the angstrom to millimetre scale. The technique lends itself well to die-based measurements for ISO/QA and large area mapping. Profilometry is useful in process control steps such as measuring etch depth and lithography patterns.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
3D Optical Profilometer, Bruker Contour GTI
ANFF VIC MCN
Metrology, Wyko NT9100 white light interferometric profiler
ANFF OPTOFAB ANU
Non Contact Optical Profiler, Dutch United Instruments
ANFF SA
Optical 3D profiler, Veeco Wyko NT1100
ANFF QLD UQ - AIBN
Optical 3D profiler, Veeco Wyko NT9100
ANFF SA
Optical Profilometer, Zygo NewView6300
ANFF WA
Optical profilometer, Zygo Nexviex NX2
ANFF SA
Optical surface profilometer, KLA Zeta-20
ANFF MATERIALS Newcastle
Zeta potential system, KLA Zeta 300
ANFF QLD UQ - AIBN
TOOL MAKE AND MODEL
LOCATION
3D Optical Profilometer, Bruker Contour GTI
Description
Bruker Cotour GTI Optical Profiler is a benchtop system for fast, non-contact 3D surface metrology. Its proprietary tip/tilt in the head provides unmatched user flexibility for production setup and inspection. By coupling the auto tip/tilt functionality with the optical path in the microscope head, it has coupled the point of inspection to the line of sight independent of tilt
Related Information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Non Contact Optical Profiler, Dutch United Instruments
Description
3D non contact profiler that provides ultra high precision imaging of optical geometries
Related Information
Tool Contact
ANFF-SA@unisa.edu.au
TOOL MAKE AND MODEL
LOCATION
Optical 3D profiler, Veeco Wyko NT1100
Optical profilometer
Description
For optical 3D profiling of samples and surface roughness measurements of most materials. Uses an interference technique to construct 3D images of nanofabricated structures
Related Information
Substrates with a scan area of 2 x 2.5 mm. White light interferometer for vertical measurement range of 0.1 nm to 2 mm with a vertical resolution 1 < 1 Å. Optical profilometer
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
LOCATION
Optical 3D profiler, Veeco Wyko NT9100
Optical profilometer
Description
Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.
Related Information
Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics. Optical profilometer
Tool Contact
ANFF-SA@unisa.edu.au
TOOL MAKE AND MODEL
LOCATION
Optical profilometer, Zygo Nexviex NX2
Optical profilometer
Description
Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.
Related Information
Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics. Optical profilometer
Tool Contact
ANFF-SA@unisa.edu.au
TOOL MAKE AND MODEL
LOCATION
Optical surface profilometer, KLA Zeta-20
Can accommodate upto a 30cm square sample.
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
Can accommodate upto a 30cm square sample.
Tool Contact
anff@newcastle.edu.au
TOOL MAKE AND MODEL
LOCATION
Metrology, Wyko NT9100 white light interferometric profiler
Material characterisation
Description
Non-contact optical surface profiler using white light interferometry and phase shifting interferometry. Lateral resolution to 0.5 microns, vertical is sub-nm. Can stitc fields to map larger objects.
Related Information
""This is a convenient, high performance non-contact 3 dimensional metrology tool to measure surface roughness,Objectives:5X, 20X, 50X, (100x on request) Through Transmissive Media 5x objective.Field-of-View Multipliers:0.55X, 1X, 2X,Measurement Array 640 x 480, non-interlaced.Automated 100mm Z-axis; ±6° tip/tilt stage; 150mm XY auto stage."" Material characterisation
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
LOCATION
Optical Profilometer, Zygo NewView6300
Optical profilometer
Description
Non-contact 3D scanning white light and optical phase-shifting interferometer. Featured modes: Microscope, Films, Stitch and Dynamic MEMS.
Related Information
Vertical resolution up to 0.1 nm. Field of view from 0.04 to 14 mm. Optical profilometer
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
LOCATION
Zeta potential system, KLA Zeta 300
Optical profilometer
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
Measures multilayer film thickness, surface roughness and step heights, CD measurement and 3D profiling. Automated metrology and data analysis. Substrate size up to 6 inch wafer and 100 mm thick. Z resolution of 1 nm. Lateral resolution >370 nm at 150x. Optical profilometer
Tool Contact
anff@uq.edu.au