UV Flood Exposure
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UV Flood Exposure

UV flood exposure sources provide quick, non discriminant processing of UV-sensitive materials and substrates. This can be incredibly useful when a sample doesn’t require more than one mask, or it’s an abnormal shape or size.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ABM Stand Alone UV Exposure System
UV flood exposure source
Melbourne Centre for Nanofabrication VIC Node
Description
A versatile system that floods the exposure chamber with UV light.
Related Information
This equipment can produce features that measure ~2 µm in size.A 7-inch sample well allows for versatility and processing of relatively large or abnormally shaped substrates and samples.Most substrate materials can be used.
Tool Contact
mcn-enquiries@nanomelbourne.com
Oriel UV Flood Illuminator
UV curing
Australian National University (ANU) Optofab Node
Description
For curing and exposing under UV light
Related Information
Oriel UV flood exposure services at >10 mW/cm2,Lamp Power: 1200W,maximum wafer size:150mm
Tool Contact
stephen.madden@anu.edu.au
UV LED masking system
More information to come.
QLD Node University of Queensland
Description
UV exposure system for wafer fabrication
Related Information
More information to come.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ABM Stand Alone UV Exposure System
UV flood exposure source
QLD Node University of Queensland
Description
A versatile system that floods the exposure chamber with UV light.
Related Information
This equipment can produce features that measure ~2 µm in size.A 7-inch sample well allows for versatility and processing of relatively large or abnormally shaped substrates and samples.Most substrate materials can be used.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Oriel UV Flood Illuminator
UV curing
QLD Node University of Queensland
Description
For curing and exposing under UV light
Related Information
Oriel UV flood exposure services at >10 mW/cm2,Lamp Power: 1200W,maximum wafer size:150mm
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
UV LED masking system
More information to come.
QLD Node University of Queensland
Description
UV exposure system for wafer fabrication
Related Information
More information to come.
Tool Contact
anff@uq.edu.au