Michal is involved in the design, fabrication and characterisation of optical microelectromechanical (MEMS) devices.


Naiyin trains and assists users with plasma etching/deposition, while providing MOCVD support.


Mr Glenn Walker is a Senior Technical Operations Specialist within the ANFF-Qld and Queensland Micro- and Nanotechnology Centre at the Queensland Microtechnology Facility, Griffith University. Glenn is a microelectronic engineer and an experienced semiconductor device process engineer.


Dr Kaushal Vora has broad experience in developing nanofabrication processes, cleanroom operations and user training.


Dhirendra handles micro fabrication, processing and materials-characterisation at ANFF WA node


Ricky is responsible for various photolithography, physical vapour deposition, chemical vapour deposition and reactive ion etching processes at MCN


Prof Hoe Tan is an expert in the epitaxy of compound semiconductors.


Joanna Szymanska is the process engineer responsible for technical management of semiconductor processing within ANFF Facility. Responsible for provision of training, and new microfabrication process development. As area supervisor she’s also responsible for operation and maintenance of upper east and west part of the ANFF Facility. Her area of expertise is EBL -Raith 150TWO system, …

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Xiao provides training and technical support for a variety of tools and maintains the Node’s online booking system.


Sophia has a research background in the field of microelectromechanical systems (MEMS) and previously worked at the Taiwan Semiconductor Research Institute (TSRI) for three years. During her time in TSRI, she was responsible for the development and fabrication of pressure sensors and gas sensors. Sophia joined ANFF in 2021 as a Nanofabrication Technologist and focuses …

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Dan’s role is a secondment from the University of Melbourne and he is based at the MCN primarily to support users from the University of Melbourne, though he is also available to all users, both academic and from industry. He brings over 25 years of experience in micro/nanofabrication and MEMS and semiconductor manufacturing.


Ute Schubert (Env. & Chem Eng. Fachschule Technik, Germany) is a process engineer at ANFF-NSW and Co-LEAF coordinator for ANFF-NSW UNSW’s hub. Among other admin and safety responsibilities, she is responsible for providing training and developing processes for microfabrication. She joined ANFF in 2014 and has over 20 years’ experience in process engineering previously working …

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