Sputtering
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Sputtering

Sputtering is a physical vapour deposition method that involves depositing thin films in a vacuum environment. During this process, a solid material and substrate are positioned separately within a vacuum system. A high-energy argon ion plasma stream is targeted at the material, resulting in the subject material being ejected and deposited onto the substrate, creating a thin film. As this is not an evaporative process, the temperatures required for sputtering are lower than evaporation methods. This makes it one of the most flexible deposition processes and it is particularly useful for depositing materials with a high melting point or a mixture of materials, as compounds that may evaporate at different rates, can be sputtered at the same rate. Certain processes will benefit from improved film adhesion due to higher impact energy. The sputtering process is used extensively in the semiconductor industry, screen displays, photovoltaics and magnetic data storage. Sputtering can be used to deposit a wide variety of thin films including metals, oxides, nitrides and alloys.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AJA Combinatorial Sputterer
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
The ATC-2200-HY has six sputter targets, one off-axis sputter target, e-beam source, in-situ ellipsometery and RHEED scanning capability. It is also fitted with a X-Y stage and masking system to deposit up to 25 index points in one deposition run.
Related Information
Combinatorial discovery of materials using vacuum based sputtering of different metals, metal oxide, metal sulphide, metal selenides, metal nitride, metal carbide thin films and mixtures thereof with thicknesses of ~5 – 1000’s of nanometres with a precision of 1.5% over a 6” diameter. Its applicability to deposit a wide variety of thin coatings makes it highly desirable for new material discovery and optimisation of absorber, transport and electrode materials for use in advanced solar cells.
Tool Contact
mcn-enquiries@nanomelbourne.com
AJA International ATC-2400 V
Sputtering system
ACT Node Australian National University (ANU)
Description
Magnetron sputter system with three DC sources and three RF sources
Related Information
A large choice of materials available. Provides reactive sputtering and co-sputtering.
Tool Contact
horst.punzmann@anu.edu.au
ANU Research Ion Beam Sputtering system
IBS deposition system
Australian National University (ANU) Optofab Node
Description
Ion Beam Sputtering System
Related Information
Ion Beam sputtering for research purpose. This is a system intended to provide low cost rapid turn around R&D on coating materials. It uses a 6cm ion gun and a single 3-6” sputter target, these being far less costly than the large ones used in the Spector.
Tool Contact
stephen.madden@anu.edu.au
Au Sputter Coater (EM Sample Prep)
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Desk magnetron sputter coater (DSR1)
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Edwards sputterer
Sputtering system
NSW Node University of New South Wales
Description
sputtering system, short throw (thick depositions)
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
EM Sample Prep Sputter Coater
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
HHV TF600
Sputtering system
NSW Node University of New South Wales
Description
sputtering system, 8" capability, multi-target, co-sputtering
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
Intlvac Nanochrome – Sputterer
AC/DC Sputtering system with co-deposition
Melbourne Centre for Nanofabrication VIC Node
Description
An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with three materials in the same run.Features ion beam cleaning.Recipe-based automated operation.Can be used to coat samples of up to 8 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
Magnetron Sputtering
RF/DC sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with two materials in the same run.Features ion beam cleaning.Manual operation.Can be used to coat samples of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
Pfeiffer DC sputter system
Metal sputtering tool
Australian National University (ANU) Optofab Node
Description
DC spouttering system for sputtering
Related Information
Metal film deposition. This system uses a single 6” diameter sputter target (Chromium or Aluminium Currently available) and a DC discharge to deposit metal films on substrates up to 150mm diameter
Tool Contact
stephen.madden@anu.edu.au
RF sputter deposition system- Kurt J. Lesker PVD75
RF sputter
RMIT VIC Node
Description
RF sputters
Related Information
DC/RF Magnetron sputtering system capable of sputter deposition of a wide range of materials. The instrument can be used for high temperature sputter deposition.
Tool Contact
arnan.mitchell@rmit.edu.au
Sputter Coater- 4Wave LANS DC
Biased target ion beam deposition system
University of Western Australia WA Node
Description
Provides atomically engineered thin films and interfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability.
Related Information
Typical deposited materials: Fe, Pd, Ce, Nb, Ga, Al, Si, and certain other materials upon request (Bi, Ga, Si, Ge, C, Eu, Dy, Fe, Ce, Al, Mg, Cu, Nb, Gd, Co, W, Ni, Pd, WTi, Ti).
