ANFF OptoFab
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Overview

Optofab offers specialist facilities and dedicated staff that are on hand to provide services and technical support to users in microprocessing, microfabrication and characterisation of fibre, planar and bulk materials which include silica, metals, ceramics, silicon, polymers and crystals.

Optofab services have proved beneficial for applications in telecoms, biotechnology, biomedicine, microelectronics, optical sensing, industrial processing, defence and security.

The Node consists of centres at Macquarie University (headquarters), University of Technology Sydney, the University of Adelaide, the Australian National University, and the University of Sydney.

Node Competencies

Laser micromachining and processing; speciality and functional optical materials; laser inscription of photonic devices; photolithography; diamond CVD and nanoparticles; speciality optical fibre production.

Contact

Node Director: Prof Michael Withford
Email: michael.withford@mq.edu.au or for general node inquiries optofab.anff@gmail.com
Phone: +61 2 9850 7056

Facility Manager: Dr Benjamin Johnston
Email: benjamin.johnston@mq.edu.au
Phone: +61 2 9850 8960

Location
Macquarie University
Address

Australian Hearing Hub (Building W1A)
Level 4, 16 University Avenue
Macquarie University
North Ryde NSW 2109

University of Adelaide
Address

The Braggs Building
The University of Adelaide
SA 5005, Australia

Australian National University
Address

Research School of Physics
building #160, Level 3, End of Mills Road
The Australian National University
Canberra ACT 2601
+61 2 6125 8574

