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ANFF Victoria
Overview
ANFF-Vic ties the largest open-access cleanroom in the southern hemisphere, the Melbourne Centre for Nanofabrication (MCN), with five university-based hubs and CSIRO spread across Victoria providing a full complement of nanofabrication capabilities and expertise.
Members of the ANFF-Vic Joint Venture include: Monash University; University of Melbourne (Materials Characterisation and Fabrication Platform); Deakin University (Institute for Frontier Materials); La Trobe University (Centre for Materials Surface Science); Swinburne University of Technology (ANFF Biointerface Engineering Hub); RMIT University (Micro Nano Research Facility); Victoria University; and CSIRO (CSIRO Manufacturing).
MCN
The Melbourne Centre for Nanofabrication is home to ANFF’s headquarters. The Centre is a world-class, purpose-built facility boasting state-of-the-art cleanrooms (class 10,000 and class 100), reconfigurable biochemistry and PC2 labs, a microscopy lab and focused ion beam lab. These specialised work environments house top-of-the-line micro and nanofabrication equipment and instrumentation.
Node Competencies
Current expertise is provided in the areas of advanced materials and biotechnology, leading to the development of a wide range of customised sensors, actuators, and devices applied to areas from biomedicine, and energy to nanoelectronics and the environment.
Contact
Node Director: Prof Nico Voelcker
Email: nicolas.voelcker@monash.edu
Phone: +61 3 9902 9097
General Manager: Dr Sean Langelier
Email: sean.langelier@nanomelbourne.com
Phone: +61 3 9902 4100
Location
Melbourne Centre for Nanofabrication
Address
Melbourne Centre for Nanofabrication
151 Wellington Road
Clayton VIC 3168
Deakin University
Address
Institute for Frontier Materials
Deakin University, Waurn Ponds Campus
Waurn Ponds VIC 3216
University of Melbourne
Address
Materials Characterisation and Fabrication Platform
The University of Melbourne
Parkville Victoria 3010
La Trobe University
Address
Centre for Materials and Surface Science (CMSS)
Department of Chemistry and Physics
La Trobe University
Bundoora VIC 3086
Swinburne University of Technology
Address
ANFF-Vic Biointerface Engineering Hub
Swinburne University of Technology
John Street
Hawthorn Victoria 3122
RMIT
Address
MicroNano Research Facility
RMIT University
Bowen Street
Melbourne 3001 Victoria
CSIRO
Address
Equipment
Deposition
AJA Combinatorial Sputterer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Sputtering
Description
The ATC-2200-HY has six sputter targets, one off-axis sputter target, e-beam source, in-situ ellipsometery and RHEED scanning capability. It is also fitted with a X-Y stage and masking system to deposit up to 25 index points in one deposition run.
Related Information
Combinatorial discovery of materials using vacuum based sputtering of different metals, metal oxide, metal sulphide, metal selenides, metal nitride, metal carbide thin films and mixtures thereof with thicknesses of ~5 – 1000’s of nanometres with a precision of 1.5% over a 6” diameter. Its applicability to deposit a wide variety of thin coatings makes it highly desirable for new material discovery and optimisation of absorber, transport and electrode materials for use in advanced solar cells.
Tool Contact
mcn-enquiries@nanomelbourne.com
Au Sputter Coater (EM Sample Prep)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Sputtering
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Desk magnetron sputter coater (DSR1)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Sputtering
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
EM Sample Prep Sputter Coater
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Sputtering
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Intlvac Nanochrome – Sputterer
AC/DC Sputtering system with co-deposition
Melbourne Centre for Nanofabrication
VIC Node
Technique
Sputtering
Description
An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with three materials in the same run.Features ion beam cleaning.Recipe-based automated operation.Can be used to coat samples of up to 8 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
Magnetron Sputtering
RF/DC sputtering system
Melbourne Centre for Nanofabrication
VIC Node
Technique
Sputtering
Description
Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with two materials in the same run.Features ion beam cleaning.Manual operation.Can be used to coat samples of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
RF sputter deposition system- Kurt J. Lesker PVD75
RF sputter
RMIT
VIC Node
Technique
Sputtering
Description
RF sputters
Related Information
DC/RF Magnetron sputtering system capable of sputter deposition of a wide range of materials. The instrument can be used for high temperature sputter deposition.
Tool Contact
arnan.mitchell@rmit.edu.au
Sputter Cr Quorum
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Sputtering
Description
Chromium sputtering instrument devoted to EBL sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Oxford Instruments PlasmaPro ICP – PECVD
Plasma enhanced chemical vapour deposition system (PECVD) for depositing SiOx and SiN
Melbourne Centre for Nanofabrication
VIC Node
Technique
Plasma Enhanced Chemical Vapour Deposition (PECVD)
Description
Offers fast, affordable deposition at relatively low temperatures.
Related Information
Deposits SiO2, Si3N4, and amorphous Silicon at 100-400 degrees C.
