Zawierta
Michal is involved in the design, fabrication and characterisation of optical microelectromechanical (MEMS) devices.
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Etching
Walker
Mr Glenn Walker is a Senior Technical Operations Specialist within the ANFF-Qld and Queensland Micro- and Nanotechnology Centre at the Queensland Microtechnology Facility, Griffith University. Glenn is a microelectronic engineer and an experienced semiconductor device process engineer.
Vaidya
Gayatri trains and helps users with EBL matters, and supports other tools including the etching suite, electron-beam evaporation and SEM-CL.
Tjeung
Ricky is responsible for various photolithography, physical vapour deposition, chemical vapour deposition and reactive ion etching processes at MCN
Sun
Xiao provides training and technical support for a variety of tools and maintains the Node’s online booking system.
Su
Sophia has a research background in the field of microelectromechanical systems (MEMS) and previously worked at the Taiwan Semiconductor Research Institute (TSRI) for three years. During her time in TSRI, she was responsible for the development and fabrication of pressure sensors and gas sensors. Sophia joined ANFF in 2021 as a Nanofabrication Technologist and focuses …
Smith
Dan’s role is a secondment from the University of Melbourne and he is based at the MCN primarily to support users from the University of Melbourne, though he is also available to all users, both academic and from industry. He brings over 25 years of experience in micro/nanofabrication and MEMS and semiconductor manufacturing.
Schubert
Ute Schubert (Env. & Chem Eng. Fachschule Technik, Germany) is a process engineer at ANFF-NSW. She is responsible for provision of training and process development for microfabrication process. Ute also has responsibilities handling the administrative aspects of ANFF-NSW safety processes. She has over 20 years’ experience in process engineering previously working in the Si and …
Qiu
Gloria received her PhD in Materials Science and Engineering from the University of Houston, USA. Her expertise is in magnetic thin film deposition and nanostructure patterning for bit-patterned media application. She has also worked extensively on magnetic biosensors. As Senior Process Engineer at ANFF-NSW University of Sydney, Gloria is responsible for the deposition and dry …
Nyi Nyi Latt
Saw is a Cleanroom Equipment Officer responsible for process tools and equipment maintenance at ANFF-NSW University of Sydney. He worked at A*STAR, Singapore’s leading research facility for more than 7 years supporting the installation and maintenance of SPTS’s DRIE and PECVD tools.
Liu
Mr Kai-Yu Liu received his Master’s degree in Microelectronics Engineering in 2000 from Nanyang Technological University (NTU) of Singapore. After graduation, he continued working in the same school at NTU, where he was a Senior Engineer and Team Leader of the Nanyang Nanofabrication Centre in NTU and was in charge of process integration, device characterisation …