Equipment
Deposition
Angstrom co-thermal/co-sputter system
Thermal and sputtering deposition for chalcogenide,SiO2,Te,Er,etc
Australian National University (ANU) Optofab Node
Technique
Thermal evaporation
Description
Co Thermal and Co sputtering deposition system
Related Information
Thermal deposition,sputtering of chalcogenide materials,semiconductor materials. The Angstrom system is primarily used for photonics films applications and has six Radak resistively heated evaporation sources installed using quartz, ceramic, or metal crucibles, and a further baffled boat option as well. Each source has its own quartz microbalance rate monitor enabling the system to monitor the deposition rate through software. The machine is capable of co-evaporation of different materials and so far two kind chalcogenide glasses deposition is well established process for three layers deposition without any vacuum break. The following materials are evaporated and sputtered using this tool:Ge11As24.5Se64.5, Ge11As24.5S64.5, Sb2S3, As2Se3, Ge, Ga, Se, S, SiO2, TeO2, GLS, Er2S3 etc.
Tool Contact
stephen.madden@anu.edu.au
Octal thermal evaporator
Thermal evaporation of Chalcogenide(As2S3,Ge11.5As24Se64.5)
Australian National University (ANU) Optofab Node
Technique
Thermal evaporation
Description
Thermal evaporation system, the Octal Thermal evaporation system is restricted to depositing very low optical loss sulphur based chalcogenide films for which it is the “production” tool. The system can handle four wafers of 4 inch circular size at a time.
Related Information
dedicated thermal evaporation for As2S3
Tool Contact
stephen.madden@anu.edu.au
ANU Research Ion Beam Sputtering system
IBS deposition system
Australian National University (ANU) Optofab Node
Technique
Sputtering
Description
Ion Beam Sputtering System
Related Information
Ion Beam sputtering for research purpose. This is a system intended to provide low cost rapid turn around R&D on coating materials. It uses a 6cm ion gun and a single 3-6” sputter target, these being far less costly than the large ones used in the Spector.
Tool Contact
stephen.madden@anu.edu.au
Pfeiffer DC sputter system
Metal sputtering tool
Australian National University (ANU) Optofab Node
Technique
Sputtering
Description
DC spouttering system for sputtering
Related Information
Metal film deposition. This system uses a single 6” diameter sputter target (Chromium or Aluminium Currently available) and a DC discharge to deposit metal films on substrates up to 150mm diameter
Tool Contact
stephen.madden@anu.edu.au
Veeco Spector IBS
IBS deposition for AR,HR,thin film for semicon & photonics applications
Australian National University (ANU) Optofab Node
Technique
Sputtering
Description
Ion Beam sputter system for Ta2O5,SiO2,Ti,Ta,Si materials
Related Information
For AR,HR coating,optimised for SiO2,Ta2O5,Ti,Ta etc. This is an early generation Spector tool that has been considerably enhanced by the addition of a custom door with large planetary fixture with infinitely variable planetary ratios. The system is run in two modes:1) Standard single rotation for substrates up to 100mm (5 off max per run) which provides thickness uniformity over the 100mm diameter of ~0.3% 2) Dual position rotation which enables thickness uniformity <0.1% over up to 400mm diameter, though at the expense of significant reduction in deposition speed and increase in cost Ion Beam Sputtering system capable of producing coatings with sub 10ppm absorption in AR coatings up to ~2 microns thick, and even less in mirror stack where the absorption is reduced due to the smaller penetration into the stack
Tool Contact
stephen.madden@anu.edu.au
Seki AX6300
MPCVD system for deposition of diamond
Macquarie University Optofab Node
Technique
Microwave Plasma-enhanced Chemical Vapour Deposition (MPCVD)
Description
CVD reactor for growing polydiamond films from methane/hydrogen chemistries.
Related Information
2 inch sample stage
Tool Contact
benjamin.johnston@mq.edu.au
DB600 Ion Assisted E-Beam evaporator
Ion Beam deposition
Australian National University (ANU) Optofab Node
Technique
Electron Beam Evaporation (E-Beam Evaporation)
Description
Ion Beam Assisted E Beam evaporator
Related Information
Ion beam deposition of various semiconductor, photonics materials. The DB 600 was a tool built by CSIRO to coat substrates up to 600mm diameter in a stationary substrate mode using a rotating uniformity “blade” to attain thickness uniformity to ~2%. It uses a 3 pocket electron beam source and also has a resistively heated baffled boat source
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Angstrom co-thermal/co-sputter system
Thermal and sputtering deposition for chalcogenide,SiO2,Te,Er,etc
Australian National University (ANU) Optofab Node
Description
Co Thermal and Co sputtering deposition system
Related Information
Thermal deposition,sputtering of chalcogenide materials,semiconductor materials. The Angstrom system is primarily used for photonics films applications and has six Radak resistively heated evaporation sources installed using quartz, ceramic, or metal crucibles, and a further baffled boat option as well. Each source has its own quartz microbalance rate monitor enabling the system to monitor the deposition rate through software. The machine is capable of co-evaporation of different materials and so far two kind chalcogenide glasses deposition is well established process for three layers deposition without any vacuum break. The following materials are evaporated and sputtered using this tool:Ge11As24.5Se64.5, Ge11As24.5S64.5, Sb2S3, As2Se3, Ge, Ga, Se, S, SiO2, TeO2, GLS, Er2S3 etc.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Octal thermal evaporator
Thermal evaporation of Chalcogenide(As2S3,Ge11.5As24Se64.5)
Australian National University (ANU) Optofab Node
Description
Thermal evaporation system, the Octal Thermal evaporation system is restricted to depositing very low optical loss sulphur based chalcogenide films for which it is the “production” tool. The system can handle four wafers of 4 inch circular size at a time.
Related Information
dedicated thermal evaporation for As2S3
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ANU Research Ion Beam Sputtering system
IBS deposition system
Australian National University (ANU) Optofab Node
Description
Ion Beam Sputtering System
Related Information
Ion Beam sputtering for research purpose. This is a system intended to provide low cost rapid turn around R&D on coating materials. It uses a 6cm ion gun and a single 3-6” sputter target, these being far less costly than the large ones used in the Spector.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Pfeiffer DC sputter system
Metal sputtering tool
Australian National University (ANU) Optofab Node
Description
DC spouttering system for sputtering
Related Information
Metal film deposition. This system uses a single 6” diameter sputter target (Chromium or Aluminium Currently available) and a DC discharge to deposit metal films on substrates up to 150mm diameter
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Veeco Spector IBS
IBS deposition for AR,HR,thin film for semicon & photonics applications
Australian National University (ANU) Optofab Node
Description
Ion Beam sputter system for Ta2O5,SiO2,Ti,Ta,Si materials
Related Information
For AR,HR coating,optimised for SiO2,Ta2O5,Ti,Ta etc. This is an early generation Spector tool that has been considerably enhanced by the addition of a custom door with large planetary fixture with infinitely variable planetary ratios. The system is run in two modes:1) Standard single rotation for substrates up to 100mm (5 off max per run) which provides thickness uniformity over the 100mm diameter of ~0.3% 2) Dual position rotation which enables thickness uniformity <0.1% over up to 400mm diameter, though at the expense of significant reduction in deposition speed and increase in cost Ion Beam Sputtering system capable of producing coatings with sub 10ppm absorption in AR coatings up to ~2 microns thick, and even less in mirror stack where the absorption is reduced due to the smaller penetration into the stack
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Seki AX6300
MPCVD system for deposition of diamond
Australian National University (ANU) Optofab Node
Description
CVD reactor for growing polydiamond films from methane/hydrogen chemistries.
Related Information
2 inch sample stage
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
DB600 Ion Assisted E-Beam evaporator
Ion Beam deposition
Australian National University (ANU) Optofab Node
Description
Ion Beam Assisted E Beam evaporator
Related Information
Ion beam deposition of various semiconductor, photonics materials. The DB 600 was a tool built by CSIRO to coat substrates up to 600mm diameter in a stationary substrate mode using a rotating uniformity “blade” to attain thickness uniformity to ~2%. It uses a 3 pocket electron beam source and also has a resistively heated baffled boat source
Tool Contact
stephen.madden@anu.edu.au
Etching
Custom HF etching
HF etching facilities
Optofab Node University of Adelaide
Technique
Vapour phase etching
Description
Hydrofluoric acid etching facilities.
Related Information
Hydrofluoric etching facilities in a specialised laboratory environment. Capability to etch glass and other materials.
Tool Contact
optofab@adelaide.edu.au
Oxford Instruments ICP-100
ICP Etcher, 3KW ICP source, 8 gasses, interferometric etch rate monitor, up to 150mm wafers, ICP etching Chalcogenide,Semiconductor,Photonics materials
Australian National University (ANU) Optofab Node
Technique
Plasma etching
Description
