Scanning Electron Microscopy (SEM)
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Scanning Electron Microscopy (SEM)

Focused Ion Beam (FIB) milling provides significant advantages as a single-step, nanoscale prototyping method that doesn’t require a mask or resist. It is capable of performing: subtractive lithography in which atoms are locally milled away by physical sputtering with sub-10nm resolution; additive lithography in which materials are locally deposited with sub-10nm resolution; local ion implantation for fabrication of an etching mask for subsequent pattern transfer; and direct material modification by ion-induced mixing.FIB milling is a versatile technique with a wide range of applications including advanced materials development/characterisation; resist-free, high-resolution patterning of nanostructures; cross-sectional analysis of samples; sample preparation for transmission electron microscopy (TEM) and for atom probe analysis.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
Benchtop Scanning Electron Microscope, SNE-4500M Plus
ANFF SA
Bench Top Scanning Electron Microscope, ThermoFisher Phenom Pharos
ANFF NSW UTS
Desktop Scanning Electron Microscope (SEM), Hitachi
ANFF VIC MCN
Desktop Scanning Electron Microscope (SEM), Thermo Scientific Phenom XLG
ANFF NSW USYD
FIB-SEM, FEI Helios NanoLab 600 Dual Beam
ANFF ACT
High-resolution field emission gun (FEG SEM), FEI Apreo
ANFF VIC MCN
High-resolution field emission gun (FEG SEM), FEI NovaNanoSEM 430 
ANFF VIC MCN
Micromanipulator, Kleindieck MM3A
ANFF OPTOFAB Macquarie
Scanning Electron Microscope (SEM-CL), FEI Verios 460L
ANFF ACT
Scanning Electron Microscope (SEM), Hitachi Flex
ANFF VIC Uni Melbourne
Scanning Electron Microscope (SEM), Hitachi TM3030
ANFF OPTOFAB Macquarie
Scanning Electron Microscope (SEM), Jeol IT-300
ANFF QLD UQ - AIBN
Scanning Electron Microscope, ThermoFisher Scientific Apreo 2S
ANFF QLD Griffith
Thermal field emission scanning electron microscope (FE-SEM), Jeol JSM 7100F
ANFF OPTOFAB Macquarie