ANFF-ACT facility provides a range of capabilities and services for the micro/nanofabrication of photonic and related devices as well as the fabrication of waveguides and photonic crystals.
The node, located at the Australian National University, specialises in photonic/electronic materials growth, and the processing and fabrication of devices including micro electro-mechanical systems (MEMS). These capabilities provide a range of services for the fabrication of photonic and related devices as well as the production of waveguides and photonic crystals.
ANFF-ACT works closely with two renowned research groups based at ANU’s Laser Physics Centre and the Department of Electronic Materials Engineering. These groups bring expertise in the capabilities of high-energy ion implantation, Si-etching, optical characterisation and two metal organic chemical vapour deposition (MOCVD) reactors for the growth of III-V compound semiconductor multilayers based on: GaAs, AIGaAs, InGaAs, InP, InGaAsP, InAlGaAs, GaSb, InSb, InGaAsN. These reactors enable the fabrication of nanowires, quantum dots, quantum wells, strained layers and devices.
ANFF-ACT facilities provide a dynamic, exciting and collaborative atmosphere where researchers can get the most from their ideas with the best possible support and world class equipment.
Services include the scale-up prototyping of devices such as organic solar cells, organic light emitting diodes, organic circuit elements, microfluidic devices, bioassay platforms, biomaterial scaffolds, microbioreactors and production of materials for microelectronics to semiconductor-industry standards.
Specialist fields: micro/nano fabrication of photonic and related devices; fabrication of waveguides and photonic crystals; Micro electro-mechanical systems (MEMS).
Flagship facilities: Electron beam lithography (EBL); sputtering system for metal and dielectric multi-layer deposition; Cluster tool for dry etching and deposition; Dual beam focused ion beam; Nano imprint lithography.
Node Director: Prof. Hoe Tan
Phone: +61 2 6125 0363
Facility Manager: Dr Horst Punzmann
Phone: +61 2 6125 0001
Research School of Physics
building #160, Level 3, End of Mills Road
The Australian National University
Canberra ACT 2601
+61 2 6125 0001