ICP Etcher, 3KW ICP source, 8 gasses(CHF3,SF6,O2,N2,C4F8,Ar,He) interferometric etch rate monitor, up to 150mm wafers. The Oxford Plasmalab 100 inductively coupled plasma (ICP) etcher is a multipurpose Etching system that provides users anisotropic etching of silicon, silicon oxide, chalcogenide and other dielectric materials. The tool is equipped with a temperature controlled electrode to help users tailor their etch feature profiles. The manual load system can accommodate substrates ranging from 150 mm diameter wafers down to small pieces. Available gases are CH4, CHF3, SF6, C4F8, H2, Ar, and O2 Si based (Si, SiO2& Si3N4), oxides (ITO, TiO2, TeO2, Ta2O5, ZnO, etc), polymers (BCB, SU-8, Polysiloxanes, etc)
Related Information
Dry Etch system,gas available for etching:SF6, CHF3, He, Ar, and O2
Tool Contact
stephen.madden@anu.edu.au
Tepla barrel etcher
Stripping tool
Australian National University (ANU) Optofab Node
Technique
Plasma etching
Description
The Tepla Barrel Etcher is a versatile high-pressure plasma system designed for efficient cleaning and resist stripping. It excels in removing organic materials and resists with O2-plasma, ensuring clean pattern development with its low power setting. Additionally, it can strip resists and etch SiNx/SiOx layers by incorporating CF4. This robust machine can process either two 4-inch wafers or a single 6-inch wafer simultaneously.
Related Information
Photoresist stripping using O2 and Argon
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom HF etching
HF etching facilities
Australian National University (ANU) Optofab Node
Description
Hydrofluoric acid etching facilities.
Related Information
Hydrofluoric etching facilities in a specialised laboratory environment. Capability to etch glass and other materials.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Oxford Instruments ICP-100
ICP Etcher, 3KW ICP source, 8 gasses, interferometric etch rate monitor, up to 150mm wafers, ICP etching Chalcogenide,Semiconductor,Photonics materials
Australian National University (ANU) Optofab Node
Description
ICP Etcher, 3KW ICP source, 8 gasses(CHF3,SF6,O2,N2,C4F8,Ar,He) interferometric etch rate monitor, up to 150mm wafers. The Oxford Plasmalab 100 inductively coupled plasma (ICP) etcher is a multipurpose Etching system that provides users anisotropic etching of silicon, silicon oxide, chalcogenide and other dielectric materials. The tool is equipped with a temperature controlled electrode to help users tailor their etch feature profiles. The manual load system can accommodate substrates ranging from 150 mm diameter wafers down to small pieces. Available gases are CH4, CHF3, SF6, C4F8, H2, Ar, and O2 Si based (Si, SiO2& Si3N4), oxides (ITO, TiO2, TeO2, Ta2O5, ZnO, etc), polymers (BCB, SU-8, Polysiloxanes, etc)
Related Information
Dry Etch system,gas available for etching:SF6, CHF3, He, Ar, and O2
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Tepla barrel etcher
Stripping tool
Australian National University (ANU) Optofab Node
Description
The Tepla Barrel Etcher is a versatile high-pressure plasma system designed for efficient cleaning and resist stripping. It excels in removing organic materials and resists with O2-plasma, ensuring clean pattern development with its low power setting. Additionally, it can strip resists and etch SiNx/SiOx layers by incorporating CF4. This robust machine can process either two 4-inch wafers or a single 6-inch wafer simultaneously.
Related Information
Photoresist stripping using O2 and Argon
Tool Contact
stephen.madden@anu.edu.au
Laboratory Infrastructure
Custom Glass melting – fluoride
Fluoride glass melting facility
Optofab Node University of Adelaide
Technique
Gloveboxes
Description
Facility consisting of a 5-port Mbraun glovebox with integrated furnaces
Related Information
Consists of one melting furnace to 900 degrees C.Annealing furnace to 400 degrees C.
Tool Contact
optofab@adelaide.edu.au
Innovative Technology Pure Lab GP-1 SR
Glovebox
Optofab Node University of Adelaide
Technique
Gloveboxes
Description
This glovebox is designated for performing air or moisture sensitive reactions.
Related Information
Size: 1,250 x 780 x 900 mm.Purge gas: Nitrogen.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Glass melting – fluoride
Fluoride glass melting facility
Optofab Node University of Adelaide
Description
Facility consisting of a 5-port Mbraun glovebox with integrated furnaces
Related Information
Consists of one melting furnace to 900 degrees C.Annealing furnace to 400 degrees C.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Innovative Technology Pure Lab GP-1 SR
Glovebox
Optofab Node University of Adelaide
Description
This glovebox is designated for performing air or moisture sensitive reactions.
Related Information
Size: 1,250 x 780 x 900 mm.Purge gas: Nitrogen.
Tool Contact
optofab@adelaide.edu.au
Lithography
Oriel UV Flood Illuminator
UV curing
Australian National University (ANU) Optofab Node
Technique
UV Flood Exposure
Description
For curing and exposing under UV light
Related Information
Oriel UV flood exposure services at >10 mW/cm2,Lamp Power: 1200W,maximum wafer size:150mm
Tool Contact
stephen.madden@anu.edu.au
Coating and developing- SVG 8600 Series
Photoresist coating and developing Tool
Australian National University (ANU) Optofab Node
Technique
Spin coating and wafer development
Description
The Silicon Valley Group 8600 series lithography track is a fully automated H bar cassette to cassette photoresist coat and develop system for wafers from 50mm to 150mm diameter. It has a single high resolution I line positive resist permanently plumbed in (Clariant AZ MiR 701) with an automated dispense arm, a pressurized canister dispense for adhesion promoter, and a positive displacement syringe pump style dispense to enable coating of any other type of resist or dielectric spin on coat.
Related Information
Spin speed:50 rpm to 10,000 rpm, run up to 10 steps in a process,wafer capability 4 inch
Tool Contact
stephen.madden@anu.edu.au
Karl Suss MA-6 contact Aligner
Mask Aligner for Lithography
Australian National University (ANU) Optofab Node
Technique
Multiple mask lithography
Description
Mask aligner used for Lithography
Related Information
Mask aligner used for 4 inch/100mm wafers,Intensity 2-4 mW/cm2 in I-line mode. The MA-6 mask aligner operates in I-line mode currently only on 100mm or 4” wafers. Under ideal circumstances with very clean substrates and masks, we have printed sub 0.5um features on this system, but its resolution is essentially limited by substrate quality.
Tool Contact
stephen.madden@anu.edu.au
Mask Aligner- Canon MPA500-FAB
Optical Lithography
Australian National University (ANU) Optofab Node
Technique
Multiple mask lithography
Description
The MPA-500 aligner operates in broadband exposure mode only on 100mm or 4” wafers using 5” mask plates. The “MPA” stands for Mirror Projection Aligner and so the optics is completely achromatic being reflector based so the broadband exposure is not an issue in resolution terms and in fact speeds up exposure using more of the 2kW arc lamp spectrum.
Related Information
Projection Mask aligner: 1x projection lith tool 100mm wafers Auto Feeder: Single, cassette to cassette, backside wafer handling Wafer size: Currently 4" (5" and 3" sizes available) Mask size: Currrently 5" (6" and 4" sizes available) Resolution: 1.5µm (positive resist) Depth of focus: > + 6µm (linewidth 1.5µm) Distortion: 3 sigma < 0.5µm Scanning accuracy: < + 1.5% Auto alignment accuracy: LBS AA 3sigma < 0.6µm (HeNe laser beam scan) Throughput (6¡±wafer) > 83 wfs/h (first mask mode) / > 72 wfs/h (LBS AA mode)
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Oriel UV Flood Illuminator
UV curing
Australian National University (ANU) Optofab Node
Description
For curing and exposing under UV light
Related Information
Oriel UV flood exposure services at >10 mW/cm2,Lamp Power: 1200W,maximum wafer size:150mm
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Coating and developing- SVG 8600 Series
Photoresist coating and developing Tool
Australian National University (ANU) Optofab Node
Description
The Silicon Valley Group 8600 series lithography track is a fully automated H bar cassette to cassette photoresist coat and develop system for wafers from 50mm to 150mm diameter. It has a single high resolution I line positive resist permanently plumbed in (Clariant AZ MiR 701) with an automated dispense arm, a pressurized canister dispense for adhesion promoter, and a positive displacement syringe pump style dispense to enable coating of any other type of resist or dielectric spin on coat.
Related Information
Spin speed:50 rpm to 10,000 rpm, run up to 10 steps in a process,wafer capability 4 inch
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Karl Suss MA-6 contact Aligner
Mask Aligner for Lithography
Australian National University (ANU) Optofab Node
Description
Mask aligner used for Lithography
Related Information
Mask aligner used for 4 inch/100mm wafers,Intensity 2-4 mW/cm2 in I-line mode. The MA-6 mask aligner operates in I-line mode currently only on 100mm or 4” wafers. Under ideal circumstances with very clean substrates and masks, we have printed sub 0.5um features on this system, but its resolution is essentially limited by substrate quality.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Mask Aligner- Canon MPA500-FAB
Optical Lithography
Australian National University (ANU) Optofab Node
Description
The MPA-500 aligner operates in broadband exposure mode only on 100mm or 4” wafers using 5” mask plates. The “MPA” stands for Mirror Projection Aligner and so the optics is completely achromatic being reflector based so the broadband exposure is not an issue in resolution terms and in fact speeds up exposure using more of the 2kW arc lamp spectrum.
Related Information
Projection Mask aligner: 1x projection lith tool 100mm wafers Auto Feeder: Single, cassette to cassette, backside wafer handling Wafer size: Currently 4" (5" and 3" sizes available) Mask size: Currrently 5" (6" and 4" sizes available) Resolution: 1.5µm (positive resist) Depth of focus: > + 6µm (linewidth 1.5µm) Distortion: 3 sigma < 0.5µm Scanning accuracy: < + 1.5% Auto alignment accuracy: LBS AA 3sigma < 0.6µm (HeNe laser beam scan) Throughput (6¡±wafer) > 83 wfs/h (first mask mode) / > 72 wfs/h (LBS AA mode)