Tool Contact
mcn-enquiries@nanomelbourne.com
PECVD Oxford PlasmaLab
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Plasma Enhanced Chemical Vapour Deposition (PECVD)
Description
Used to coat planar samples with Silicon Oxide or Silicon Nitride thin film
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Plasma Polymerisation Reactors
Deposition of a variety of organic films, including dedicated reactors for air plasma, allylamine (-NH2), acrylic acid (-COOH) and octadiene (-CH2). Samples up to 20 cm in diameter
Swinburne University of Technology
VIC Node
Technique
Plasma Enhanced Chemical Vapour Deposition (PECVD)
Description
Custom built reactors to deposit a wide variety of organic thin films via plasma enhanced chemical vapour deposition (PE-CVD)
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
Microwave Diamond Deposition – BDD
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Microwave Plasma-enhanced Chemical Vapour Deposition (MPCVD)
Description
Used to coat seeded samples of any shape with boron-doped diamond.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Microwave Diamond Deposition – NV
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Microwave Plasma-enhanced Chemical Vapour Deposition (MPCVD)
Description
Used to coat seeded samples of any shape with boron-doped diamond.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Ni Electroplating System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electroplating
Description
Digital Matrix SA1000 instrument provides high quality nikel coatings (electroplating) and shim fabrication (electroforming) for embossing. Maximum sample size upto 200mm in diameter
Related Information
Electroplating is a common process in the jewellery, automotive, and food industries but it is also highly useful in the production of semi-conducting electronics and optics. Different metals can also be used to grow shims for use in hot embossing and nano-imprint lithography, while they can also help to protect surfaces from aggressive etching processes. Nickel electroplating can also be used to cast PDMS in the creation of fluidic cells.
Tool Contact
mcn-enquiries@nanomelbourne.com
Nickel Electroforming/Plating
Nickel electroplating system
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electroplating
Description
Can fabricate Ni masters from patterned (photolithography, EBL) substrates to be used in hot embossing and nano-imprint lithography for mass production
Related Information
Up to 8 inch diameter sample size; mould thickness up to 1 micron, minimum feature size depends on aspect ratio
Tool Contact
mcn-enquiries@nanomelbourne.com
E-beam Evaporator (Dual Source)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electron Beam Evaporation (E-Beam Evaporation)
Description
Single films or multi-material stacks are easily created using simple layer definitions. Features ion-beam pre-cleaning and sample heating capabilities.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
E-beam Evaporator
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electron Beam Evaporation (E-Beam Evaporation)
Description
Able to deposit single or multi-stack film. Features ion-beam pre-cleaning and sample stage cooling capabilities. This system is reserved for precious metals and adhesion metals deposition only. The following materials are allowed in the chamber. (Au, Ag, Pt, Pd, Ti, Cr)
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Electron beam evaporation system- Kurt J. Lesker PVD75
E-Beam evaporator
RMIT
VIC Node
Technique
Electron Beam Evaporation (E-Beam Evaporation)
Description
KJLC PVD 75 Thin Film Deposition Systems
Related Information
Materials: Au, Ti, Ni, Pt, Al, and certain other materials upon request.
Tool Contact
arnan.mitchell@rmit.edu.au
Intlvac Nanochrome II – E-beam Evaporator
Electron beam evaporator
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electron Beam Evaporation (E-Beam Evaporation)
Description
Single films or multi-material stacks are easily created using simple layer definitions. Features ion-beam pre-cleaning and sample heating capabilities.
Related Information
Features a 10kV power supply and supports up to sixteen 4 inch wafers or fifteen 6 inch wafers or wafer mounted samples.Coating thickness are from 2nm up to 200nm (thickness >200nm by approval). Currently available in the materials library are metals (Al, Cr, Ti, Au, Ag), oxides (SiO2, TiO2, Al2O3, ITO), fluorides (MgF2) and semiconductors (Si, Ge).
Tool Contact
mcn-enquiries@nanomelbourne.com
Aerosol spray coater- Sono-Tek
More information to come.
CSIRO
VIC Node
Technique
Coatings
Description
The ExactaCoat is a fully-enclosed programmable 3-axis robot that is ideal for any spray coating application. This system employs robust ball-screw slides driven by brushless DC servo motors. Sono-Tek ultrasonic nozzles are easily integrated. Spray pattern widths can be easily shaped depending on which nozzle is used. Patterns are easily shaped, ranging from 2 - 153 mm. Several liquid delivery options are available with a wide range of flow rates.
Related Information
Range of motion 400 mm x 400 mm x 100 mm , resolution 0.015 mm. Heater plate up to 150 degrees C.
Tool Contact
mark.bown@csiro.au
Dip Coater- KSV-NIMA Large Multivessel
Programmable for up to 8 different solution vessels
Swinburne University of Technology
VIC Node
Technique
Coatings
Description
Deposits a coating via dipping and withdrawing the sample into solutions at a specified rate
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
Langmuir Blodgett Deposition Trough
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Coatings
Description
Langmuir Blodgett monolayer deposition trough for coating applications
Related Information
A Langmuir–Blodgett trough (LB trough) is an item of laboratory apparatus that is used to compress monolayers of molecules on the surface of a given subphase (usually water) and to measure surface phenomena due to this compression. It can also be used to deposit single or multiple monolayers on a solid substrate.
Tool Contact
mcn-enquiries@nanomelbourne.com
Parylene Coater- SCS
More information to come.
CSIRO
VIC Node
Technique
Coatings
Description
The SCS Labcoter® 2 (PDS 2010) vacuum deposition system uses powered parylene precursor (dimer) to apply ultra-thin inert and biocompatible coatings with excellent moisture, chemical and dielectric barrier properties. The controlled deposition can form films in thicknesses from several hundred angstroms to 75 microns.
Related Information
Samples can be up to 30cm by 20cm.
Tool Contact
mark.bown@csiro.au
ALD Cambridge NanoTech Fiji 200
Plasma assisted atomic layer deposition (PA-ALD) System
Melbourne Centre for Nanofabrication
VIC Node
Technique
Atomic Layer Deposition (ALD)
Description
The Fiji F200 is capable of both thermal and Plasma Assisted ALD (PA-ALD). PA-ALD expands the window for materials by decreasing activation energy and allows for deposition at lower temperatures to reduce precursor decomposition, deposition times and film contaminations. This tool is equipped to enable Cambridge Nanotech’s unique Exposure Mode™ for thin film deposition on ultra high aspect ratio substrates. In-situ film growth can be monitored using a spectroscopic ellipsometry.
