Sputtering
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Sputtering

Sputtering is a physical vapour deposition method that involves depositing thin films in a vacuum environment. During this process, a solid material and substrate are positioned separately within a vacuum system. A high-energy argon ion plasma stream is targeted at the material, resulting in the subject material being ejected and deposited onto the substrate, creating a thin film. As this is not an evaporative process, the temperatures required for sputtering are lower than evaporation methods. This makes it one of the most flexible deposition processes and it is particularly useful for depositing materials with a high melting point or a mixture of materials, as compounds that may evaporate at different rates, can be sputtered at the same rate. Certain processes will benefit from improved film adhesion due to higher impact energy. The sputtering process is used extensively in the semiconductor industry, screen displays, photovoltaics and magnetic data storage. Sputtering can be used to deposit a wide variety of thin films including metals, oxides, nitrides and alloys.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
Au Sputter Coater, EM Sample Prep
ANFF VIC MCN
Biased Target Ion Beam Deposition System, 4Wave The Laboratory Alloy and Nanolayer System (LANS)
ANFF WA
DC Sputter System, Pfeiffer
ANFF OPTOFAB ANU
Desktop Sputter for SEM conductive layer coating, Denton Vacuum Desk V
ANFF ACT
Intellivation Metallisation System
ANFF MATERIALS Newcastle
Ion Beam Sputtering System, Veeco Spector
ANFF OPTOFAB ANU
Leica EM ACE600 sputter coater and plasma treatment
ANFF VIC Latrobe
Magnetron Sputterer, SNS Gamma
ANFF QLD Griffith
Magnetron Sputtering, Anatech Hummer BC-20
ANFF VIC MCN
Research Ion Beam Sputtering System, ANU RIBS
ANFF OPTOFAB ANU
RF sputter deposition system, Kurt J. Lesker PVD75
ANFF VIC RMIT
Sputter Coater, AJA Orion
ANFF SA
Sputter coater, Desk magnetron (DSR1)
ANFF VIC MCN
Sputter coater, Emitech K550
ANFF NSW USYD
Sputter Coater, HHV TF500
ANFF SA
Sputter, Cr Quorum
ANFF VIC MCN
Sputterer, AJA ATC-2000-UHV
ANFF NSW USYD
Sputterer, AJA Combinatorial
ANFF VIC MCN
Sputtering system, AJA International ATC-2200
ANFF QLD UQ - AIBN
Sputtering system, HHV TF600
ANFF NSW UNSW
Sputter System, AJA International ATC-2400 V
ANFF ACT
Sputter System, Edwards
ANFF NSW UNSW
Sputter System, EM Sample Prep
ANFF VIC MCN
Sputter System, Intlvac Nanochrome
ANFF VIC MCN
TOOL MAKE AND MODEL
LOCATION
Au Sputter Coater, EM Sample Prep
Description
Sputter coating instrument for SEM sample preparation
Related Information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Desktop Sputter for SEM conductive layer coating, Denton Vacuum Desk V
Desktop Sputter for SEM sample preparation
Description
Desktop sputter used for SEM analysis to avoid electron surface charge build-up on samples.
Related Information
The desktop sputter is used to coat non-conductive SEM samples, typically with ~2nm of Au/Pd or Au to avoid electrons charging in the SEM column. Desktop Sputter for SEM sample preparation
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
LOCATION
Research Ion Beam Sputtering System, ANU RIBS
IBS deposition system
Description
Ion Beam Sputtering System using 3-4 targets and up to 100mm dia substrates
Related Information
Ion Beam sputtering for research purpose. This is a system intended to provide low cost rapid turn around R&D on coating materials. It uses a 6cm ion gun and a single 3-6” sputter target, these being far less costly than the large ones used in the Spector. IBS deposition system
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
LOCATION
Ion Beam Sputtering System, Veeco Spector
IBS deposition for AR,HR,thin film for semicon & photonics applications
Description
Ion Beam sputter system for Ta2O5,SiO2,TiO2 materials, substrates up to 450mm diameter.
Related Information
""For AR,HR coating,optimised for SiO2,Ta2O5,Ti,Ta etc. This is an early generation Spector tool that has been considerably enhanced by the addition of a custom door with large planetary fixture with infinitely variable planetary ratios. The system is run in two modes:1) Standard single rotation for substrates up to 100mm (5 off max per run) which provides thickness uniformity over the 100mm diameter of ~0.3% 2) Dual position rotation which enables thickness uniformity <0.1% over up to 400mm diameter, though at the expense of significant reduction in deposition speed and increase in cost Ion Beam Sputtering system capable of producing coatings with sub 10ppm absorption in AR coatings up to ~2 microns thick, and even less in mirror stack where the absorption is reduced due to the smaller penetration into the stack"" IBS deposition for AR,HR,thin film for semicon & photonics applications
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
LOCATION
Magnetron Sputtering, Anatech Hummer BC-20
RF/DC sputtering system
Description
Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with two materials in the same run.Features ion beam cleaning.Manual operation.Can be used to coat samples of up to 6 inches in diameter. RF/DC sputtering system
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
RF sputter deposition system, Kurt J. Lesker PVD75
RF sputter
Description
The Kurt J. Lesker PVD75 is a versatile RF/DC sputter deposition system designed for thin film fabrication in research and industrial applications. It supports multiple deposition techniques, including thermal evaporation, magnetron sputtering (TORUS), and electron beam evaporation.