Tool Contact
stephen.madden@anu.edu.au
Manufacturing and machining
Lathe nanotech FG350
Diamond Turning Optics
Australian National University (ANU) Optofab Node
Technique
Ultraprecision lathe
Description
Ultraprecision CNC machine. PC based CNC motion controller with Windows operating system and 1.0 nanometre (0.04µ”) programming resolution • Thermally insensitive linear scale feedback system with 34 picometer (0.034 nanometre) resolution • Allows raster flycutting and/or grinding of freeform surfaces, linear diffractive surfaces, and prismatic optical structures • Allows increased swing capacity to 20” dia. (500mm) for off-axis and toric components • Box-way hydrostatic oil bearing slides with 12” (300mm) of travel on Z, 14” (350mm) of travel on X, 6” (150mm) vertical travel on Y, and an adaptive air bearing counterbalance assembly on the vertical axis for optimal servo performance • Dual linear motors on Y-Axis • 10,000 rpm “heavy-duty” air bearing workspindle (with liquid cooling option) imbedded into the Y-Axis carriage to improve loop stiffness, reduce Abbe errors, and maintain symmetry • Options include hydrostatic rotary B-Axis, C-Axis positioning control of the workspindle, Fast Tool Servo system, grinding & micro-milling attachments, optical tool set station, spraymist coolant system, vacuum chuck, micro-height adjust tool holders, Aspheric Part Programming Software (APPS), on- machine measurement & Workpiece Error Compensation System (WECS), and air shower temperature control system
Related Information
1.0 nanometer (0.04µ”) programming resolution,Thermally insensitive linear scale feedback system with 34 picometer (0.034 nanometer) resolution, Allows increased swing capacity to 20” dia. (500mm) for off-axis and toric components. Box-way hydrostatic oil bearing slides with 12” (300mm) of travel on Z, 14” (350mm) of travel on X, 6” (150mm) vertical travel on Y, and an adaptive air bearing counterbalance assembly on the vertical axis for optimal servo performance, 10,000 rpm “heavy-duty” air bearing workspindle.
Tool Contact
stephen.madden@anu.edu.au
Moore Nanotech UPL 250 Single Point Diamond Turning lathe
Diamond Turning Optics
Australian National University (ANU) Optofab Node
Technique
Ultraprecision lathe
Description
Single point Diamond Turning Optics. The Moore Nanotech 250 UPL lathe has precision four-axes control (Y-Axis, Z-Axis, rotary B-Axis, C-Axis positioning) with a stiff air-bearing spindle. It can fabricate non-cylindrically symmetric optical components with size ranging from tens of micrometres to the maximum work piece capacity of 300 mm diameter x 200 mm long (150 mm diameter swing capability over the optional rotary B-Axis). Normally it is used for the rapid production of spherical & aspheric optical lenses, mirrors, mould inserts, freeform optics, and even mechanical components. Depending on the material and the complexity of the form, surface smoothness of up to λ/50 may be attainable
Related Information
Lathe UPL250 : 4 axis control with stiff air bearing control can fabricate non cylindrically symmetrical optical components from tens of micrometer to 300mm dia and upto 200mm long.
Tool Contact
stephen.madden@anu.edu.au
Moulding machine GMP211
Toshiba Glass Moulding machine
Australian National University (ANU) Optofab Node
Technique
Glass moulding
Description
The GMP211 is a glass moulding machine designed for the ultra-precision production of optical components. It streamlines lens manufacturing by eliminating the need for grinding and polishing, offering high precision for both consumer electronics like digital cameras and advanced medical systems.
Related Information
ultra precision glass molding
Tool Contact
stephen.madden@anu.edu.au
DMG Mori DMU 20 linear Ultrasonic
Ultrasonic simultaneous 5-axis machining.
Optofab Node University of Adelaide
Technique
Ultrasonic milling
Description
Kinematic superposition of the tool rotation with an additional oscillation, traditionally difficult to machine high-performance materials can now be machined with excellent results.
Related Information
Travel:X-axis - 200mmY-axis - 200mm. Surface finish: Ra <0.1µmZ-axis - 280mmWorktable:Dimensions - 370x200mmLoad - 10kgWork piece - 200x200mm
Tool Contact
optofab@adelaide.edu.au
Fritch Ball Mill
Ball mill
Macquarie University Optofab Node
Technique
Other milling
Description
Mechanical ball mill for make micro/nano particle solutions. Zirconia and Tungsten Carbide grinding media in use
Related Information
10-100mL milling volumes
Tool Contact
benjamin.johnston@mq.edu.au
3D Systems ProX200
Selective laser meting metal 3D printer.
Optofab Node University of Adelaide
Technique
Metal printing
Description
3D printing facilitates rapid prototyping and manufacturing, allowing for the fast availability of functional prototypes for product development, as well as on demand manufacturing for research and industry requirements.
Related Information
Material properties and resolution: high density parts (>99%); ~150 µm detail resolution. Build materials: Stainless Steel, Tool Steel, Titanium Alloy, Cobalt Chromium Alloy, Aluminium Alloy, Inconel. Build volume: 140 x 140 x 100 mm.
Tool Contact
optofab@adelaide.edu.au
3DMicroMac Picosecond micromachining facility
Picosecond laser system
Macquarie University Optofab Node
Technique
Laser engraving and cutting
Description
Picosecond laser machining facility using a SuperRapidHE laser and galvo scanners. 266nm, 532nm, 1064nm.
Related Information
SuperRapidHE laser system. Scanlan galvo scanners
Tool Contact
benjamin.johnston@mq.edu.au
Coherent Chameleon
Femtosecond laser source
Macquarie University Optofab Node
Technique
Laser engraving and cutting
Description
Tuneable Ti:Saphire laser for optical charactersation and laser development tasks.
Related Information
Tuneable across most of the Ti:Sapphire bandwidth. Multi-Watt level 76MHz oscillator
Tool Contact
benjamin.johnston@mq.edu.au
Custom Femtosecond micromachining facility
Femtosecond laser writing system
Macquarie University Optofab Node
Technique
Laser engraving and cutting
Description
800nm, 1030nm, 515nm, 257nm femtosecond laser sources, precision stages, objective lens delivery.
Related Information
Pharos and RegA laser systems. Photonic inscription, micromachining, surface process
Tool Contact
benjamin.johnston@mq.edu.au
Custom Nanosecond micromachining facility
532nm nanosecond laser with trepanning head
Macquarie University Optofab Node
Technique
Laser engraving and cutting
Description
532nm, 2mJ, nanosecond laser, Stages and Drilling optics. 266nm option available.
Related Information
Drilling and cutting of metals and ceramics to 1mm thickness. Perforation of glass and polymers using the 266nm option
Tool Contact
benjamin.johnston@mq.edu.au
Custom Ultrafast laser facility
Ultrafast laser writing system
Macquarie University Optofab Node
Technique
Laser engraving and cutting
Description
Ti:Sapphire laser writing system (In-Kind facility)
Related Information
Spectra Physics Hurricane, 1kHz laser. Fibre Bragg gratings in variety of optical fibres
Tool Contact
benjamin.johnston@mq.edu.au
Heathway/Controls Interface Glass working lathe
Glass working lathe
Optofab Node University of Adelaide
Technique
Glass working
Description
Glass working lathe with hydrogen torch capability.
Related Information
Preform preparation for fibre drawing; joining handles to glass preforms.
Tool Contact
optofab@adelaide.edu.au
Jeol IB
Crossectional polisher
Macquarie University Optofab Node
Technique
Glass working
Description
Prepares smooth facets using argon ion bombardment for sample preparation and analysis
Related Information
Utilises a shield plate to mask etch 1-2mm areas
Tool Contact
benjamin.johnston@mq.edu.au
Logitech PM5 Auto-lap
Optical polishing
Macquarie University Optofab Node
Technique
Glass working
Description
Optical polishing for end faces and small surfaces of glass devices
Related Information
More information to come.
Tool Contact
benjamin.johnston@mq.edu.au
Metkon Forcipol 1V
Polisher/grinder
Optofab Node University of Adelaide
Technique
Glass working
Description
Manual polisher.
Related Information
Plate Ø 300mm, variable Speed: 50 - 600 rpm.
Tool Contact
optofab@adelaide.edu.au
Struers Accutom-100
High precision glass saw
Optofab Node University of Adelaide
Technique
Glass working
Description
Precision cut-off and grinding machine with variable speed (300 - 5000 rpm).
Related Information
Variable automatic feed speed and motorized positioning system with digital read-out with MultiCut function. Built-in specimen holder.
Tool Contact
optofab@adelaide.edu.au
Struers Tegramin-30
High precision polisher
Optofab Node University of Adelaide
Technique
Glass working
Description
Automatic precision polisher.
Related Information
Microprocessor-controlled polisher for grinding and polishing of specimens on a 300 mm MD-Disk with a cone.
Tool Contact
optofab@adelaide.edu.au
Custom Hard glass extruder
Hard glass extrusion facility up to 1,700oC and 250kN
Optofab Node University of Adelaide
Technique
Extrusion systems
Description
Manufacture hard glass type preforms for drawing to fibre.
Related Information
Preforms can be made from in-house fabricated glasses and commercially sourced glasses. Custom die design extrusion for specialised optical fibre manufacture.
Tool Contact
optofab@adelaide.edu.au
Custom Soft glass and polymer extruder #1
Soft glass and polymer extrusion facility
Optofab Node University of Adelaide
Technique
Extrusion systems
Description
Manufacture soft glass and polymer preforms for drawing to fibre. Extrudes at up to 700 degrees C and 100kN.
Related Information
