Sputtering
Home > Equipment > Sputtering
Sputtering

Sputtering is a physical vapour deposition method that involves depositing thin films in a vacuum environment. During this process, a solid material and substrate are positioned separately within a vacuum system. A high-energy argon ion plasma stream is targeted at the material, resulting in the subject material being ejected and deposited onto the substrate, creating a thin film. As this is not an evaporative process, the temperatures required for sputtering are lower than evaporation methods. This makes it one of the most flexible deposition processes and it is particularly useful for depositing materials with a high melting point or a mixture of materials, as compounds that may evaporate at different rates, can be sputtered at the same rate. Certain processes will benefit from improved film adhesion due to higher impact energy. The sputtering process is used extensively in the semiconductor industry, screen displays, photovoltaics and magnetic data storage. Sputtering can be used to deposit a wide variety of thin films including metals, oxides, nitrides and alloys.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
Au Sputter Coater, EM Sample Prep
ANFF VIC MCN
Biased Target Ion Beam Deposition System, 4Wave The Laboratory Alloy and Nanolayer System (LANS)
ANFF WA
DC Sputter System, Pfeiffer
ANFF OPTOFAB ANU
Desktop Sputter for SEM conductive layer coating, Denton Vacuum Desk V
ANFF ACT
Intellivation Metallisation System
ANFF MATERIALS Newcastle
Ion Beam Sputtering System, Veeco Spector
ANFF OPTOFAB ANU
Leica EM ACE600 sputter coater and plasma treatment
ANFF VIC La Trobe
Magnetron Sputterer, SNS Gamma
ANFF QLD Griffith
Magnetron Sputtering, Anatech Hummer BC-20
ANFF VIC MCN
Research Ion Beam Sputtering System, ANU RIBS
ANFF OPTOFAB ANU
RF sputter deposition system, Kurt J. Lesker PVD75
ANFF VIC RMIT
Sputter Coater, AJA Orion
ANFF SA
Sputter coater, Desk magnetron (DSR1)
ANFF VIC MCN
Sputter coater, Emitech K550
ANFF NSW USYD
Sputter Coater, HHV TF500
ANFF SA
Sputter, Cr Quorum
ANFF VIC MCN
Sputterer, AJA ATC-2000-UHV
ANFF NSW USYD
Sputterer, AJA Combinatorial
ANFF VIC MCN
Sputtering system, AJA International ATC-2200
ANFF QLD UQ - AIBN
Sputtering system, HHV TF600
ANFF NSW UNSW
Sputter System, AJA International ATC-2400 V
ANFF ACT
Sputter System, Edwards
ANFF NSW UNSW
Sputter System, EM Sample Prep
ANFF VIC MCN
Sputter System, Intlvac Nanochrome
ANFF VIC MCN