Spectroscopic ellipsometry
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Spectroscopic ellipsometry

Spectroscopic ellipsometry is an optical characterisation technique which provides a highly sensitive, contactless method for thin film measurements. Multiple light wavelengths and variable angles of polarised light are reflected off the surface of a sample. As this light reflects, its characteristics change depending on a number of the sample’s properties – it can therefore be used to characterise film thickness as well as composition such as roughness, crystalline nature, electrical conductivity and doping concentration.