Preforms can be made from in-house fabricated glasses and commercially sourced glasses, including: tellurite, bismuth, fluoride (ZBLAN), fluoride-phosphate (Schott: N-FK5, N-FK51A), lead silicate (Schott: LLF1, F2, SF6, SF57) and chalcogenide glasses as well as polymers. The structures can include rods of 1 - 20mm diameter, tubes of 10 - 20mm outer diameter and 0.5 - 8mm inner diameter, wagon-wheel structures (suspended core), hexagonal arrays of 1 - 7 rings of air holes and spider-web like structures with large air filling fractions.
Tool Contact
optofab@adelaide.edu.au
Custom Soft glass and polymer extruder #2
Soft glass and polymer extrusion facility
Optofab Node University of Adelaide
Technique
Extrusion systems
Description
Manufacture soft glass and polymer preforms for drawing to fibre. Extrudes at up to 1400 degrees C and 100kN.
Related Information
Preforms can be made from in-house fabricated glasses and commercially sourced glasses, including: tellurite, bismuth, fluoride (ZBLAN), fluoride-phosphate (Schott: N-FK5, N-FK51A), lead silicate (Schott: LLF1, F2, SF6, SF57) and chalcogenide glasses as well as polymers. The structures can include rods of 1 - 20mm diameter, tubes of 10 - 20mm outer diameter and 0.5 - 8mm inner diameter, wagon-wheel structures (suspended core), hexagonal arrays of 1 - 7 rings of air holes and spider-web like structures with large air filling fractions.
Tool Contact
optofab@adelaide.edu.au
Heathway/Controls Interface 4m Drawing Tower
4m Fibre Draw Tower
Optofab Node University of Adelaide
Technique
Draw towers
Description
Soft glass and polymer draw tower
Related Information
A 4m soft glass drawing tower is currently used to draw preforms of 8 - 15mm diameter and up to 180mm lengths into canes of approximately 1mm outer diameter or fibres of 100 - 400µm outer diameter. The temperature range that can be reached in the centre of the hot zone of the RF furnace is approximately 200 - 900oC. Pressure and vacuum can be applied to the preform during caning and fibre drawing. A range of soft glasses and polymer can be drawn from this tower. In addition, the preform can be spun during fibre drawing. On-line coating of fibres with UV-curable polymer can also be performed.
Tool Contact
optofab@adelaide.edu.au
Heathway/Controls Interface 6m Drawing Tower
Hard glass draw tower
Optofab Node University of Adelaide
Technique
Draw towers
Description
Silica type glass draw tower .
Related Information
The 6m drawing tower enables the drawing of glass fibres in the temperature range of 1800-2200oC. In addition, this re-configurable and versatile tower will allow draw process modifications, as well as new research and commercial production opportunities of specialised optical fibres.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Lathe nanotech FG350
Diamond Turning Optics
Optofab Node University of Adelaide
Description
Ultraprecision CNC machine. PC based CNC motion controller with Windows operating system and 1.0 nanometre (0.04µ”) programming resolution • Thermally insensitive linear scale feedback system with 34 picometer (0.034 nanometre) resolution • Allows raster flycutting and/or grinding of freeform surfaces, linear diffractive surfaces, and prismatic optical structures • Allows increased swing capacity to 20” dia. (500mm) for off-axis and toric components • Box-way hydrostatic oil bearing slides with 12” (300mm) of travel on Z, 14” (350mm) of travel on X, 6” (150mm) vertical travel on Y, and an adaptive air bearing counterbalance assembly on the vertical axis for optimal servo performance • Dual linear motors on Y-Axis • 10,000 rpm “heavy-duty” air bearing workspindle (with liquid cooling option) imbedded into the Y-Axis carriage to improve loop stiffness, reduce Abbe errors, and maintain symmetry • Options include hydrostatic rotary B-Axis, C-Axis positioning control of the workspindle, Fast Tool Servo system, grinding & micro-milling attachments, optical tool set station, spraymist coolant system, vacuum chuck, micro-height adjust tool holders, Aspheric Part Programming Software (APPS), on- machine measurement & Workpiece Error Compensation System (WECS), and air shower temperature control system
Related Information
1.0 nanometer (0.04µ”) programming resolution,Thermally insensitive linear scale feedback system with 34 picometer (0.034 nanometer) resolution, Allows increased swing capacity to 20” dia. (500mm) for off-axis and toric components. Box-way hydrostatic oil bearing slides with 12” (300mm) of travel on Z, 14” (350mm) of travel on X, 6” (150mm) vertical travel on Y, and an adaptive air bearing counterbalance assembly on the vertical axis for optimal servo performance, 10,000 rpm “heavy-duty” air bearing workspindle.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Moore Nanotech UPL 250 Single Point Diamond Turning lathe
Diamond Turning Optics
Optofab Node University of Adelaide
Description
Single point Diamond Turning Optics. The Moore Nanotech 250 UPL lathe has precision four-axes control (Y-Axis, Z-Axis, rotary B-Axis, C-Axis positioning) with a stiff air-bearing spindle. It can fabricate non-cylindrically symmetric optical components with size ranging from tens of micrometres to the maximum work piece capacity of 300 mm diameter x 200 mm long (150 mm diameter swing capability over the optional rotary B-Axis). Normally it is used for the rapid production of spherical & aspheric optical lenses, mirrors, mould inserts, freeform optics, and even mechanical components. Depending on the material and the complexity of the form, surface smoothness of up to λ/50 may be attainable
Related Information
Lathe UPL250 : 4 axis control with stiff air bearing control can fabricate non cylindrically symmetrical optical components from tens of micrometer to 300mm dia and upto 200mm long.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Moulding machine GMP211
Toshiba Glass Moulding machine
Optofab Node University of Adelaide
Description
The GMP211 is a glass moulding machine designed for the ultra-precision production of optical components. It streamlines lens manufacturing by eliminating the need for grinding and polishing, offering high precision for both consumer electronics like digital cameras and advanced medical systems.
Related Information
ultra precision glass molding
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
DMG Mori DMU 20 linear Ultrasonic
Ultrasonic simultaneous 5-axis machining.
Optofab Node University of Adelaide
Description
Kinematic superposition of the tool rotation with an additional oscillation, traditionally difficult to machine high-performance materials can now be machined with excellent results.
Related Information
Travel:X-axis - 200mmY-axis - 200mm. Surface finish: Ra <0.1µmZ-axis - 280mmWorktable:Dimensions - 370x200mmLoad - 10kgWork piece - 200x200mm
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fritch Ball Mill
Ball mill
Optofab Node University of Adelaide
Description
Mechanical ball mill for make micro/nano particle solutions. Zirconia and Tungsten Carbide grinding media in use
Related Information
10-100mL milling volumes
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
3D Systems ProX200
Selective laser meting metal 3D printer.
Optofab Node University of Adelaide
Description
3D printing facilitates rapid prototyping and manufacturing, allowing for the fast availability of functional prototypes for product development, as well as on demand manufacturing for research and industry requirements.
Related Information
Material properties and resolution: high density parts (>99%); ~150 µm detail resolution. Build materials: Stainless Steel, Tool Steel, Titanium Alloy, Cobalt Chromium Alloy, Aluminium Alloy, Inconel. Build volume: 140 x 140 x 100 mm.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
3DMicroMac Picosecond micromachining facility
Picosecond laser system
Optofab Node University of Adelaide
Description
Picosecond laser machining facility using a SuperRapidHE laser and galvo scanners. 266nm, 532nm, 1064nm.
Related Information
SuperRapidHE laser system. Scanlan galvo scanners
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Coherent Chameleon
Femtosecond laser source
Optofab Node University of Adelaide
Description
Tuneable Ti:Saphire laser for optical charactersation and laser development tasks.
Related Information
Tuneable across most of the Ti:Sapphire bandwidth. Multi-Watt level 76MHz oscillator
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Femtosecond micromachining facility
Femtosecond laser writing system
Optofab Node University of Adelaide
Description
800nm, 1030nm, 515nm, 257nm femtosecond laser sources, precision stages, objective lens delivery.
Related Information
Pharos and RegA laser systems. Photonic inscription, micromachining, surface process
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Nanosecond micromachining facility
532nm nanosecond laser with trepanning head
Optofab Node University of Adelaide
Description
532nm, 2mJ, nanosecond laser, Stages and Drilling optics. 266nm option available.
Related Information
Drilling and cutting of metals and ceramics to 1mm thickness. Perforation of glass and polymers using the 266nm option
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Ultrafast laser facility
Ultrafast laser writing system
Optofab Node University of Adelaide
Description
Ti:Sapphire laser writing system (In-Kind facility)
Related Information
Spectra Physics Hurricane, 1kHz laser. Fibre Bragg gratings in variety of optical fibres
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Heathway/Controls Interface Glass working lathe
Glass working lathe
Optofab Node University of Adelaide
Description
Glass working lathe with hydrogen torch capability.
Related Information
Preform preparation for fibre drawing; joining handles to glass preforms.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Jeol IB
Crossectional polisher
Optofab Node University of Adelaide
Description
Prepares smooth facets using argon ion bombardment for sample preparation and analysis
Related Information
Utilises a shield plate to mask etch 1-2mm areas
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Logitech PM5 Auto-lap
Optical polishing
