Stylus profilometry
Stylus profilometry
Stylus profilometry is a direct form of profilometry that can be used to characterise the surface steps and the roughness of a material. A stylus profilometer drags a metal tip along the surface of a sample and measuring the distance traced by the stylus tip and its deflection along the vertical axis to register slight changes in the surface height of a material. This measurement is then converted into a cross-sectional plot and can be used to resolve steps as small as 10nm. Optical profilometry employs phase-shifting and/or vertical scanning interferometry to resolve the topology of complex 3D structures. The technique marries precision z-axis control with interference based techniques to resolve features from the angstrom to millimetre scale. The technique lends itself well to die-based measurements for ISO/QA and large area mapping.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
2 Photon 3D Printer, UpNano NanoOne 1000
ANFF SA
3 axis CNC Mill, Fanuc Robodrill
ANFF SA
3 axis CNC Mill, King Rich Turrett
ANFF SA
3 axis CNC Mill, Kira SuperMill 2M
ANFF SA
3 axis CNC Mill, Roland MDX-50 CNC
ANFF SA
3C Silicon Carbide Epitaxial Furnace, SPT Micro EpiFlx
ANFF QLD Griffith
3D Bioprinter, Advanced Solutions BioAssemblyBot 400
ANFF MATERIALS Wollongong
3D Bio Printing System, GeSim BioScaffolder 3.2
ANFF MATERIALS Wollongong
3D Digital Optical Profiler, Leica DCM8
ANFF NSW USYD
3D Measuring Laser Microscope, Olympus OLS5100
ANFF MATERIALS Wollongong
3D Microprinting, Nanoscribe PPGT2
ANFF NSW USYD
3D Optical Microscope, Bruker ContourGT-K
ANFF OPTOFAB Adelaide
3D Optical Profilometer, Bruker Contour GTI
ANFF VIC MCN
3D Printer, Apium M220
ANFF MATERIALS Wollongong
3D Printer, Bambu Lab X1-Carbon
ANFF SA
3D Printer, CadWorks Profluidics 285D
ANFF SA
3D Printer, Desktop Metal Studio System
ANFF SA
3D printer, Figure 4
ANFF QLD UQ - AIBN
3D Printer, Form 3+
ANFF SA
3D Printer, FormLabs Form2
ANFF MATERIALS Wollongong
3D Printer, GE ConceptLaser Mlab 200R
ANFF MATERIALS Wollongong
3D Printer, Lithoz Ceramics
ANFF MATERIALS Wollongong
3D Printer, Lulzbot TAZ 5
ANFF SA
3D Printer, Makerbot Method X
ANFF SA
3D Printer, Markforged Mark Two
ANFF SA
3D Printer, Markforged Mk.2
ANFF MATERIALS Wollongong
3D Printer, Markforged X7
ANFF MATERIALS Wollongong
3D Printer Multimaterial, Stratasys J826
ANFF VIC MCN
3D printer, Objet Connex 350
ANFF MATERIALS Wollongong
3D Printer, Projet MJP 2500Plus
ANFF QLD UQ - AIBN
3D Printer, Stratasys F370
ANFF MATERIALS Wollongong
3D Printer, Stratasys Fortus 450mc
ANFF SA
3D Printer, Stratasys J735
ANFF SA
3D Printer, Stratasys J826
ANFF MATERIALS Wollongong
3D Printer, Trumpf TruPrint 1000
ANFF MATERIALS Wollongong
3D Printer, Ultimaker 2 Extended +
ANFF QLD UQ - AIBN
3D Printing, NanoScribe
ANFF VIC MCN
3D Scanner, Artec Leo
ANFF MATERIALS Wollongong
3D scanning, Artec Spyder
ANFF MATERIALS Wollongong
3D scanning, Artec Spyder
ANFF VIC MCN
4m Drawing Tower, Heathway/Controls Interface
ANFF OPTOFAB Adelaide
5 axis CNC Mill, HAAS Compact
ANFF SA Flinders
5 axis CNC Mill, Willemin Macodel 408S
ANFF SA
6m Drawing Tower, Heathway/Controls Interface
ANFF OPTOFAB Adelaide
Aerosol spray coater, Sono-Tek
ANFF VIC CSIRO
Amotic Layer Deposition (ALD) system
ANFF SA Flinders
Amotic Layer Deposition (ALD) system, Cambridge NanoTech Fiji 200
ANFF VIC MCN
Amotic Layer Deposition (ALD) system, Cambridge NanoTech Savannah S100
ANFF VIC MCN
Amotic Layer Deposition (ALD) system, Cambridge NanoTech Savannah S200
ANFF NSW UNSW
Amotic Layer Deposition (ALD) system, PicoSun R-200
ANFF NSW UNSW
TOOL MAKE AND MODEL
LOCATION
3D Optical Microscope, Bruker ContourGT-K
Description
This instrument performs non-contact 3D surface metrology measurements for laboratory research and production process control.