Related Information
Substrate size - Up to 6 inch diameter. Maximum substrate heating - 500°C. Available ALD films- Al2O3, TiO2, SiO2, SnO2, ZnO, Ta2O5, MoO3, HfO2, TiN, AZO.
Tool Contact
mcn-enquiries@nanomelbourne.com
ALD Cambridge NanoTech Savannah S100
Atomic layer deposition (ALD) system in a glovebox
Melbourne Centre for Nanofabrication
VIC Node
Technique
Atomic Layer Deposition (ALD)
Description
This glovebox-integrated thermal ALD system allows the user to deposit materials in controlled environments.
Related Information
Available films- Al2O3, TiO2, WO3, NiOx. Compatible up to 4 inch diameter sample size
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AJA Combinatorial Sputterer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The ATC-2200-HY has six sputter targets, one off-axis sputter target, e-beam source, in-situ ellipsometery and RHEED scanning capability. It is also fitted with a X-Y stage and masking system to deposit up to 25 index points in one deposition run.
Related Information
Combinatorial discovery of materials using vacuum based sputtering of different metals, metal oxide, metal sulphide, metal selenides, metal nitride, metal carbide thin films and mixtures thereof with thicknesses of ~5 – 1000’s of nanometres with a precision of 1.5% over a 6” diameter. Its applicability to deposit a wide variety of thin coatings makes it highly desirable for new material discovery and optimisation of absorber, transport and electrode materials for use in advanced solar cells.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Au Sputter Coater (EM Sample Prep)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Desk magnetron sputter coater (DSR1)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
EM Sample Prep Sputter Coater
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Sputter coating instrument for SEM sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Intlvac Nanochrome – Sputterer
AC/DC Sputtering system with co-deposition
Melbourne Centre for Nanofabrication
VIC Node
Description
An automated tool which can be used to deposit a wide variety of conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to three materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with three materials in the same run.Features ion beam cleaning.Recipe-based automated operation.Can be used to coat samples of up to 8 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Magnetron Sputtering
RF/DC sputtering system
Melbourne Centre for Nanofabrication
VIC Node
Description
Manual tool which can be used to deposit a wide variety of conductive and non-conductive thin films including metals, oxides, nitrides and alloys. The system allows for up to two materials to be co-deposited at once, with the option to vary the composition over time.
Related Information
Can coat with two materials in the same run.Features ion beam cleaning.Manual operation.Can be used to coat samples of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
RF sputter deposition system- Kurt J. Lesker PVD75
RF sputter
Melbourne Centre for Nanofabrication
VIC Node
Description
RF sputters
Related Information
DC/RF Magnetron sputtering system capable of sputter deposition of a wide range of materials. The instrument can be used for high temperature sputter deposition.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sputter Cr Quorum
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Chromium sputtering instrument devoted to EBL sample preparation
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Oxford Instruments PlasmaPro ICP – PECVD
Plasma enhanced chemical vapour deposition system (PECVD) for depositing SiOx and SiN
Melbourne Centre for Nanofabrication
VIC Node
Description
Offers fast, affordable deposition at relatively low temperatures.
Related Information
Deposits SiO2, Si3N4, and amorphous Silicon at 100-400 degrees C.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
PECVD Oxford PlasmaLab
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Used to coat planar samples with Silicon Oxide or Silicon Nitride thin film
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Plasma Polymerisation Reactors
Deposition of a variety of organic films, including dedicated reactors for air plasma, allylamine (-NH2), acrylic acid (-COOH) and octadiene (-CH2). Samples up to 20 cm in diameter
Melbourne Centre for Nanofabrication
VIC Node
Description
Custom built reactors to deposit a wide variety of organic thin films via plasma enhanced chemical vapour deposition (PE-CVD)
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Microwave Diamond Deposition – BDD
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Used to coat seeded samples of any shape with boron-doped diamond.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Microwave Diamond Deposition – NV
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Used to coat seeded samples of any shape with boron-doped diamond.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Ni Electroplating System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Digital Matrix SA1000 instrument provides high quality nikel coatings (electroplating) and shim fabrication (electroforming) for embossing. Maximum sample size upto 200mm in diameter
Related Information
Electroplating is a common process in the jewellery, automotive, and food industries but it is also highly useful in the production of semi-conducting electronics and optics. Different metals can also be used to grow shims for use in hot embossing and nano-imprint lithography, while they can also help to protect surfaces from aggressive etching processes. Nickel electroplating can also be used to cast PDMS in the creation of fluidic cells.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Nickel Electroforming/Plating
Nickel electroplating system
Melbourne Centre for Nanofabrication
VIC Node
Description
Can fabricate Ni masters from patterned (photolithography, EBL) substrates to be used in hot embossing and nano-imprint lithography for mass production
Related Information
Up to 8 inch diameter sample size; mould thickness up to 1 micron, minimum feature size depends on aspect ratio
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
E-beam Evaporator (Dual Source)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Single films or multi-material stacks are easily created using simple layer definitions. Features ion-beam pre-cleaning and sample heating capabilities.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
E-beam Evaporator
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Able to deposit single or multi-stack film. Features ion-beam pre-cleaning and sample stage cooling capabilities. This system is reserved for precious metals and adhesion metals deposition only. The following materials are allowed in the chamber. (Au, Ag, Pt, Pd, Ti, Cr)
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Electron beam evaporation system- Kurt J. Lesker PVD75
E-Beam evaporator
Melbourne Centre for Nanofabrication
VIC Node
Description
KJLC PVD 75 Thin Film Deposition Systems
Related Information
Materials: Au, Ti, Ni, Pt, Al, and certain other materials upon request.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Intlvac Nanochrome II – E-beam Evaporator
Electron beam evaporator
Melbourne Centre for Nanofabrication
VIC Node
Description
Single films or multi-material stacks are easily created using simple layer definitions. Features ion-beam pre-cleaning and sample heating capabilities.