Optofab Node University of Adelaide
Description
Optical polishing for end faces and small surfaces of glass devices
Related Information
More information to come.
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Metkon Forcipol 1V
Polisher/grinder
Optofab Node University of Adelaide
Description
Manual polisher.
Related Information
Plate Ø 300mm, variable Speed: 50 - 600 rpm.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Struers Accutom-100
High precision glass saw
Optofab Node University of Adelaide
Description
Precision cut-off and grinding machine with variable speed (300 - 5000 rpm).
Related Information
Variable automatic feed speed and motorized positioning system with digital read-out with MultiCut function. Built-in specimen holder.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Struers Tegramin-30
High precision polisher
Optofab Node University of Adelaide
Description
Automatic precision polisher.
Related Information
Microprocessor-controlled polisher for grinding and polishing of specimens on a 300 mm MD-Disk with a cone.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Hard glass extruder
Hard glass extrusion facility up to 1,700oC and 250kN
Optofab Node University of Adelaide
Description
Manufacture hard glass type preforms for drawing to fibre.
Related Information
Preforms can be made from in-house fabricated glasses and commercially sourced glasses. Custom die design extrusion for specialised optical fibre manufacture.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Soft glass and polymer extruder #1
Soft glass and polymer extrusion facility
Optofab Node University of Adelaide
Description
Manufacture soft glass and polymer preforms for drawing to fibre. Extrudes at up to 700 degrees C and 100kN.
Related Information
Preforms can be made from in-house fabricated glasses and commercially sourced glasses, including: tellurite, bismuth, fluoride (ZBLAN), fluoride-phosphate (Schott: N-FK5, N-FK51A), lead silicate (Schott: LLF1, F2, SF6, SF57) and chalcogenide glasses as well as polymers. The structures can include rods of 1 - 20mm diameter, tubes of 10 - 20mm outer diameter and 0.5 - 8mm inner diameter, wagon-wheel structures (suspended core), hexagonal arrays of 1 - 7 rings of air holes and spider-web like structures with large air filling fractions.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Soft glass and polymer extruder #2
Soft glass and polymer extrusion facility
Optofab Node University of Adelaide
Description
Manufacture soft glass and polymer preforms for drawing to fibre. Extrudes at up to 1400 degrees C and 100kN.
Related Information
Preforms can be made from in-house fabricated glasses and commercially sourced glasses, including: tellurite, bismuth, fluoride (ZBLAN), fluoride-phosphate (Schott: N-FK5, N-FK51A), lead silicate (Schott: LLF1, F2, SF6, SF57) and chalcogenide glasses as well as polymers. The structures can include rods of 1 - 20mm diameter, tubes of 10 - 20mm outer diameter and 0.5 - 8mm inner diameter, wagon-wheel structures (suspended core), hexagonal arrays of 1 - 7 rings of air holes and spider-web like structures with large air filling fractions.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Heathway/Controls Interface 4m Drawing Tower
4m Fibre Draw Tower
Optofab Node University of Adelaide
Description
Soft glass and polymer draw tower
Related Information
A 4m soft glass drawing tower is currently used to draw preforms of 8 - 15mm diameter and up to 180mm lengths into canes of approximately 1mm outer diameter or fibres of 100 - 400µm outer diameter. The temperature range that can be reached in the centre of the hot zone of the RF furnace is approximately 200 - 900oC. Pressure and vacuum can be applied to the preform during caning and fibre drawing. A range of soft glasses and polymer can be drawn from this tower. In addition, the preform can be spun during fibre drawing. On-line coating of fibres with UV-curable polymer can also be performed.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Heathway/Controls Interface 6m Drawing Tower
Hard glass draw tower
Optofab Node University of Adelaide
Description
Silica type glass draw tower .
Related Information
The 6m drawing tower enables the drawing of glass fibres in the temperature range of 1800-2200oC. In addition, this re-configurable and versatile tower will allow draw process modifications, as well as new research and commercial production opportunities of specialised optical fibres.
Tool Contact
optofab@adelaide.edu.au
Materials Synthesis and Modification
Zeeko polisher IRP200
Bulk Glass polisher
Australian National University (ANU) Optofab Node
Technique
Polishing
Description
The IRP 200 is a 7 axis CNC optical polishing machine capable of producing ultra-precise surfaces on a variety of optical materials and surface forms. The machine axes can be used for traditional spiral polishing or raster polishing within a total envelope size of 300x260x130. For parts up to 200mm in diameter or freeform parts up to 200mmx200mm
Related Information
7 Axis Optical polishing CNC,polishing capacity upto 200mmX200mm
Tool Contact
stephen.madden@anu.edu.au
Innovative Technology Pure Solv PS-Micro
Solvent purifier
Optofab Node University of Adelaide
Technique
Purification and drying
Description
Purification system to remove water from solvent.
Related Information
Purification of Toluene, dichloromethane, tetrahydrofuran.
Tool Contact
optofab@adelaide.edu.au
CEM Discover and explorer SP
Microwave synthesiser for general organic synthesis
Optofab Node University of Adelaide
Technique
Peptide synthesis
Description
Microwave synthesiser - with compressed air cooling system
Related Information
Operating volume: 0.2 – 7 ml (10 ml pressure vial); 2 – 25 ml (35 ml pressure vial); 15 – 50 ml (80 ml pressure vial); Open vessel 5 – 125 ml round bottom flask (ambient pressure); Power: 300 W (maximum). Temperature: 40 – 300°C.
Tool Contact
optofab@adelaide.edu.au
CEM Liberty 1
Microwave peptide synthesiser
Optofab Node University of Adelaide
Technique
Peptide synthesis
Description
Microwave peptide synthesiser
Related Information
It is a fully automated system for the synthesis of peptides. It allows the use of microwave energy for both coupling and deprotection steps. This instrument also allows programmable cleavage and automated resin addition.
Tool Contact
optofab@adelaide.edu.au
Agilent Technologies 1260 Infinity_2
High performance liquid chromatography (HPLC) system
Optofab Node University of Adelaide
Technique
Liquid Chromatography (LC)
Description
Identify, and quantify components in a liquid mixture
Related Information
Key features: This HPLC is fitted with an automatic sampler; the detection mode is based on UV-Vis absorption; the approximate wavelengths are between 215 - 360 nm.
Tool Contact
optofab@adelaide.edu.au
Gilson GX-271
Semi-preparative HPLC
Optofab Node University of Adelaide
Technique
Liquid Chromatography (LC)
Description
Unit has automated sampling and fraction collection functions.
Related Information
Capacity per run is approximately less than 10 mg/mL of sample.
Tool Contact
optofab@adelaide.edu.au
Tetlow/Ceramic Engineering Glass melting – open air
Open air glass melting furnaces
Optofab Node University of Adelaide
Technique
Glass fabrication
Description
The open-air melting capability consists of a melting furnace with maximum temperature of 1200oC and two annealing furnaces with a maximum temperature of 500oC.
Related Information
The open-air glass melting capability is used to produce a range of tellurite glasses; Na-Zn-La-tellurite glass (undoped or doped with fluorescent rare earth ions) is now routinely made in up to 300g raw material batch sizes.
Tool Contact
optofab@adelaide.edu.au
1100C 6” tube furnace
High temperature annealing
Australian National University (ANU) Optofab Node
Technique
Furnaces
Description
High temperature furnace
Related Information
More information to come.
Tool Contact
stephen.madden@anu.edu.au
Custom Glass melter
Controlled atmosphere oxide glass melting facilities.
Optofab Node University of Adelaide
Technique
Furnaces
Description
Facility consisting of a 6-port Heraeus glovebox with integrated furnaces
Related Information
Consists of one 900 degree C melting furnace, and three 500 C degree annealing furnaces.
Tool Contact
optofab@adelaide.edu.au
Cascade Tek vacuum oven(300C)
Vacuum Oven@300C and below
Australian National University (ANU) Optofab Node
Technique
Annealing
Description
Vacuum Oven for annealing at 300C and below
Related Information
This oven is designed for baking and annealing processes at temperatures up to 300C and vacuum levels down to 20mTorr. It is suitable for samples that require high-temperature and low-pressure conditions.
Tool Contact
stephen.madden@anu.edu.au
Heraeus T6060
Vacuum annealing
Australian National University (ANU) Optofab Node
Technique
Annealing
Description
More information to come.
Related Information
More information to come.
Tool Contact
stephen.madden@anu.edu.au
High vacuum ovens (600C at 10-6 Torr)
High Vacuum oven @600C
Australian National University (ANU) Optofab Node
Technique
Annealing
Description
More information to come.
Related Information
More information to come.
Tool Contact
stephen.madden@anu.edu.au
Nabertherm 600C Oven
Annealing Oven
Australian National University (ANU) Optofab Node
Technique
Annealing
Description
Oven for annealing at 600C and below
Related Information
This electrically heated air circulation furnace that can anneal thin films up to 600°C in various atmospheres. The furnace has a large chamber with very uniform temperature distribution and can use air, humid air or nitrogen as the annealing gas.
Tool Contact
stephen.madden@anu.edu.au
Thermoline Vacuum Oven(200C)
Vacuum Oven @200C
Australian National University (ANU) Optofab Node
Technique
Annealing
Description
Vacuum Oven for annealing at 200C and below
Related Information
