
Spectroscopic Ellipsometry
Spectroscopic Ellipsometry
Spectroscopic ellipsometry is an optical characterisation technique which provides a highly sensitive, contactless method for thin film measurements. Multiple light wavelengths and variable angles of polarised light are reflected off the surface of a sample. As this light reflects, its characteristics change depending on a number of the sample’s properties – it can therefore be used to characterise film thickness as well as composition such as roughness, crystalline nature, electrical conductivity and doping concentration.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
Ellipsometer, JA Woollam M2000
ANFF NSW USYD
Spectroscopic Ellipsometer, J.A. Woollam IR-VASE
ANFF OPTOFAB Adelaide
Spectroscopic Ellipsometer, J.A. Woollam M2000
ANFF NSW UNSW
Spectroscopic Ellipsometer, J.A. Woollam M-2000
ANFF WA
Spectroscopic ellipsometer, J. A. Woollam M-2000-DI
ANFF ACT
Spectroscopic Ellipsometer, J.A. Woollam M-2000-XI
ANFF VIC Swinburne
Spectroscopic Ellipsometer, J.A. Woollam RC2
ANFF QLD UQ - AIBN
Spectroscopic Ellipsometer, J.A. Woollam VUV VASE
ANFF QLD Griffith
Spectroscopic Ellipsometer, Sopra GES-5E
ANFF WA
Thin Film Wafer Mapper, Filmetrics F50
ANFF VIC MCN
Variable Angle Rotating Analyser Ellipsometer, Beaglehole
ANFF OPTOFAB ANU
Variable Angle Spectroscopic Ellipsometer (VASE), J.A. Woollam M2000 DI
ANFF VIC MCN