Related Information
Features a 10kV power supply and supports up to sixteen 4 inch wafers or fifteen 6 inch wafers or wafer mounted samples.Coating thickness are from 2nm up to 200nm (thickness >200nm by approval). Currently available in the materials library are metals (Al, Cr, Ti, Au, Ag), oxides (SiO2, TiO2, Al2O3, ITO), fluorides (MgF2) and semiconductors (Si, Ge).
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Aerosol spray coater- Sono-Tek
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The ExactaCoat is a fully-enclosed programmable 3-axis robot that is ideal for any spray coating application. This system employs robust ball-screw slides driven by brushless DC servo motors. Sono-Tek ultrasonic nozzles are easily integrated. Spray pattern widths can be easily shaped depending on which nozzle is used. Patterns are easily shaped, ranging from 2 - 153 mm. Several liquid delivery options are available with a wide range of flow rates.
Related Information
Range of motion 400 mm x 400 mm x 100 mm , resolution 0.015 mm. Heater plate up to 150 degrees C.
Tool Contact
mark.bown@csiro.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Dip Coater- KSV-NIMA Large Multivessel
Programmable for up to 8 different solution vessels
Melbourne Centre for Nanofabrication
VIC Node
Description
Deposits a coating via dipping and withdrawing the sample into solutions at a specified rate
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Langmuir Blodgett Deposition Trough
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Langmuir Blodgett monolayer deposition trough for coating applications
Related Information
A Langmuir–Blodgett trough (LB trough) is an item of laboratory apparatus that is used to compress monolayers of molecules on the surface of a given subphase (usually water) and to measure surface phenomena due to this compression. It can also be used to deposit single or multiple monolayers on a solid substrate.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Parylene Coater- SCS
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The SCS Labcoter® 2 (PDS 2010) vacuum deposition system uses powered parylene precursor (dimer) to apply ultra-thin inert and biocompatible coatings with excellent moisture, chemical and dielectric barrier properties. The controlled deposition can form films in thicknesses from several hundred angstroms to 75 microns.
Related Information
Samples can be up to 30cm by 20cm.
Tool Contact
mark.bown@csiro.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ALD Cambridge NanoTech Fiji 200
Plasma assisted atomic layer deposition (PA-ALD) System
Melbourne Centre for Nanofabrication
VIC Node
Description
The Fiji F200 is capable of both thermal and Plasma Assisted ALD (PA-ALD). PA-ALD expands the window for materials by decreasing activation energy and allows for deposition at lower temperatures to reduce precursor decomposition, deposition times and film contaminations. This tool is equipped to enable Cambridge Nanotech’s unique Exposure Mode™ for thin film deposition on ultra high aspect ratio substrates. In-situ film growth can be monitored using a spectroscopic ellipsometry.
Related Information
Substrate size - Up to 6 inch diameter. Maximum substrate heating - 500°C. Available ALD films- Al2O3, TiO2, SiO2, SnO2, ZnO, Ta2O5, MoO3, HfO2, TiN, AZO.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ALD Cambridge NanoTech Savannah S100
Atomic layer deposition (ALD) system in a glovebox
Melbourne Centre for Nanofabrication
VIC Node
Description
This glovebox-integrated thermal ALD system allows the user to deposit materials in controlled environments.
Related Information
Available films- Al2O3, TiO2, WO3, NiOx. Compatible up to 4 inch diameter sample size
Tool Contact
mcn-enquiries@nanomelbourne.com
Etching
Porous Silicon Etching
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
HF Etching
Description
Microporous silicon and silicon nanoparticles are fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon (PS) has gained wide-spread attention over the last decade for its interesting material properties, including nanometer features and extremely high specific surface area. Applications are, amongst others, humidity sensors, particle filters, optical elements and biochemical matrices. Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage.
Tool Contact
mcn-enquiries@nanomelbourne.com
Small Etching Cell
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
HF Etching
Description
Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon in small batches
Tool Contact
mcn-enquiries@nanomelbourne.com
Benchtop Plasma Asher
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Plasma etching
Description
Harrick plasma etcher / asher
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Large Plasma Asher
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Plasma etching
Description
General Plasma cleaning system
Related Information
Plasma Asher commonly used to clean materials of organics materials, and can also be used for surface treatment of materials
Tool Contact
mcn-enquiries@nanomelbourne.com
ICP/RIE – Silicon-specific dry etching
Deep reactive ion etcher (DRIE) capable of Bosch process
Melbourne Centre for Nanofabrication
VIC Node
Technique
Deep Reactive Ion Etching (DRIE)
Description
Silicon-specific dry etching with good control over feature size and Bosch process capability for high aspect ratio structures.
Related Information
SF6 gas is turned in to a plasma using RF power. The plasma that is created is highly reactive to Silicon. The SF6 combined with a passivating chemistry using C4F8, which is used to control the Silicon etching profile.
Tool Contact
mcn-enquiries@nanomelbourne.com
ICP/RIE (Multi-etch system)
Deep reactive ion etcher (DRIE)
Melbourne Centre for Nanofabrication
VIC Node
Technique
Deep Reactive Ion Etching (DRIE)
Description
General dry reactive etching of wide range of materials.
Related Information
Reactive species and ions are used to react with the substrate that is placed in the reactor to etch Si, SiO2, SI3N4, SiC, a-Si, Ti, TiW, Mo, Nb, Ta, Graphene and other 2D materials, Cr, Au, LiNbO3, Al, Al2O3, Hf, Hf02, TiN, TiO2, and more.