Related Information
DC/RF Magnetron sputtering system capable of sputter deposition of a wide range of materials. The instrument can be used for high temperature sputter deposition. RF sputter
Tool Contact
mnrf@rmit.edu.au
TOOL MAKE AND MODEL
LOCATION
Biased Target Ion Beam Deposition System, 4Wave The Laboratory Alloy and Nanolayer System (LANS)
Biased target ion beam deposition system
Description
Provides atomically engineered thin films and interfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability.
Related Information
Typical deposited materials: Fe, Pd, Ce, Nb, Ga, Al, Si, and certain other materials upon request (Bi, Ga, Si, Ge, C, Eu, Dy, Fe, Ce, Al, Mg, Cu, Nb, Gd, Co, W, Ni, Pd, WTi, Ti). Biased target ion beam deposition system
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputter Coater, AJA Orion
Sputtering system
Description
This sputter coater comes equipped with a glove box and ellipsometer, as well as multiple DC and RF power sources that enable sequential or cosputtering. It utilises a 4-magnetron sputtering system to deposit high-quality layers without pinholes and without requiring a vacuum break. It can accommodate substrates up to 6 inches in diameter.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO. The glove box allows for inert atmosphere sample preparation Sputtering system
Tool Contact
ANFF-SA@unisa.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputter coater, Desk magnetron (DSR1)
Description
Sputter coating instrument for SEM sample preparation
Related Information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Sputter coater, Emitech K550
Sputter Coater
Description
Small throw sputter coater for coating of small samples
Related Information
2 inch sputter targets of Au, Ag and Ti available. Sputter Coater
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputter Coater, HHV TF500
Sputtering system
Description
A 3 magnetron sputtering system for the deposition of high quality pinhole free layers.Able to accommodate up to 6 inch diameter substrates. Fitted with three sputter sources with a switching system to select from DC or RF power supplies. Multilayer deposition can be performed without breaking vacuum.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO Sputtering system
Tool Contact
ANFF-SA@unisa.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputter, Cr Quorum
Description
Chromium sputtering instrument devoted to EBL sample preparation
Related Information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Sputterer, AJA Combinatorial
Description
The ATC-2200-HY has six sputter targets, one off-axis sputter target, e-beam source, in-situ ellipsometery and RHEED scanning capability. It is also fitted with a X-Y stage and masking system to deposit up to 25 index points in one deposition run.
Related Information
Combinatorial discovery of materials using vacuum based sputtering of different metals, metal oxide, metal sulphide, metal selenides, metal nitride, metal carbide thin films and mixtures thereof with thicknesses of ~5 – 1000’s of nanometres with a precision of 1.5% over a 6” diameter. Its applicability to deposit a wide variety of thin coatings makes it highly desirable for new material discovery and optimisation of absorber, transport and electrode materials for use in advanced solar cells.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Sputtering system, AJA International ATC-2200
RF/DC sputtering system
Description
The system has RF and DC sputter sources in addition to Argon, Oxygen and Nitrogen gases for reactive film deposition.
Related Information
Vacuum Load lock. Argon, nitrogen and oxygen gases available. Substrate heater to 350°C. Wafer size up to 8 inch and wafer holder can be rotated. RF/DC sputtering system
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputtering system, HHV TF600
Sputtering system
Description
Sputtering system, 8 capability, multi-target, co-sputtering
Related Information
More information to come. Sputtering system
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputter System, AJA International ATC-2400 V
Sputtering system
Description
Magnetron sputter system with three DC sources and three RF sources.
Related Information
A large choice of materials available. Provides reactive sputtering and co-sputtering. Sputtering system
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputter System, Edwards
Sputtering system
Description
Sputtering system, short throw (thick depositions)
Related Information
More information to come. Sputtering system
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
LOCATION
Sputter System, EM Sample Prep
Description
Sputter coating instrument for SEM sample preparation
Related Information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Sputter System, Intlvac Nanochrome
AC/DC Sputtering system with co-deposition
Description
An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with three materials in the same run.Features ion beam cleaning.Recipe-based automated operation.Can be used to coat samples of up to 8 inches in diameter. AC/DC Sputtering system with co-deposition
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
DC Sputter System, Pfeiffer
Description
Compact metal film deposition tool with DC sputtering capability, supporting Chromium, Aluminium, and Gold targets on substrates up to 150 mm diameter. Ideal for precise, uniform thin-film coatings in research and prototyping.
Related Information
Metal film deposition. This system uses a single 6” diameter sputter target (Chromium or Aluminium Currently available) and a DC discharge to deposit metal films on substrates up to 150mm diameter Metal sputtering tool
Tool Contact
stephen.madden@anu.edu.au