Wafer dicing
Home > Equipment > Wafer dicing
Wafer dicing

Nanofabricated devices are generally made in batches on wafers and need to be separated or packaged before use. This separation can be achieved through wet or dry dicing. In a wet dicing operation, a precision, high-speed, diamond impregnated blade is used to mill narrow grooves between the devices either partially or completely through the wafer. During this process, water is circulated over the cutting surface to cool the blade and prevent the liberation of dangerous particulates into the air. Materials which would be damaged by water are diced using a dry process known as scribing. Scribing utilises a diamond tipped stylus which is drawn across the wafer surface creating lines of high-stress which are later broken over precision fulcrum.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ADT Provectus 7100
Wafer dicer
QLD Node University of Queensland
Description
Fully programmable dicing saw capable of dicing up to 8 inch wafers.
Related Information
Provides high precision dicing, best performing matrix for hard, brittle and composite materials. Can dice hard and thick materials. Saw blade minimal width of 20 µm. Axis resolution in Y of 200 nm and Z of 200nm. Speed up to 350 mm/s.
Tool Contact
anff@uq.edu.au
Disco DAD 321
Wafer dicer
SA Node University of South Australia
Description
Wafer dicer capable of dicing 6-inch wafers
Related Information
The DISCO DAD 321 dicing saw uses a rotating ultra-thin diamond impregnated blade, in a wet environment, to cut materials such as silicon wafers, III-V semiconductors, glass sheets, ceramic, etc. into almost any shapes with straight edges. Cutting process is controlled automatically through software recipe programming. The machine is also capable of accurate, multi-directional on-screen semiautomatic alignment.
Tool Contact
Simon.Doe@unisa.edu.au
MTI Saw
Diamond wire saw and Wafer Saw
Macquarie University Optofab Node
Description
Diamond wire saw and Wafer Saw for preparing small samples of glass from ingots or wafers
Related Information
Typical prepares 10-40mm areas samples of glass for photonic inscription
Tool Contact
benjamin.johnston@mq.edu.au
Suss scriber
Wafer scriber
NSW Node University of New South Wales
Description
wafer scriber
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ADT Provectus 7100
Wafer dicer
NSW Node University of New South Wales
Description
Fully programmable dicing saw capable of dicing up to 8 inch wafers.
Related Information
Provides high precision dicing, best performing matrix for hard, brittle and composite materials. Can dice hard and thick materials. Saw blade minimal width of 20 µm. Axis resolution in Y of 200 nm and Z of 200nm. Speed up to 350 mm/s.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Disco DAD 321
Wafer dicer
NSW Node University of New South Wales
Description
Wafer dicer capable of dicing 6-inch wafers
Related Information
The DISCO DAD 321 dicing saw uses a rotating ultra-thin diamond impregnated blade, in a wet environment, to cut materials such as silicon wafers, III-V semiconductors, glass sheets, ceramic, etc. into almost any shapes with straight edges. Cutting process is controlled automatically through software recipe programming. The machine is also capable of accurate, multi-directional on-screen semiautomatic alignment.
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
MTI Saw
Diamond wire saw and Wafer Saw
NSW Node University of New South Wales
Description
Diamond wire saw and Wafer Saw for preparing small samples of glass from ingots or wafers
Related Information
Typical prepares 10-40mm areas samples of glass for photonic inscription
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Suss scriber
Wafer scriber
NSW Node University of New South Wales
Description
wafer scriber
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au