Tool Contact
mcn-enquiries@nanomelbourne.com
NLD RIE Si/SiO2
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Deep Reactive Ion Etching (DRIE)
Description
ULVAC NLD-570 etch system is designed with low process pressure, high density plasma, low electron temperature which are perfect for the etch applications of deep oxide, LiNbO3, TiO2, quartz, glass, and Pyrex etc. The NLD-570 is also capable of etching Si both in RIE and DRIE applications.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
SAMCO ICP-RIE System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Deep Reactive Ion Etching (DRIE)
Description
The RIE-400iP is a load lock type etching system used to precisely and uniformly etch various semiconductor materials and dielectric films. The system is equipped with unique ICP source for generating uniform and high-density plasma.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Porous Silicon Etching
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Microporous silicon and silicon nanoparticles are fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon (PS) has gained wide-spread attention over the last decade for its interesting material properties, including nanometer features and extremely high specific surface area. Applications are, amongst others, humidity sensors, particle filters, optical elements and biochemical matrices. Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Small Etching Cell
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon in small batches
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Benchtop Plasma Asher
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Harrick plasma etcher / asher
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Large Plasma Asher
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
General Plasma cleaning system
Related Information
Plasma Asher commonly used to clean materials of organics materials, and can also be used for surface treatment of materials
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ICP/RIE – Silicon-specific dry etching
Deep reactive ion etcher (DRIE) capable of Bosch process
Melbourne Centre for Nanofabrication
VIC Node
Description
Silicon-specific dry etching with good control over feature size and Bosch process capability for high aspect ratio structures.
Related Information
SF6 gas is turned in to a plasma using RF power. The plasma that is created is highly reactive to Silicon. The SF6 combined with a passivating chemistry using C4F8, which is used to control the Silicon etching profile.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ICP/RIE (Multi-etch system)
Deep reactive ion etcher (DRIE)
Melbourne Centre for Nanofabrication
VIC Node
Description
General dry reactive etching of wide range of materials.
Related Information
Reactive species and ions are used to react with the substrate that is placed in the reactor to etch Si, SiO2, SI3N4, SiC, a-Si, Ti, TiW, Mo, Nb, Ta, Graphene and other 2D materials, Cr, Au, LiNbO3, Al, Al2O3, Hf, Hf02, TiN, TiO2, and more.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
NLD RIE Si/SiO2
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
ULVAC NLD-570 etch system is designed with low process pressure, high density plasma, low electron temperature which are perfect for the etch applications of deep oxide, LiNbO3, TiO2, quartz, glass, and Pyrex etc. The NLD-570 is also capable of etching Si both in RIE and DRIE applications.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
SAMCO ICP-RIE System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The RIE-400iP is a load lock type etching system used to precisely and uniformly etch various semiconductor materials and dielectric films. The system is equipped with unique ICP source for generating uniform and high-density plasma.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Laboratory Infrastructure
Tape caster
Tape caster
RMIT
VIC Node
Technique
Tape casting
Description
Tape caster
Related Information
Tape Caster AT06001 combines component accessibility, logical carrier film flow, and precision to maximize operational efficiency.
Tool Contact
arnan.mitchell@rmit.edu.au
Planetary Centrifugal Mixer- THINKY
Planetary Centrifugal Mixer
RMIT
VIC Node
Technique
Planetary centrifugal mixer
Description
Polymer binder preparation
Related Information
Revolution speed: Max. 2,000 rpm (0 rpm and 200 rpm – 2,000 rpm / Increment per 10 rpm); Rotation speed: Max. 1,000 rpm (1/2 of revolution speed); Standard container: Inner volume: 300 ml and 150 ml, Material: HDPE.
Tool Contact
arnan.mitchell@rmit.edu.au
Ion Beam Milling System – Leica EM TIC 3X
Triple ion-beam milling with cryo stage
University of Melbourne
VIC Node
Technique
Ion beam milling
Description
Broad ion beam cross-sectioning and polishing
Related Information
Triple ion-beam milling with cryo stage
Tool Contact
elena.taran@unimelb.edu.au
Critical Point Dryer – Leica EM CPD300
Fully automated with a variety of sample holders. Drying delicate samples for SEM/HIM/AFM analysis.
University of Melbourne
VIC Node
Technique
Critical point dryer
Description
Fully automated Critical Point Dryer
Related Information
Fully automated with a variety of sample holders
Tool Contact
elena.taran@unimelb.edu.au
Cryostat – Lecia CM1950
Cuts 3 to 20um thin section of frozen samples (biological or soft materials)
University of Melbourne
VIC Node
Technique
Cryostat
Description
Cryostat with motorised stage for large numbers of sections of frozen materials
Related Information
Motorised sectioning of specimens: cuts 1-100 micrometres slices.
Tool Contact
elena.taran@unimelb.edu.au
Sanyo -80C Freezer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Biological freezer
Description
Freezer for storage of sensitive biologicals
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Cell Culture Incubator
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Cell Culture Incubator
Description
A specialised piece of laboratory equipment designed to provide a controlled environment for the growth and maintenance of cell cultures. It typically maintains specific conditions such as temperature, humidity, and CO2 levels to promote optimal cell growth and viability. These incubators are essential for various cell-based experiments and research in fields like biology, biotechnology, and medicine.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Ceramic tape preparation (green tape preparation)
Custom Green Tape Production
RMIT
VIC Node
Technique
Ceramic tape preparation
Description
Group of equipment, including fume hood, scale, ultrasonic bath, hotplate, usually used to make inorganic material.
Related Information
Custom ceramic slurry, or 3-D printing inks
Tool Contact
arnan.mitchell@rmit.edu.au
Automated Wetbench Suite
Set of wet benches for wet processing
Melbourne Centre for Nanofabrication
VIC Node
Technique
Wetbench
Description
The automated wet-bench suite is comprised of three custom made instruments – a manual wet processing deck, a semi-automated chemical cleaning station and an IPA aerosol vapour dryer. All three wetbench instruments are designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. The wetbench suite significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management systems.
