Thermal Evaporation
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Thermal Evaporation

Thermal Evaporation is one of the simplest forms of physical vapor deposition (PVD). It uses heat to evaporate a high purity source material that moves through a vacuum chamber and deposits a thin film on a substrate. Thermal evaporation can be used to deposit metals, organic, and inorganic polymers. In this method, electrical energy is used to heat a filament which in turn heats a deposition material to the point of evaporation. The process can be performed at very high levels of vacuum to eliminate collisions with foreign particles and therefore fewer tendencies to introduce film impurities. High deposition rates can be achieved and lower energy particles can reduce substrate damage. Thermal evaporation is widely used when creating polymer solar cells and flexible electronics.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
Co-thermal / Co-sputter System, Angstrom Engineering Evovac
ANFF OPTOFAB ANU
Custom Dual Chamber System For Multi-Material Thermal Evaporation, Custom Dual Chamber Thermal Evaporator
ANFF WA
Custom System for Indium (In) Thermal Evaporation, Custom Indium Thermal Evaporator
ANFF WA
Custom System for Zinc Sulfide (ZnS) Thermal Evaporation, Custom Zinc Sulfide Thermal Evaporator
ANFF WA
E-beam evaporator, non-organic
ANFF QLD UQ - AIBN
E-beam evaporator, Organic
ANFF QLD UQ - AIBN
Intellivation Metallisation System
ANFF MATERIALS Newcastle
P-type Evaporator, Edwards Auto 306
ANFF NSW UNSW
Therma Evaporator, Angstrom Covap II
ANFF SA Flinders
Thermal Evaporator, ANU Octal
ANFF OPTOFAB ANU
Thermal evaporator, Edwards 306
ANFF NSW UNSW
Thermal Evaporator, Emitech 975K
ANFF SA
Thermal Evaporator, Kurt Lesker Nano36
ANFF ACT
Thermal evaporator, Lesker
ANFF NSW UNSW