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Reactor
Reactor
Reactors provide controllable environments in which to produce new materials.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom SPT Micro EpiFlx
Large batch production reactor for SiC Deposition
Griffith University
QLD Node
Description
Global standard for thin epitaxial thin films of SiC. Can process wafers of up to 300mm Si wafers with a uniformity of sub-1%.
Related Information
Production reactor for the deposition of SiC on Si for MEMs, photonic and mechanical exploitation of SiC.
Tool Contact
glenn.walker@griffith.edu.au
GMM Pfaudler 35L Reactor system (Zone 1 – Class 3 solvents)
35-litre jacketed reactor
Materials Node
University of Wollongong
Description
35L Reactor system (Zone 1 - Class Printer - 35-litre
Related Information
AinMw449, AinMw446
Tool Contact
sbeirne@uow.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom SPT Micro EpiFlx
Large batch production reactor for SiC Deposition
Materials Node
University of Wollongong
Description
Global standard for thin epitaxial thin films of SiC. Can process wafers of up to 300mm Si wafers with a uniformity of sub-1%.
Related Information
Production reactor for the deposition of SiC on Si for MEMs, photonic and mechanical exploitation of SiC.
Tool Contact
glenn.walker@griffith.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
GMM Pfaudler 35L Reactor system (Zone 1 – Class 3 solvents)
35-litre jacketed reactor
Materials Node
University of Wollongong
Description
35L Reactor system (Zone 1 - Class Printer - 35-litre
Related Information
AinMw449, AinMw446
Tool Contact
sbeirne@uow.edu.au