Tool Contact
anff-wa@uwa.edu.au
Sputter Coater- AJA Orion
Sputtering system
SA Node University of South Australia
Description
This sputter coater comes equipped with a glove box and ellipsometer, as well as multiple DC and RF power sources that enable sequential or cosputtering. It utilizes a 4-magnetron sputtering system to deposit high-quality layers without pinholes and without requiring a vacuum break. It can accommodate substrates up to 6 inches in diameter.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO. The glove box allows for inert atmosphere sample preparation
Tool Contact
Simon.Doe@unisa.edu.au
Sputter coater- Emitech K550
Sputter Coater
NSW Node University of Sydney
Description
Small throw sputter coater for coating of small samples
Related Information
2 inch sputter targets of Au, Ag and Ti available.
Tool Contact
rpf.queries@sydney.edu.au
Sputter Coater- HHV TF500
Sputtering system
SA Node University of South Australia
Description
A 3 magnetron sputtering system for the deposition of high quality pinhole free layers.Able to accommodate up to 6 inch diameter substrates. Fitted with three sputter sources with a switching system to select from DC or RF power supplies. Multilayer deposition can be performed without breaking vacuum.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO
Tool Contact
Simon.Doe@unisa.edu.au
Sputter Cr Quorum
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Chromium sputtering instrument devoted to EBL sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Sputtering system- AJA International ATC-2200
RF/DC sputtering system
QLD Node University of Queensland
Description
The system has RF and DC sputter sources in addition to Argon, Oxygen and Nitrogen gases for reactive film deposition.
Related Information
Vacuum Load lock. Argon, nitrogen and oxygen gases available. Substrate heater to 350°C. Wafer size up to 8 inch and wafer holder can be rotated.
Tool Contact
anff@uq.edu.au
Veeco Spector IBS
IBS deposition for AR,HR,thin film for semicon & photonics applications
Australian National University (ANU) Optofab Node
Description
Ion Beam sputter system for Ta2O5,SiO2,Ti,Ta,Si materials
Related Information
For AR,HR coating,optimised for SiO2,Ta2O5,Ti,Ta etc. This is an early generation Spector tool that has been considerably enhanced by the addition of a custom door with large planetary fixture with infinitely variable planetary ratios. The system is run in two modes:1) Standard single rotation for substrates up to 100mm (5 off max per run) which provides thickness uniformity over the 100mm diameter of ~0.3% 2) Dual position rotation which enables thickness uniformity <0.1% over up to 400mm diameter, though at the expense of significant reduction in deposition speed and increase in cost Ion Beam Sputtering system capable of producing coatings with sub 10ppm absorption in AR coatings up to ~2 microns thick, and even less in mirror stack where the absorption is reduced due to the smaller penetration into the stack
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AJA Combinatorial Sputterer
More information to come.
Australian National University (ANU) Optofab Node
Description
The ATC-2200-HY has six sputter targets, one off-axis sputter target, e-beam source, in-situ ellipsometery and RHEED scanning capability. It is also fitted with a X-Y stage and masking system to deposit up to 25 index points in one deposition run.
Related Information
Combinatorial discovery of materials using vacuum based sputtering of different metals, metal oxide, metal sulphide, metal selenides, metal nitride, metal carbide thin films and mixtures thereof with thicknesses of ~5 – 1000’s of nanometres with a precision of 1.5% over a 6” diameter. Its applicability to deposit a wide variety of thin coatings makes it highly desirable for new material discovery and optimisation of absorber, transport and electrode materials for use in advanced solar cells.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AJA International ATC-2400 V
Sputtering system
Australian National University (ANU) Optofab Node
Description
Magnetron sputter system with three DC sources and three RF sources
Related Information
A large choice of materials available. Provides reactive sputtering and co-sputtering.
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ANU Research Ion Beam Sputtering system
IBS deposition system
Australian National University (ANU) Optofab Node
Description
Ion Beam Sputtering System
Related Information
Ion Beam sputtering for research purpose. This is a system intended to provide low cost rapid turn around R&D on coating materials. It uses a 6cm ion gun and a single 3-6” sputter target, these being far less costly than the large ones used in the Spector.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Au Sputter Coater (EM Sample Prep)
More information to come.
Australian National University (ANU) Optofab Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Desk magnetron sputter coater (DSR1)
More information to come.
Australian National University (ANU) Optofab Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Edwards sputterer
Sputtering system
Australian National University (ANU) Optofab Node
Description
sputtering system, short throw (thick depositions)
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
EM Sample Prep Sputter Coater
More information to come.
