Deposition

Tripathi

Dhirendra handles micro fabrication, processing and materials-characterisation at ANFF WA node

Tjeung

Ricky is responsible for various photolithography, physical vapour deposition, chemical vapour deposition and reactive ion etching processes at MCN

Tan

Prof Hoe Tan is an expert in the epitaxy of compound semiconductors.

Szymanska

Joanna Szymanska is the process engineer responsible for technical management of semiconductor processing within ANFF Facility. Responsible for provision of training, and new microfabrication process development. As area supervisor she’s also responsible for operation and maintenance of upper east and west part of the ANFF Facility. Her area of expertise is EBL -Raith 150TWO system, …

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Sun

Xiao provides training and technical support for a variety of tools and maintains the Node’s online booking system.

Su

Sophia has a research background in the field of microelectromechanical systems (MEMS) and previously worked at the Taiwan Semiconductor Research Institute (TSRI) for three years. During her time in TSRI, she was responsible for the development and fabrication of pressure sensors and gas sensors. Sophia joined ANFF in 2021 as a Nanofabrication Technologist and focuses …

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Smith

Dan’s role is a secondment from the University of Melbourne and he is based at the MCN primarily to support users from the University of Melbourne, though he is also available to all users, both academic and from industry. He brings over 25 years of experience in micro/nanofabrication and MEMS and semiconductor manufacturing.

Schubert

Ute Schubert (Env. & Chem Eng. Fachschule Technik, Germany) is a process engineer at ANFF-NSW. She is responsible for provision of training and process development for microfabrication process. Ute also has responsibilities handling the administrative aspects of ANFF-NSW safety processes. She has over 20 years’ experience in process engineering previously working in the Si and …

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Sadek

Abu is responsible for the ALD, electroforming, oxidation/nitriding/doping furnaces, probe stations and a set of wet benches.

Regan

Focus on improvement of diamond nanofabrication processed in diamond membranes.

Qiu

Gloria received her PhD in Materials Science and Engineering from the University of Houston, USA. Her expertise is in magnetic thin film deposition and nanostructure patterning for bit-patterned media application. She has also worked extensively on magnetic biosensors. As Senior Process Engineer at ANFF-NSW University of Sydney, Gloria is responsible for the deposition and dry …

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Pai

Mike has a research background in microfluidic design and micro / nano fabrication and extensive experience in manufacturing and product development. Focusing on the development of the multiplex biosensing method, Mike received his PhD in Engineering in 2014, from University of South Australia. He joined ANFF-SA in 2015 as a Nanofabrication Technologist and is experienced …

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