ANFF Experts
Kai-Yu Liu
Senior Professional Officer
Mr Kai-Yu Liu received his Master's degree in Microelectronics Engineering in 2000 from Nanyang Technological University (NTU) of Singapore. After graduation, he continued working in the same school at NTU, where he was a Senior Engineer and Team Leader of the Nanyang Nanofabrication Centre in NTU and was in charge of process integration, device characterisation and project management, as well as setting up their new class 100 cleanroom. In addition, he was responsible for various fabrication processes and equipment, such as etching, deposition, ion implantation, and metrology tools. In 2010, he joined ANFF-Qld as a Senior Professional Officer. Kai-Yu is responsible for microfabrication mainly in the areas of etching (DRIE, RIE) and deposition (e-beam evaporation and sputtering) as well as characterisation techniques.
University of Queensland
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