Sputtering
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Sputtering

Sputtering is a physical vapour deposition method that involves depositing thin films in a vacuum environment. During this process, a solid material and substrate are positioned separately within a vacuum system. A high-energy argon ion plasma stream is targeted at the material, resulting in the subject material being ejected and deposited onto the substrate, creating a thin film.As this is not an evaporative process, the temperatures required for sputtering are lower than evaporation methods. This makes it one of the most flexible deposition processes and it is particularly useful for depositing materials with a high melting point or a mixture of materials, as compounds that may evaporate at different rates, can be sputtered at the same rate. Certain processes will benefit from improved film adhesion due to higher impact energy.The sputtering process is used extensively in the semiconductor industry, screen displays, photovoltaics and magnetic data storage. Sputtering can be used to deposit a wide variety of thin films including metals, oxides, nitrides and alloys.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
4Wave The Laboratory Alloy and Nanolayer System (LANS)
Biased target ion beam deposition system
University of Western Australia WA Node
Description
Provides atomically engineered thin films and interfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability.
Related Information
Typical deposited materials: Fe, Pd, Ce, Nb, Ga, Al, Si, and certain other materials upon request.
Tool Contact
anff-wa@uwa.edu.au
AJA International ATC-2200
RF/DC sputtering system
QLD Node University of Queensland
Description
The system has RF and DC sputter sources in addition to Argon, Oxygen and Nitrogen gases for reactive film deposition.
Related Information
Vacuum Load lock. Argon, nitrogen and oxygen gases available. Substrate heater to 350°C. Wafer size up to 8 inch and wafer holder can be rotated.
Tool Contact
anff@uq.edu.au
AJA International ATC-2400 V
Sputtering system
ACT Node Australian National University (ANU)
Description
Magnetron sputter system with three DC sources and three RF sources
Related Information
A large choice of materials available. Provides reactive sputtering and co-sputtering.
Tool Contact
horst.punzmann@anu.edu.au
AJA Orion Sputter Coater
Sputtering system
SA Node University of South Australia
Description
This sputter coater comes equipped with a glove box and ellipsometer, as well as multiple DC and RF power sources that enable sequential or cosputtering. It utilizes a 4-magnetron sputtering system to deposit high-quality layers without pinholes and without requiring a vacuum break. It can accommodate substrates up to 6 inches in diameter.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO. The glove box allows for inert atmosphere sample preparation
Tool Contact
Simon.Doe@unisa.edu.au
Anatech Hummer BC-20
RF/DC sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with two materials in the same run.Features ion beam cleaning.Manual operation.Can be used to coat samples of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
Edwards sputterer
Sputtering system
NSW Node University of New South Wales
Description
sputtering system, short throw (thick depositions)
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
Emitech K550
Sputter Coater
NSW Node University of Sydney
Description
Small throw sputter coater for coating of small samples
Related Information
2 inch sputter targets of Au, Ag and Ti available.
Tool Contact
rpf.queries@sydney.edu.au
HHV TF500 Sputter Coater
Sputtering system
SA Node University of South Australia
Description
A 3 magnetron sputtering system for the deposition of high quality pinhole free layers.Able to accommodate up to 6 inch diameter substrates. Fitted with three sputter sources with a switching system to select from DC or RF power supplies. Multilayer deposition can be performed without breaking vacuum.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO
Tool Contact
Simon.Doe@unisa.edu.au
HHV TF600
Sputtering system
NSW Node University of New South Wales
Description
sputtering system, 8" capability, multi-target, co-sputtering
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
Intlvac Nanochrome
AC/DC Sputtering system with co-deposition
Melbourne Centre for Nanofabrication VIC Node
Description
An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with three materials in the same run.Features ion beam cleaning.Recipe-based automated operation.Can be used to coat samples of up to 8 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
4Wave The Laboratory Alloy and Nanolayer System (LANS)
Biased target ion beam deposition system
Melbourne Centre for Nanofabrication VIC Node
Description
Provides atomically engineered thin films and interfaces. The tool can vary process pressures, adatom energies, and provides good uniformity and repeatability.
Related Information
Typical deposited materials: Fe, Pd, Ce, Nb, Ga, Al, Si, and certain other materials upon request.
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AJA International ATC-2200
RF/DC sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
The system has RF and DC sputter sources in addition to Argon, Oxygen and Nitrogen gases for reactive film deposition.
Related Information
Vacuum Load lock. Argon, nitrogen and oxygen gases available. Substrate heater to 350°C. Wafer size up to 8 inch and wafer holder can be rotated.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AJA International ATC-2400 V
Sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
Magnetron sputter system with three DC sources and three RF sources
Related Information
A large choice of materials available. Provides reactive sputtering and co-sputtering.
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AJA Orion Sputter Coater
Sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
This sputter coater comes equipped with a glove box and ellipsometer, as well as multiple DC and RF power sources that enable sequential or cosputtering. It utilizes a 4-magnetron sputtering system to deposit high-quality layers without pinholes and without requiring a vacuum break. It can accommodate substrates up to 6 inches in diameter.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO. The glove box allows for inert atmosphere sample preparation
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Anatech Hummer BC-20
RF/DC sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with two materials in the same run.Features ion beam cleaning.Manual operation.Can be used to coat samples of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Edwards sputterer
Sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
sputtering system, short throw (thick depositions)
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Emitech K550
Sputter Coater
Melbourne Centre for Nanofabrication VIC Node
Description
Small throw sputter coater for coating of small samples
Related Information
2 inch sputter targets of Au, Ag and Ti available.
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
HHV TF500 Sputter Coater
Sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
A 3 magnetron sputtering system for the deposition of high quality pinhole free layers.Able to accommodate up to 6 inch diameter substrates. Fitted with three sputter sources with a switching system to select from DC or RF power supplies. Multilayer deposition can be performed without breaking vacuum.
Related Information
Commonly used for the fabrication of UV lithography and DRI etch masks. Can deposit metals including Au, Cr, Mo, Ti, TiO2, ITO
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
HHV TF600
Sputtering system
Melbourne Centre for Nanofabrication VIC Node
Description
sputtering system, 8" capability, multi-target, co-sputtering
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Intlvac Nanochrome
AC/DC Sputtering system with co-deposition
Melbourne Centre for Nanofabrication VIC Node
Description
An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with three materials in the same run.Features ion beam cleaning.Recipe-based automated operation.Can be used to coat samples of up to 8 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com