This oven is designed for baking and annealing samples at temperatures up to 200C and vacuum levels down to 20mTorr. It is a high-temperature, low-pressure oven suitable for various applications.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Zeeko polisher IRP200
Bulk Glass polisher
Australian National University (ANU) Optofab Node
Description
The IRP 200 is a 7 axis CNC optical polishing machine capable of producing ultra-precise surfaces on a variety of optical materials and surface forms. The machine axes can be used for traditional spiral polishing or raster polishing within a total envelope size of 300x260x130. For parts up to 200mm in diameter or freeform parts up to 200mmx200mm
Related Information
7 Axis Optical polishing CNC,polishing capacity upto 200mmX200mm
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Innovative Technology Pure Solv PS-Micro
Solvent purifier
Australian National University (ANU) Optofab Node
Description
Purification system to remove water from solvent.
Related Information
Purification of Toluene, dichloromethane, tetrahydrofuran.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
CEM Discover and explorer SP
Microwave synthesiser for general organic synthesis
Australian National University (ANU) Optofab Node
Description
Microwave synthesiser - with compressed air cooling system
Related Information
Operating volume: 0.2 – 7 ml (10 ml pressure vial); 2 – 25 ml (35 ml pressure vial); 15 – 50 ml (80 ml pressure vial); Open vessel 5 – 125 ml round bottom flask (ambient pressure); Power: 300 W (maximum). Temperature: 40 – 300°C.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
CEM Liberty 1
Microwave peptide synthesiser
Australian National University (ANU) Optofab Node
Description
Microwave peptide synthesiser
Related Information
It is a fully automated system for the synthesis of peptides. It allows the use of microwave energy for both coupling and deprotection steps. This instrument also allows programmable cleavage and automated resin addition.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Agilent Technologies 1260 Infinity_2
High performance liquid chromatography (HPLC) system
Australian National University (ANU) Optofab Node
Description
Identify, and quantify components in a liquid mixture
Related Information
Key features: This HPLC is fitted with an automatic sampler; the detection mode is based on UV-Vis absorption; the approximate wavelengths are between 215 - 360 nm.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Gilson GX-271
Semi-preparative HPLC
Australian National University (ANU) Optofab Node
Description
Unit has automated sampling and fraction collection functions.
Related Information
Capacity per run is approximately less than 10 mg/mL of sample.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Tetlow/Ceramic Engineering Glass melting – open air
Open air glass melting furnaces
Australian National University (ANU) Optofab Node
Description
The open-air melting capability consists of a melting furnace with maximum temperature of 1200oC and two annealing furnaces with a maximum temperature of 500oC.
Related Information
The open-air glass melting capability is used to produce a range of tellurite glasses; Na-Zn-La-tellurite glass (undoped or doped with fluorescent rare earth ions) is now routinely made in up to 300g raw material batch sizes.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
1100C 6” tube furnace
High temperature annealing
Australian National University (ANU) Optofab Node
Description
High temperature furnace
Related Information
More information to come.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Glass melter
Controlled atmosphere oxide glass melting facilities.
Australian National University (ANU) Optofab Node
Description
Facility consisting of a 6-port Heraeus glovebox with integrated furnaces
Related Information
Consists of one 900 degree C melting furnace, and three 500 C degree annealing furnaces.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Cascade Tek vacuum oven(300C)
Vacuum Oven@300C and below
Australian National University (ANU) Optofab Node
Description
Vacuum Oven for annealing at 300C and below
Related Information
This oven is designed for baking and annealing processes at temperatures up to 300C and vacuum levels down to 20mTorr. It is suitable for samples that require high-temperature and low-pressure conditions.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Heraeus T6060
Vacuum annealing
Australian National University (ANU) Optofab Node
Description
More information to come.
Related Information
More information to come.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
High vacuum ovens (600C at 10-6 Torr)
High Vacuum oven @600C
Australian National University (ANU) Optofab Node
Description
More information to come.
Related Information
More information to come.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Nabertherm 600C Oven
Annealing Oven
Australian National University (ANU) Optofab Node
Description
Oven for annealing at 600C and below
Related Information
This electrically heated air circulation furnace that can anneal thin films up to 600°C in various atmospheres. The furnace has a large chamber with very uniform temperature distribution and can use air, humid air or nitrogen as the annealing gas.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Thermoline Vacuum Oven(200C)
Vacuum Oven @200C
Australian National University (ANU) Optofab Node
Description
Vacuum Oven for annealing at 200C and below
Related Information
This oven is designed for baking and annealing samples at temperatures up to 200C and vacuum levels down to 20mTorr. It is a high-temperature, low-pressure oven suitable for various applications.
Tool Contact
stephen.madden@anu.edu.au
Packaging
MTI Saw
Diamond wire saw and Wafer Saw
Macquarie University Optofab Node
Technique
Wafer dicing
Description
Diamond wire saw and Wafer Saw for preparing small samples of glass from ingots or wafers
Related Information
Typical prepares 10-40mm areas samples of glass for photonic inscription
Tool Contact
benjamin.johnston@mq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
MTI Saw
Diamond wire saw and Wafer Saw
Macquarie University Optofab Node
Description
Diamond wire saw and Wafer Saw for preparing small samples of glass from ingots or wafers
Related Information
Typical prepares 10-40mm areas samples of glass for photonic inscription
Tool Contact
benjamin.johnston@mq.edu.au
Separation Techniques
Agilent Technologies 1260 Infinity_2
High performance liquid chromatography (HPLC) system
Optofab Node University of Adelaide
Technique
Liquid Chromatography (LC)
Description
Identify, and quantify components in a liquid mixture
Related Information
Key features: This HPLC is fitted with an automatic sampler; the detection mode is based on UV-Vis absorption; the approximate wavelengths are between 215 - 360 nm.
Tool Contact
optofab@adelaide.edu.au
Gilson GX-271
Semi-preparative HPLC
Optofab Node University of Adelaide
Technique
Liquid Chromatography (LC)
Description
Unit has automated sampling and fraction collection functions.
Related Information
Capacity per run is approximately less than 10 mg/mL of sample.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Agilent Technologies 1260 Infinity_2
High performance liquid chromatography (HPLC) system
Optofab Node University of Adelaide
Description
Identify, and quantify components in a liquid mixture
Related Information
Key features: This HPLC is fitted with an automatic sampler; the detection mode is based on UV-Vis absorption; the approximate wavelengths are between 215 - 360 nm.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Gilson GX-271
Semi-preparative HPLC
Optofab Node University of Adelaide
Description
Unit has automated sampling and fraction collection functions.
Related Information
Capacity per run is approximately less than 10 mg/mL of sample.
Tool Contact
optofab@adelaide.edu.au
Testing and validation
Cary Spectrophotometer
Optical measurement tool
Australian National University (ANU) Optofab Node
Technique
Transmission and reflection measurement
Description
spectrophotometer covering the range 175-3300nm based on a dual grating monochromator
Related Information
Wavelength:range 175-3300nm,the spec on wavelength accuracy is +/- 0.1nm for UV-Vis and +/- 0.4nm for IR. The Cary 5000 is a spectrophotometer covering the range 175-3300nm based on a dual grating monochromator (switchable UV-Vis and IR gratings) and photomultiplier/Lead Sulphide detectors. The UV-Vis arrangement provides optical resolutions of 0.01-5 nm and the IR 0.05-5 nm. The instrument has independent but simultaneously measured sample and reference beam paths with a log ratio amplifier comparing the outputs if desired
Tool Contact
stephen.madden@anu.edu.au
Mapping T&R system
Transmission and reflection measurement
Australian National University (ANU) Optofab Node
Technique
Transmission and reflection measurement
Description
This custom-built setup can autonomously measure the transmission and reflection of substrates up to 400mm in diameter
Related Information
Measure Transmission and reflection of substrates up to 400mm in diameter. Currently, only wavelengths of 532, 633 and 1064nm can be supported due to laser availability. This custom-built setup can autonomously measure the transmission and reflection of substrates up to 400mm in diameter. Its XY-translation stage allows for a full 2D high resolution scan at pre-set angles of incidence (angular range is subject to substrate thickness). An optical chopper modulates the laser intensity and low-noise lock-in amplifiers isolate the reflection and transmission signatures in the photodetector signals. The absolute magnitude of reflection and transmission is evaluated against calibration optics. Currently, only wavelengths of 532, 633 and 1064nm can be supported due to laser availability, but additional wavelengths may be made available on request.
Tool Contact
stephen.madden@anu.edu.au
