Vapour phase etching
Vapour phase etching
Vapour phase etching involves exposing a substrate to a corrosive chemical in vapour form which will remove material that it comes into contact with. The sections of material that are removed can be selected by protecting parts of the substrate that are desired to be kept with a mask or coating.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
Custom HF etching
ANFF OPTOFAB Adelaide
HF vapour etcher, Idonus
ANFF QLD UQ - AIBN
HF vapour etcher, uEtch SPTS
ANFF NSW USYD
TOOL MAKE AND MODEL
LOCATION
Custom HF etching
HF etching facilities
Description
Hydrofluoric acid etching facilities.
Related Information
Hydrofluoric etching facilities in a specialised laboratory environment. Capability to etch glass and other materials. HF etching facilities
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
LOCATION
HF vapour etcher, Idonus
HF Vapour Etcher
Description
Performs dry etching of SiO2. HF vapour chemically etches SIO2 while substrate is heated
Related Information
Allows stiction free release of mechanical structures. HF Vapour Etcher
Tool Contact
anff@uq.edu.au