Related Information
Manual wet processing baths - KOH, Cr etcher, 5% H2SO4, IPA and DI water. Semi-automated chemical cleaning station (enclosed, exhausted) baths - piranha, SC-2, buffered oxide etch (BOE), DI water and ultrasonic acetone de-scum station. The IPA aerosol vapour dryer dries without any need for heaters or rotation. Substrate size - Up to 6 ". Batch processing - Up to 25 wafers.
Tool Contact
mcn-enquiries@nanomelbourne.com
PDMS Casting Bench
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Wetbench
Description
General purpose workspace devoted to the preparation and casting of PDMS materials
Related Information
PDMS casting involves the fabrication of polydimethylsiloxane (PDMS) structures by pouring the liquid polymer into a mold and allowing it to cure. This technique is widely used in microfluidics, soft robotics, and biomedical applications due to PDMS's biocompatibility, flexibility, and ease of fabrication
Tool Contact
mcn-enquiries@nanomelbourne.com
Robotic Wet Bench
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Wetbench
Description
Robotic wet bench is a semi-automated chemical cleaning station which comprises of RCA cleaning baths (DI water, SC1, SC2 and HF buffered oxide etch baths) and megasonic acetone cleaning (Lift off) bath. Robotic wet bench is designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. The Robotic wet bench system significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management.
Related Information
The Robotic wet bench is a semi- automated process tool that is used to carry out wet etching or cleaning steps of a fabrication process. It has four baths for RCA cleaning of wafers- DI water, SC1 (piranha cleaning), SC2 (HCl + H2O2) and HF buffered oxide etch. In addition it has a megasonic acetone cleaning bath for lift off process.
Tool Contact
mcn-enquiries@nanomelbourne.com
Standalone Wet Bench
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Wetbench
Description
Standalone wet bench is a manual chemical processing station having six separtated baths- KOH etching, Cr etching, DI water cleaning, and the rest baths are currently not in use. This wet bench is designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. This wet bench system significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management.
Related Information
The Standalone wet bench is a wet chemical process tool that eliminates glasswares during processing as well as the safe waste management system to carry out wet etching or cleaning steps of a fabrication process.
Tool Contact
mcn-enquiries@nanomelbourne.com
Biosafety Cabinets
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Fumehoods
Description
A ventilated enclosure used in laboratories to provide a safe environment for working with potentially hazardous biological materials.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Fumehood Cabinets
Topsafe Class II
Melbourne Centre for Nanofabrication
VIC Node
Technique
Fumehoods
Description
A recirculating fume cupboard with a spin coater and a hot plate.
Related Information
Standard equipment for photolithography, using a wide range of photoresists (AZ, SU8, PPA, PMMA) and various substrates.
Tool Contact
mcn-enquiries@nanomelbourne.com
Laminar Flow Cabinet
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Fumehoods
Description
A laminar flow cabinet is a type of enclosed workspace used in laboratories and cleanrooms to provide a sterile and particle-free environment for conducting experiments, handling sensitive materials, or preparing samples.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Tape caster
Tape caster
Melbourne Centre for Nanofabrication
VIC Node
Description
Tape caster
Related Information
Tape Caster AT06001 combines component accessibility, logical carrier film flow, and precision to maximize operational efficiency.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Planetary Centrifugal Mixer- THINKY
Planetary Centrifugal Mixer
Melbourne Centre for Nanofabrication
VIC Node
Description
Polymer binder preparation
Related Information
Revolution speed: Max. 2,000 rpm (0 rpm and 200 rpm – 2,000 rpm / Increment per 10 rpm); Rotation speed: Max. 1,000 rpm (1/2 of revolution speed); Standard container: Inner volume: 300 ml and 150 ml, Material: HDPE.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Ion Beam Milling System – Leica EM TIC 3X
Triple ion-beam milling with cryo stage
Melbourne Centre for Nanofabrication
VIC Node
Description
Broad ion beam cross-sectioning and polishing
Related Information
Triple ion-beam milling with cryo stage
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Critical Point Dryer – Leica EM CPD300
Fully automated with a variety of sample holders. Drying delicate samples for SEM/HIM/AFM analysis.
Melbourne Centre for Nanofabrication
VIC Node
Description
Fully automated Critical Point Dryer
Related Information
Fully automated with a variety of sample holders
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Cryostat – Lecia CM1950
Cuts 3 to 20um thin section of frozen samples (biological or soft materials)
Melbourne Centre for Nanofabrication
VIC Node
Description
Cryostat with motorised stage for large numbers of sections of frozen materials
Related Information
Motorised sectioning of specimens: cuts 1-100 micrometres slices.
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Sanyo -80C Freezer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Freezer for storage of sensitive biologicals
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Cell Culture Incubator
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
A specialised piece of laboratory equipment designed to provide a controlled environment for the growth and maintenance of cell cultures. It typically maintains specific conditions such as temperature, humidity, and CO2 levels to promote optimal cell growth and viability. These incubators are essential for various cell-based experiments and research in fields like biology, biotechnology, and medicine.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Ceramic tape preparation (green tape preparation)
Custom Green Tape Production
Melbourne Centre for Nanofabrication
VIC Node
Description
Group of equipment, including fume hood, scale, ultrasonic bath, hotplate, usually used to make inorganic material.
Related Information
Custom ceramic slurry, or 3-D printing inks
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Automated Wetbench Suite
Set of wet benches for wet processing
Melbourne Centre for Nanofabrication
VIC Node
Description
The automated wet-bench suite is comprised of three custom made instruments – a manual wet processing deck, a semi-automated chemical cleaning station and an IPA aerosol vapour dryer. All three wetbench instruments are designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. The wetbench suite significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management systems.
