Etching

Wang

Naiyin trains and assists users with plasma etching/deposition, while providing MOCVD support.

Walker

Mr Glenn Walker is a Senior Technical Operations Specialist within the ANFF-Qld and Queensland Micro- and Nanotechnology Centre at the Queensland Microtechnology Facility, Griffith University. Glenn is a microelectronic engineer and an experienced semiconductor device process engineer.

Vaidya

Gayatri trains and helps users with EBL matters, and supports other tools including the etching suite, electron-beam evaporation and SEM-CL.

Tjeung

Ricky is responsible for various photolithography, physical vapour deposition, chemical vapour deposition and reactive ion etching processes at MCN

Su

Sophia has a research background in the field of microelectromechanical systems (MEMS) and previously worked at the Taiwan Semiconductor Research Institute (TSRI) for three years. During her time in TSRI, she was responsible for the development and fabrication of pressure sensors and gas sensors. Sophia joined ANFF in 2021 as a Nanofabrication Technologist and focuses …

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Smith

Dan’s role is a secondment from the University of Melbourne and he is based at the MCN primarily to support users from the University of Melbourne, though he is also available to all users, both academic and from industry. He brings over 25 years of experience in micro/nanofabrication and MEMS and semiconductor manufacturing.

Schubert

Ute Schubert (Env. & Chem Eng. Fachschule Technik, Germany) is a process engineer at ANFF-NSW and Co-LEAF coordinator for ANFF-NSW UNSW’s hub. Among other admin and safety responsibilities, she is responsible for providing training and developing processes for microfabrication. She joined ANFF in 2014 and has over 20 years’ experience in process engineering previously working …

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Qiu

Gloria received her PhD in Materials Science and Engineering from the University of Houston, USA. Her expertise is in magnetic thin film deposition and nanostructure patterning for bit-patterned media application. She has also worked extensively on magnetic biosensors. As Senior Process Engineer at ANFF-NSW University of Sydney, Gloria is responsible for the deposition and dry …

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Nyi Nyi Latt

Saw is a Cleanroom Equipment Officer responsible for process tools and equipment maintenance at ANFF-NSW University of Sydney. He worked at A*STAR, Singapore’s leading research facility for more than 7 years supporting the installation and maintenance of SPTS’s DRIE and PECVD tools.

Liu

Mr Kai-Yu Liu received his Master’s degree in Microelectronics Engineering in 2000 from Nanyang Technological University (NTU) of Singapore. After graduation, he continued working in the same school at NTU, where he was a Senior Engineer and Team Leader of the Nanyang Nanofabrication Centre in NTU and was in charge of process integration, device characterisation …

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Ilagan

Ethel has extensive experience in photolithography, as well expertise in wet processing and microfluidic fabrication. As Process Engineer: Optical Lithography at ANFF-NSW University of Sydney, she is responsible for the photolithography tools.

Hold

Mrs Leonie Hold is a Senior Research Assistant within the ANFF-Qld and Queensland Micro- and Nanotechnology Centre at the Queensland Microtechnology Facility, Griffith University. She joined Griffith in 2005 and has had previous micro-technology fabrication experience in Fraunhofer Institutes in Germany. Her current specialisation is in plasma etching and the deposition of silicon carbide on …

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