Optical profilometry
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Optical profilometry

Optical profilometry is a non-contact form of profilometry that can be used to characterise the surface steps and the roughness of a material. Optical profilometry employs phase-shifting and/or vertical scanning interferometry to resolve the topology of complex 3D structures. The technique marries precision z-axis control with interference-based techniques to resolve features from the angstrom to millimetre scale. The technique lends itself well to die-based measurements for ISO/QA and large area mapping. Profilometry is useful in process control steps such as measuring etch depth and lithography patterns.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
3D-optical Profilometer
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Bruker Cotour GTI Optical Profiler is a benchtop system for fast, non-contact 3D surface metrology. Its proprietary tip/tilt in the head provides unmatched user flexibility for production setup and inspection. By coupling the auto tip/tilt functionality with the optical path in the microscope head, it has coupled the point of inspection to the line of sight independent of tilt
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Non Contact Optical Profiler- DUI6000
More information to come.
SA Node University of South Australia
Description
Fast, highly accurate, and non-contact NMF surface metrology tool
Related Information
Fast, highly accurate non-contact NMF surface metrology tool suitible for measuring flat, convex, concave, sphere, asphere, freeform as well as off-axis and non-circular glass, metallic optical parts up to 600mm diameter.
Tool Contact
Jason.Gascooke@flinders.edu.au
Optical 3D profiler- Veeco Wyko NT1100
Optical profilometer
QLD Node University of Queensland
Description
For optical 3D profiling of samples and surface roughness measurements of most materials. Uses an interference technique to construct 3D images of nanofabricated structures
Related Information
Substrates with a scan area of 2 x 2.5 mm. White light interferometer for vertical measurement range of 0.1 nm to 2 mm with a vertical resolution 1 < 1 Å.
Tool Contact
anff@uq.edu.au
Optical profiler Veeco Wyko NT9100
Optical profilometer
SA Node University of South Australia
Description
Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.
Related Information
Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics.
Tool Contact
Simon.Doe@unisa.edu.au
Optical surface profilometer- KLA
Can accommodate upto a 30cm square sample.
Materials Node University of Newcastle
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
More information to come.
Tool Contact
anff@newcastle.edu.au
Surface optical profiler- Zygo NewView6300
Optical profilometer
University of Western Australia WA Node
Description
Non-contact 3D scanning white light and optical phase-shifting interferometer. Featured modes: Microscope, Films, Stitch and Dynamic MEMS.
Related Information
Vertical resolution up to 0.1 nm. Field of view from 0.04 to 14 mm.
Tool Contact
anff-wa@uwa.edu.au
Wyko NT9100 Profilometer
Material characterisation
Australian National University (ANU) Optofab Node
Description
The Wyko NT9100 profilometer is a high-performance, non-contact optical surface profiler. Designed for convenience and reliability, it excels in measuring a broad range of surfaces, from ultra-smooth to very rough, with precision from sub-nanometer roughness to millimeter-scale features. Ideal for R&D, wear analysis, and process control, it can create detailed height maps of single or multiple stitched images.
Related Information
This is a convenient, high performance non-contact 3 dimensional metrology tool to measure surface roughness,Objectives:5X, 20X, 50X, (100x on request) Through Transmissive Media 5x objective.Field-of-View Multipliers:0.55X, 1X, 2X,Measurement Array 640 x 480, non-interlaced.Automated 100mm Z-axis; ±6° tip/tilt stage; 150mm XY auto stage.
Tool Contact
stephen.madden@anu.edu.au
Zeta potential system- KLA Zeta 300
Optical profilometer
QLD Node University of Queensland
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
Measures multilayer film thickness, surface roughness and step heights, CD measurement and 3D profiling. Automated metrology and data analysis. Substrate size up to 6 inch wafer and 100 mm thick. Z resolution of 1 nm. Lateral resolution >370 nm at 150x.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
3D-optical Profilometer
More information to come.
QLD Node University of Queensland
Description
Bruker Cotour GTI Optical Profiler is a benchtop system for fast, non-contact 3D surface metrology. Its proprietary tip/tilt in the head provides unmatched user flexibility for production setup and inspection. By coupling the auto tip/tilt functionality with the optical path in the microscope head, it has coupled the point of inspection to the line of sight independent of tilt
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Non Contact Optical Profiler- DUI6000
More information to come.
QLD Node University of Queensland
Description
Fast, highly accurate, and non-contact NMF surface metrology tool
Related Information
Fast, highly accurate non-contact NMF surface metrology tool suitible for measuring flat, convex, concave, sphere, asphere, freeform as well as off-axis and non-circular glass, metallic optical parts up to 600mm diameter.
Tool Contact
Jason.Gascooke@flinders.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Optical 3D profiler- Veeco Wyko NT1100
Optical profilometer
QLD Node University of Queensland
Description
For optical 3D profiling of samples and surface roughness measurements of most materials. Uses an interference technique to construct 3D images of nanofabricated structures
Related Information
Substrates with a scan area of 2 x 2.5 mm. White light interferometer for vertical measurement range of 0.1 nm to 2 mm with a vertical resolution 1 < 1 Å.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Optical profiler Veeco Wyko NT9100
Optical profilometer
QLD Node University of Queensland
Description
Provides 3D imaging of channel geometries for process control quality assurance and product validation. Capable of taking sub-nanometre to millimetre-high steps in the z dimension.
Related Information
Coherence scanning interferometry provides fast, accurate and repeatable output. It is used to measure step heights, roughness and surface topography of components.Capable of analysing many materials and components including a range of metals, MEMS, semiconductors and optics.
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Optical surface profilometer- KLA
Can accommodate upto a 30cm square sample.
QLD Node University of Queensland
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
More information to come.
Tool Contact
anff@newcastle.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Surface optical profiler- Zygo NewView6300
Optical profilometer
QLD Node University of Queensland
Description
Non-contact 3D scanning white light and optical phase-shifting interferometer. Featured modes: Microscope, Films, Stitch and Dynamic MEMS.
Related Information
Vertical resolution up to 0.1 nm. Field of view from 0.04 to 14 mm.
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Wyko NT9100 Profilometer
Material characterisation
QLD Node University of Queensland
Description
The Wyko NT9100 profilometer is a high-performance, non-contact optical surface profiler. Designed for convenience and reliability, it excels in measuring a broad range of surfaces, from ultra-smooth to very rough, with precision from sub-nanometer roughness to millimeter-scale features. Ideal for R&D, wear analysis, and process control, it can create detailed height maps of single or multiple stitched images.
Related Information
This is a convenient, high performance non-contact 3 dimensional metrology tool to measure surface roughness,Objectives:5X, 20X, 50X, (100x on request) Through Transmissive Media 5x objective.Field-of-View Multipliers:0.55X, 1X, 2X,Measurement Array 640 x 480, non-interlaced.Automated 100mm Z-axis; ±6° tip/tilt stage; 150mm XY auto stage.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Zeta potential system- KLA Zeta 300
Optical profilometer
QLD Node University of Queensland
Description
System features an automated stage and provides quick and flexible profiling of surface topography. The technique allows for superior capture of angled surfaces when compared to interferometric techniques. Used for 3D images using a shallow depth of field objective. This is then reconstructed into a 3D image.
Related Information
Measures multilayer film thickness, surface roughness and step heights, CD measurement and 3D profiling. Automated metrology and data analysis. Substrate size up to 6 inch wafer and 100 mm thick. Z resolution of 1 nm. Lateral resolution >370 nm at 150x.
Tool Contact
anff@uq.edu.au