Related Information
Manual wet processing baths - KOH, Cr etcher, 5% H2SO4, IPA and DI water. Semi-automated chemical cleaning station (enclosed, exhausted) baths - piranha, SC-2, buffered oxide etch (BOE), DI water and ultrasonic acetone de-scum station. The IPA aerosol vapour dryer dries without any need for heaters or rotation. Substrate size - Up to 6 ". Batch processing - Up to 25 wafers.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
PDMS Casting Bench
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
General purpose workspace devoted to the preparation and casting of PDMS materials
Related Information
PDMS casting involves the fabrication of polydimethylsiloxane (PDMS) structures by pouring the liquid polymer into a mold and allowing it to cure. This technique is widely used in microfluidics, soft robotics, and biomedical applications due to PDMS's biocompatibility, flexibility, and ease of fabrication
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Robotic Wet Bench
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Robotic wet bench is a semi-automated chemical cleaning station which comprises of RCA cleaning baths (DI water, SC1, SC2 and HF buffered oxide etch baths) and megasonic acetone cleaning (Lift off) bath. Robotic wet bench is designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. The Robotic wet bench system significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management.
Related Information
The Robotic wet bench is a semi- automated process tool that is used to carry out wet etching or cleaning steps of a fabrication process. It has four baths for RCA cleaning of wafers- DI water, SC1 (piranha cleaning), SC2 (HCl + H2O2) and HF buffered oxide etch. In addition it has a megasonic acetone cleaning bath for lift off process.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Standalone Wet Bench
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Standalone wet bench is a manual chemical processing station having six separtated baths- KOH etching, Cr etching, DI water cleaning, and the rest baths are currently not in use. This wet bench is designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. This wet bench system significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management.
Related Information
The Standalone wet bench is a wet chemical process tool that eliminates glasswares during processing as well as the safe waste management system to carry out wet etching or cleaning steps of a fabrication process.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Biosafety Cabinets
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
A ventilated enclosure used in laboratories to provide a safe environment for working with potentially hazardous biological materials.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fumehood Cabinets
Topsafe Class II
Melbourne Centre for Nanofabrication
VIC Node
Description
A recirculating fume cupboard with a spin coater and a hot plate.
Related Information
Standard equipment for photolithography, using a wide range of photoresists (AZ, SU8, PPA, PMMA) and various substrates.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Laminar Flow Cabinet
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
A laminar flow cabinet is a type of enclosed workspace used in laboratories and cleanrooms to provide a sterile and particle-free environment for conducting experiments, handling sensitive materials, or preparing samples.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Lithography
He Ion Microscope
No need for conductive coatings traditionally required by SEM
University of Melbourne
VIC Node
Technique
He Ion Microscope (HIM) Etching
Description
Gas field ion source based equipment for nanofabrication and high resolution imaging
Related Information
He/Ne beam for nano-scale milling
Tool Contact
elena.taran@unimelb.edu.au
ABM Stand Alone UV Exposure System
UV flood exposure source
Melbourne Centre for Nanofabrication
VIC Node
Technique
UV Flood Exposure
Description
A versatile system that floods the exposure chamber with UV light.
Related Information
This equipment can produce features that measure ~2 µm in size.A 7-inch sample well allows for versatility and processing of relatively large or abnormally shaped substrates and samples.Most substrate materials can be used.
Tool Contact
mcn-enquiries@nanomelbourne.com
Thermal Scanning Probe Lithography-NanoFrazor
Thermal Scanning Probe Lithography (t-SPL) system
Melbourne Centre for Nanofabrication
VIC Node
Technique
Thermal Scanning Probe Lithography (t-SPL)
Description
Operates at ambient temperature, pressure, low voltage, and under N2 atmosphere.Not reliant on ion gun or electron beam which is good when processing sensitive materials and devices.
Related Information
Uses a 1,000°C cantilever tip to sublimate PPA resist.Sub -10nm resolution, <2nm vertical accuracy
Tool Contact
mcn-enquiries@nanomelbourne.com
Combination Spinner/Hotplate
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spin coating and wafer development
Description
High uniformity coating of 4 inch wafers with photoresist, with hotplate attached
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
HG Programmable Hotplate
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spin coating and wafer development
Description
Programmable hotplate, 3 programmes, 5 ramps.
Related Information
High temperature titanium hotplate up to 600°C, 230V, without regulator, antimagnetic and rustproof, 2000W, plate size 280x200 mm, with cover
Tool Contact
mcn-enquiries@nanomelbourne.com
Laminator Sky 325R6
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spin coating and wafer development
Description
Laminator with programmable temperature and speed control.
Related Information
The SKY laminator is used to apply SU8 dry films, to silicon wafers. These films are thicknesses ranging from 100 µm to more than 500 µm, and are thus a preferred alternative to spinning thick films of liquid SU8 resist.
Tool Contact
mcn-enquiries@nanomelbourne.com
Lithography Track System
Automated spin-coating and wafer developing system
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spin coating and wafer development
Description
A fully automated system for wafer processing which includes spin coating, HMDS application, baking, and development.The system is well suited to batch scale production, providing high process performance and consistency in coating and development.
Related Information
Substrate size - 4 and 6 inch wafers. Batch process size - up to 25 wafers at a time. Resist system used - AZ 1512 and AZ 4562 photoresists to coat wafers and AZ 400K for development.