Australian National University (ANU) Optofab Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
HHV TF600
Sputtering system
Australian National University (ANU) Optofab Node
Description
sputtering system, 8" capability, multi-target, co-sputtering
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Intlvac Nanochrome – Sputterer
AC/DC Sputtering system with co-deposition
Australian National University (ANU) Optofab Node
Description
An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with three materials in the same run.Features ion beam cleaning.Recipe-based automated operation.Can be used to coat samples of up to 8 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Magnetron Sputtering
RF/DC sputtering system
Australian National University (ANU) Optofab Node
Description
Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with two materials in the same run.Features ion beam cleaning.Manual operation.Can be used to coat samples of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Pfeiffer DC sputter system
Metal sputtering tool
Australian National University (ANU) Optofab Node
Description
DC spouttering system for sputtering
Related Information
Metal film deposition. This system uses a single 6” diameter sputter target (Chromium or Aluminium Currently available) and a DC discharge to deposit metal films on substrates up to 150mm diameter
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
RF sputter deposition system- Kurt J. Lesker PVD75
RF sputter
Australian National University (ANU) Optofab Node
Description
RF sputters
Related Information
DC/RF Magnetron sputtering system capable of sputter deposition of a wide range of materials. The instrument can be used for high temperature sputter deposition.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sputter Coater- 4Wave LANS DC
Biased target ion beam deposition system
Australian National University (ANU) Optofab Node
Description
Provides atomically engineered thin films and interfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability.
Related Information
Typical deposited materials: Fe, Pd, Ce, Nb, Ga, Al, Si, and certain other materials upon request (Bi, Ga, Si, Ge, C, Eu, Dy, Fe, Ce, Al, Mg, Cu, Nb, Gd, Co, W, Ni, Pd, WTi, Ti).
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sputter Coater- AJA Orion
Sputtering system
Australian National University (ANU) Optofab Node
Description
This sputter coater comes equipped with a glove box and ellipsometer, as well as multiple DC and RF power sources that enable sequential or cosputtering. It utilizes a 4-magnetron sputtering system to deposit high-quality layers without pinholes and without requiring a vacuum break. It can accommodate substrates up to 6 inches in diameter.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO. The glove box allows for inert atmosphere sample preparation
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sputter coater- Emitech K550
Sputter Coater
Australian National University (ANU) Optofab Node
Description
Small throw sputter coater for coating of small samples
Related Information
2 inch sputter targets of Au, Ag and Ti available.
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sputter Coater- HHV TF500
Sputtering system
Australian National University (ANU) Optofab Node
Description
A 3 magnetron sputtering system for the deposition of high quality pinhole free layers.Able to accommodate up to 6 inch diameter substrates. Fitted with three sputter sources with a switching system to select from DC or RF power supplies. Multilayer deposition can be performed without breaking vacuum.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sputter Cr Quorum
More information to come.
Australian National University (ANU) Optofab Node
Description
Chromium sputtering instrument devoted to EBL sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sputtering system- AJA International ATC-2200
RF/DC sputtering system
Australian National University (ANU) Optofab Node
Description
The system has RF and DC sputter sources in addition to Argon, Oxygen and Nitrogen gases for reactive film deposition.
Related Information
Vacuum Load lock. Argon, nitrogen and oxygen gases available. Substrate heater to 350°C. Wafer size up to 8 inch and wafer holder can be rotated.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Veeco Spector IBS
IBS deposition for AR,HR,thin film for semicon & photonics applications
Australian National University (ANU) Optofab Node
Description
Ion Beam sputter system for Ta2O5,SiO2,Ti,Ta,Si materials
Related Information
For AR,HR coating,optimised for SiO2,Ta2O5,Ti,Ta etc. This is an early generation Spector tool that has been considerably enhanced by the addition of a custom door with large planetary fixture with infinitely variable planetary ratios. The system is run in two modes:1) Standard single rotation for substrates up to 100mm (5 off max per run) which provides thickness uniformity over the 100mm diameter of ~0.3% 2) Dual position rotation which enables thickness uniformity <0.1% over up to 400mm diameter, though at the expense of significant reduction in deposition speed and increase in cost Ion Beam Sputtering system capable of producing coatings with sub 10ppm absorption in AR coatings up to ~2 microns thick, and even less in mirror stack where the absorption is reduced due to the smaller penetration into the stack
Tool Contact
stephen.madden@anu.edu.au