Related Information
Specifications: Maximum scan range: up to 10 mm; Vertical resolution: less than 0.01 nm. High precision surface profiler
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
LOCATION
Stylus Profiler, Bruker Dektak XT
Stylus profilometer
Description
Surface profiler to measure height steps, typically after lithography or etching.
Related Information
System accuracy down to 10 nm Stylus profilometer
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
LOCATION
Stylus Profiler, Bruker Dektak XT
Description
The Bruker Dektak XT is a stylus profiler designed for high-precision surface metrology in research and industrial applications. It provides repeatable, reliable measurements for thin film thickness, stress, surface roughness, and step height characterisation.
Related Information
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
LOCATION
Stylus Profiler, Bruker Dektak XT
Stylus profilometer
Description
The Bruker Dektak XT is a stylus profiler designed for high-precision surface metrology in research and industrial applications. It provides repeatable, reliable measurements for thin film thickness, stress, surface roughness, and step height characterisation.
Related Information
Allows for 2D scans across a surface up to 156 x 156 mm. Height measurement range from 1 nm to 1 mm. Force range from 0.03 mg to 15 mg. Can measure surfaces on both rigid and flexible substrates, and samples up to 50 mm thick. Solid and vacuum stages are available. Installed software allows for simple and quick data analysis. Stylus profilometer
Tool Contact
Jason.Gascooke@flinders.edu.au
TOOL MAKE AND MODEL
LOCATION
Stylus Profiler, Bruker DektakXT-A
Description
Instrument utilises a microscale stylus for tological and step height profiling
Related Information
A precision measurement instrument used to characterize surface topography by scanning a sharp stylus across a sample's surface. As the stylus moves, it records variations in height, producing a profile of the surface's roughness and texture. This technique is commonly employed in quality control, surface metrology, and materials research to assess surface finish, wear patterns, and other surface properties with high resolution and accuracy.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Stylus Profiler, Bruker Dektak XT-S
Stylus profilometer
Description
Used to measure the surface roughness of samples or to determine film thickness.
Related Information
55 mm scan length Stylus profilometer
Tool Contact
anff@newcastle.edu.au
TOOL MAKE AND MODEL
LOCATION
Stylus Profiler, Veeco Dektak 150
Description
The Veeco Dektak 150 is a stylus profiler designed for high-precision surface measurement in research and industrial applications. It provides accurate step height, roughness, and thin-film thickness analysis through contact-based profilometry.
Related Information
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
LOCATION
Contact Surface Profilometer, Veeco Dektak 150
Contact surface profilometer
Description
Measures thin film thickness, stress, surface roughness and form
Related Information
Large z-range of 1 mm enables larger step measurements. Stylus profilometers use a probe to detect the surface, physically moving a probe along the surface in order to acquire the surface height. This is done mechanically with a feedback loop that monitors the force from the sample pushing up against the probe as it scans along the surface. Contact surface profilometer
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
LOCATION
Stylus profilometer, Bruker Dektak XT
Stylus profilometer
Description
The Dektak XT profilometer is a stylus profiler capable of measuring step heights, film stress, and surface roughness. This tool has a 0.1 nm vertical resolution with a 6 inch automated stage.
Related Information
Sample size of up to 6 inch wafer. Single scan size of 55 mm. Vertical range of 1 mm Stylus profilometer
Tool Contact
rpf.queries@sydney.edu.au