Metricon 2010 prism coupler
Thin film characterisation(RI and transmission)
Australian National University (ANU) Optofab Node
Technique
Transmission and reflection measurement
Description
The Metricon 2010 prism coupler precisely measures the refractive index and thickness of optical films and bulk glass, with a refractive index range of 1.95 to 3.35. It boasts an index accuracy of ±0.0005 and thickness accuracy of ±0.5% or ±5 nm. Supporting visible (532nm, 632nm, 780nm) and NIR (980nm, 1310nm, 1550nm) wavelengths, it offers optional Silicon and Germanium detectors. Additionally, it integrates with an InGaAs camera and custom Labview software for recording loss streaks and assessing film or waveguide propagation losses.
Related Information
RI measurement range: 1.95 to 3.35nm,the worst index accuracy is ±0.0005, and the thickness accuracy is ± (0.5% +/- 5 nm).Wavelnegth Operation:(532nm, 632nm and 780 nm,) and NIR (980 nm, 1310 nm and 1550 nm)
Tool Contact
stephen.madden@anu.edu.au
Multiple Angle Reflectometry- SCI Filmtek 4000
Thin film measurement(Thickness,RI)
Australian National University (ANU) Optofab Node
Technique
Transmission and reflection measurement
Description
The FilmTek 4000 is a versatile Multiple Angle Reflectometry system designed for precise thin film analysis. It accurately measures film thickness from under 100 angstroms to 250 micrometers and analyses multiple layers, refractive indices, absorption coefficients, energy band gaps, composition, crystallinity, and surface roughness. This computerised system integrates fiber optic spectrophotometry with sophisticated material modeling software, ensuring high accuracy, ease of use, and comprehensive analytical capabilities in a cost-effective solution.
Related Information
Multiple layer thicknesses from 0Å to 250µm (with SE option) Optical properties from 400nm-1700nm TE and TM indices of refraction [ n(λ) ] Extinction (absorption) coefficients [ k(λ) ] Energy band gap [ Eg ] Constituent, void fraction
Tool Contact
stephen.madden@anu.edu.au
ZYGO: VerifireXPZ interferometer
Interferometric measurement
Australian National University (ANU) Optofab Node
Technique
Transmission and reflection measurement
Description
This interferometer system provides high-accuracy measurements of flat or spherical surfaces, and transmitted wavefront measurement of optical components and assemblies. This is used to measure optical components like flats, lenses, and prisms - precision metal components like computer disks, bearing and sealing surfaces - polished ceramics, and contact lens moulds, etc
Related Information
High-accuracy measurements of flat or spherical surfaces, and transmitted wavefront measurement of optical components and assemblies.
Tool Contact
stephen.madden@anu.edu.au
Mettler Toledo- Differential Scanning Calorimeter
Thermal analysis
Australian National University (ANU) Optofab Node
Technique
Thermal analysis
Description
The Flash DSC1 from Mettler Toledo can be used to analyse changes in the microstructure of metastable materials, to optimise the composition of materials, to simulate technological processes, and for the thermal analysis of very small samples.
Related Information
DSC is used to analyse changes in the microstructure of metastable materials, to optimize the composition of materials, to simulate technological processes, and for the thermal analysis of very small samples
Tool Contact
stephen.madden@anu.edu.au
Bruker ContourGT-K
High precision surface profiler
Optofab Node University of Adelaide
Technique
Stylus profilometry
Description
This instrument performs non-contact 3D surface metrology measurements for laboratory research and production process control.
Related Information
Specifications: Maximum scan range: up to 10 mm; Vertical resolution: less than 0.01 nm.
Tool Contact
optofab@adelaide.edu.au
J.A. Woollam IR-VASE
Measuring complex refractive index or dielectric function of thin films.
Optofab Node University of Adelaide
Technique
Spectroscopic ellipsometry
Description
Common measurements include coating thickness, IR refractive indices and molecular bond vibrations.
Related Information
Specification: 1.7 to 30 μm (333 to 5900 wavenumbers)
Tool Contact
optofab@adelaide.edu.au
Agilent Technologies Cary 5000
UV-VIS-NIR spectrophotometer
Optofab Node University of Adelaide
Technique
Spectrophotometry
Description
The Cary 5000 is a high performance UV-Vis-NIR spectrophotometer with photometric performance in the 175-3300 nm range.
Related Information
Accessories: Solid samples holder; Cuvettes holder; Variable Angle Specular Reflectance accessory.
Tool Contact
optofab@adelaide.edu.au
NT-MDT Ntegra Solaris
Scanning Near-Field Optical Microscope (SNOM) and Atomic Force Microscope (AFM)
Optofab Node University of Adelaide
Technique
Scanning Near-field Optical Microscopy (SNOM)
Description
The Atomic Force Microscope (AFM) is primarily used to measure and analyse surface topography and morphology, providing nanoscale height measurements.
Related Information
An AFM used for relatively small and flat samples. The maximum scan area is 100 x 100 microns and it can scan features up to 10 microns in height. The SNOM/AFM can run in collection or transmission mode, and is equipped with an IR detector and an in-built red laser.
Tool Contact
optofab@adelaide.edu.au
Hitachi TM3030
Desktop Scanning Electron Microscope (SEM)
Macquarie University Optofab Node
Technique
Scanning Electron Microscopy (SEM)
Description
Benchtop SEM with Qantax EDS. Practical inspection and EDS up to 2000x mag.
Related Information
Accommodates samples up to 50mm, quality imaging to ~2000X magnification
Tool Contact
benjamin.johnston@mq.edu.au
Jeol JSM 7100F
Field Emission Scanning Electron Microscope (FE-SEM)
Macquarie University Optofab Node
Technique
Scanning Electron Microscopy (SEM)
Description
FESEM with cancellation cage and Kliendieck mounting plate available
Related Information
More information to come.
Tool Contact
benjamin.johnston@mq.edu.au
Kleindieck MM3A
Micro Manipulators
Macquarie University Optofab Node
Technique
Scanning Electron Microscopy (SEM)
Description
Micro Manipulators
Related Information
3D control over a sample during SEM activities.
Tool Contact
benjamin.johnston@mq.edu.au
Micro-VU Vertex 312UC
Coordinate measuring machine
Optofab Node University of Adelaide
Technique
Physical property analysis
Description
A coordinate measuring machine with camera and touch probes.
Related Information
Measurement capacity: 315 x 315 x 250 mm. Scale resolution: 0.1 µm.
Tool Contact
optofab@adelaide.edu.au
Perkin Elmer STA 6000
Simultaneous thermal analyser (STA)
Optofab Node University of Adelaide
Technique
Physical property analysis
Description
STA simultaneously combines differential thermal analysis (DSC and DTA) with thermo-gravimetric analysis (TGA). STA is commonly used for measuring melting/crystallisation temperature, reaction enthalpies, quantity of volatile content in materials and thermal stabilities
Related Information
Specifications: Temperature range from 15°C to 1000°C; Typical sample size from 5 mg to 100 mg (Up to 1500 mg); Sample purge gases: Argon, Nitrogen, Oxygen or Air. Hyphenated option: STA 6000 can be coupled to FTIR via TL8000 FTIR EGA system for TG-IR analysis for identifying out-gassing products.
Tool Contact
optofab@adelaide.edu.au
BioTek Instruments Synergy H4
Multi-mode microplate reader used to detect biological, chemical or physical events of samples in microtiter plates.
Optofab Node University of Adelaide
Technique
Photometric readers
Description
Detection modes include fluorescence Intensity, luminescence and UV/Vis absorbance.
Related Information
System has both top and bottom probes for fluorescence measurements. This system supports a reading of 6, 12, 24, 48, 96 well microplates.
Tool Contact
optofab@adelaide.edu.au
Wyko NT9100 Profilometer
Material characterisation
Australian National University (ANU) Optofab Node
Technique
Optical profilometry
Description
The Wyko NT9100 profilometer is a high-performance, non-contact optical surface profiler. Designed for convenience and reliability, it excels in measuring a broad range of surfaces, from ultra-smooth to very rough, with precision from sub-nanometer roughness to millimeter-scale features. Ideal for R&D, wear analysis, and process control, it can create detailed height maps of single or multiple stitched images.
Related Information
This is a convenient, high performance non-contact 3 dimensional metrology tool to measure surface roughness,Objectives:5X, 20X, 50X, (100x on request) Through Transmissive Media 5x objective.Field-of-View Multipliers:0.55X, 1X, 2X,Measurement Array 640 x 480, non-interlaced.Automated 100mm Z-axis; ±6° tip/tilt stage; 150mm XY auto stage.
Tool Contact
stephen.madden@anu.edu.au
High Res microscopes/cameras- Olympus
Inspection
Australian National University (ANU) Optofab Node
Technique
Optical microscopy
Description
The Olympus BX60M microscope is equipped with objectives from 5x to 100 x 0.9NA and a 3500 x 2000 pixel monochrome camera and image acquisition software
Related Information
The Olympus BX60M microscope is equipped with objectives from 5x to 100 x 0.9NA and a 3500 x 2000 pixel monochrome camera and image acquisition software
Tool Contact
stephen.madden@anu.edu.au
Perkin Elmer Spectrum 400
Fourier transform infrared spectrophotometer (FTIR)
Optofab Node University of Adelaide
Technique
Fourier Transform Infrared (FTIR) Spectroscopy
Description
This instrument can be purged with nitrogen. Optimum Wavelength range: 7800 to 400 cm-1 (TGS), 7800 to 450 cm-1(MCT).
Related Information
Detectors: Triglycine sulphate (TGS); Mercury cadmium telluride (MCT). Accessories: Universal attenuated total reflectance (UATR) module with standard Diamond/ZnSe. Ge crystal is also available. Variable angle specular reflectance accessory.
Tool Contact
optofab@adelaide.edu.au
NKT Photonics SuperK Super Continuum
Photonics Characterisation Suite - Source