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Spectroscopic ellipsometry
Spectroscopic ellipsometry
Spectroscopic ellipsometry is an optical characterisation technique which provides a highly sensitive, contactless method for thin film measurements. Multiple light wavelengths and variable angles of polarised light are reflected off the surface of a sample. As this light reflects, its characteristics change depending on a number of the sample’s properties – it can therefore be used to characterise film thickness as well as composition such as roughness, crystalline nature, electrical conductivity and doping concentration.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
J. A. Woollam M-2000-DI
Spectral Ellipsometer
ACT Node
Australian National University (ANU)
Description
Fully automated spectral ellipsometer to measure refractive index and thickness of materials.
Related Information
Spectral Range of 193 to 1,700 nm.
Tool Contact
horst.punzmann@anu.edu.au
J.A. Woollam IR-VASE
Measuring complex refractive index or dielectric function of thin films.
Optofab Node
University of Adelaide
Description
Common measurements include coating thickness, IR refractive indices and molecular bond vibrations.
Related Information
Specification: 1.7 to 30 μm (333 to 5900 wavenumbers)
Tool Contact
optofab@adelaide.edu.au
Sopra GES-5E ellipsometer
Ellipsometer
University of Western Australia
WA Node
Description
Measure film thickness, optical constants, characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response
Related Information
A motorized goniometer allows for incidence angles ranging from 20 degrees to 90 degrees. IR wavelenght range.
Tool Contact
anff-wa@uwa.edu.au
Spectroscopic Ellipsometer- J.A. Woollam M-2000-XI
Heated stage, liquid cell and QCM/Ellipsometry integration module. Regular analysis size 3 mm but can be reduced to 120 μm with focus probes
Swinburne University of Technology
VIC Node
Description
Characterises the optical properties of thin films to provide information on a variety of properties such as thickness and refractive index
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
Thin Film Wafer Mapper
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Motorised thin film mapping tool capable of measuring dielectric and photoresist film thickness over 4" and 6" samples
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Variable Angle Spectroscopic Ellipsometer (VASE)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Ellipsometric thin film characterisation
Related Information
The J. A. Woollam M-2000 DI spectroscopic ellipsometer provides fast and accurate thin film characterization over a wide spectroscopic range.
Tool Contact
mcn-enquiries@nanomelbourne.com
Wollam M-2000 ellipsometer
Ellipsometer
University of Western Australia
WA Node
Description
Measure film thickness, optical constants, characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response
Related Information
Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second. Fixed angle. VIS-NIR wavelength range.
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
J. A. Woollam M-2000-DI
Spectral Ellipsometer
University of Western Australia
WA Node
Description
Fully automated spectral ellipsometer to measure refractive index and thickness of materials.
Related Information
Spectral Range of 193 to 1,700 nm.
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
J.A. Woollam IR-VASE
Measuring complex refractive index or dielectric function of thin films.
University of Western Australia
WA Node
Description
Common measurements include coating thickness, IR refractive indices and molecular bond vibrations.
Related Information
Specification: 1.7 to 30 μm (333 to 5900 wavenumbers)
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sopra GES-5E ellipsometer
Ellipsometer
University of Western Australia
WA Node
Description
Measure film thickness, optical constants, characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response
Related Information
A motorized goniometer allows for incidence angles ranging from 20 degrees to 90 degrees. IR wavelenght range.
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Spectroscopic Ellipsometer- J.A. Woollam M-2000-XI
Heated stage, liquid cell and QCM/Ellipsometry integration module. Regular analysis size 3 mm but can be reduced to 120 μm with focus probes
University of Western Australia
WA Node
Description
Characterises the optical properties of thin films to provide information on a variety of properties such as thickness and refractive index
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Thin Film Wafer Mapper
More information to come.
University of Western Australia
WA Node
Description
Motorised thin film mapping tool capable of measuring dielectric and photoresist film thickness over 4" and 6" samples
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Variable Angle Spectroscopic Ellipsometer (VASE)
More information to come.
University of Western Australia
WA Node
Description
Ellipsometric thin film characterisation
Related Information
The J. A. Woollam M-2000 DI spectroscopic ellipsometer provides fast and accurate thin film characterization over a wide spectroscopic range.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Wollam M-2000 ellipsometer
Ellipsometer
University of Western Australia
WA Node
Description
Measure film thickness, optical constants, characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response
Related Information
Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second. Fixed angle. VIS-NIR wavelength range.
Tool Contact
anff-wa@uwa.edu.au