Tool Contact
mcn-enquiries@nanomelbourne.com
Pico Track Automatic spin coater and developer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spin coating and wafer development
Description
PCT-150RRE is capable of running wafer sizes of 4 inch and 6 inch diameter with no change-over requirements. Comprised of numerous spin modules, the system can adapt to virtually all photolithography processes with precision and produce patterned wafers with extremely high uniformity. The track system automates all steps continuously including adhesion promoter, pre-baking, resist coating, edge-bead removal (EBR), development, and post-baking.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Spinner SUSS 6 inch wafer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spin coating and wafer development
Description
High uniformity coating of 6 inch wafers with photoresist
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Suss Delta RC80+ Spin Coater
Spin coater
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spin coating and wafer development
Description
Spin coater set up to process 4-inch wafers and also features a hot plate.
Related Information
high uniformity spin coater.
Tool Contact
mcn-enquiries@nanomelbourne.com
Suss RC8 Gyrosett Spinner
Spin coater
RMIT
VIC Node
Technique
Spin coating and wafer development
Description
Spin coater
Related Information
Wafer size: Pieces and up to 4 inch wafers; Spin speed: 6000RPM (based on a ø100mm silicon wafer).
Tool Contact
arnan.mitchell@rmit.edu.au
EVG 620 Mask Aligner with UV Nanoprint
Mask aligner and resist exposure system with NIL capability
Melbourne Centre for Nanofabrication
VIC Node
Technique
Nano Imprint Lithography
Description
A high-resolution mask aligner with split-field microscopes that is capable of handling multiple wafer sizes with quick change-over time. Features back side alignment capability for mask aligning.
Related Information
Used for a variety of applications to transfer multiple layers of nanoscale patterns into photoresist films.Provides a minimum feature size of approximately 1 µm.
Tool Contact
mcn-enquiries@nanomelbourne.com
Displacement Talbot Lithography
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Multiple mask lithography
Description
The PhableR tool provides unprecedented ability to print high resolution periodic structures in a low-cost, table-top system.Structures such as sub-micron period linear gratings and 2D patterns such as hexagonal and square lattices are printed with high uniformity and fidelity.
Related Information
The PhableR-100C uses DUV for patterning at high resolution below 300nm pitch and exposures are non-contact, protecting wafers and masks from physical contact and contamination.
Tool Contact
mcn-enquiries@nanomelbourne.com
Mask Aligner
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Multiple mask lithography
Description
SUSS MA6 allow for aligning multi layer features using multiple masks. This means that multiple layers can be built up on a single device by using appropriate alignment markers in the mask design.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Mask Aligner/UV NIL EVG
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Multiple mask lithography
Description
EVG 6200 allow for aligning multi layer features using multiple masks. This means that multiple layers can be built up on a single device by using appropriate alignment markers in the mask design. In addition to backside alignment capability
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Direct Write Heidelberg MLA150
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Maskless lithography
Description
Maskless aligner MLA150 is a photlolithography tool that provides non-contact exposure, outstanding
ease of use, and high speed, making it the ideal tool in rapid prototyping environments, for
low- to mid-volume production, and Research & Development.
Related Information
The MLA150 is equipped with both 405nm and 375nm solid state laser sources. It is equipped with write mode I and is capable of producing minimum structure size of 0.6um. The system comes equipped with an automated handling unit which can support batch direct-write lithography on standard size wafers such as 6in and 4in substrates as well as 5in mask plates.
Tool Contact
mcn-enquiries@nanomelbourne.com
Intelligent Micropatterning SF100 XPRESS
Maskless micropatterning system
Melbourne Centre for Nanofabrication
VIC Node
Technique
Maskless lithography
Description
A maskless photolithography system capable of writing features down to 1 μm, that offers speed and cost benefits over masked systems.
Related Information
A wide range of materials can be processed, and provides great control in writing and aligning fine features on smaller substrates. The process us non-contact, which reduces risk of damaged samples. Commonly used to quickly and accurately create photomasks.
Tool Contact
mcn-enquiries@nanomelbourne.com
EVG 520 Wafer System
Hot embossing tool
Melbourne Centre for Nanofabrication
VIC Node
Technique
Hot embossing
Description
Can emboss wafers and perform bonding such as anodic bonding, fusion bonding, eutectic bonding and epoxy bonding.
Related Information
Used for controlled embossing into polycarbonate and COC substrates of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
FEI Helios NanoLab 600 Dual Beam FIB-SEM
Scanning electron microscope with focused ion beam for milling (FIB-SEM)
Melbourne Centre for Nanofabrication
VIC Node
Technique
Focused Ion Beam (FIB) milling
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and maskless ion beam direct lithography.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6-inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface. Ion beam patterning with 30 kV accelerating voltage and variable currents.
Tool Contact
mcn-enquiries@nanomelbourne.com
Electron Beam Lithography (EBL) System
Electron beam lithography (EBL) system
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electron Beam Lithography (EBL)
Description
EBL that is capable of exposing thick layers of e-beam resist of up to several micrometres with small forward scattering.Fully automated equipment features a laser height measurement for automatic focus adjustment.
Related Information
Can produces ~10nm structures.Metrology functions for self-calibration.Operates at up to 100 keV acceleration voltage.The electron beam spot can be focused to less than 5 nm in diameter. A wide range of beam currents (200 pA – 150 nA) are available for high-throughput as well as high-resolution exposures. 6-inch wafers and mask blanks measuring up to 5 × 5 inches can be processed.Rapid exposure with 50 MHz pattern generator.A laser-guided substrate stage provides 15 nm field stitching error.Maximum writing field of 1 x 1 mm.The overlay accuracy is below 20nm.For the conversion of the CAD patterns into machine specific format, including proximity effect correction (PEC), special software, TRACER and BEAMER from GenIsys GmbH are used.
Tool Contact
mcn-enquiries@nanomelbourne.com
Direct Write Laser- Heidelberg MLA150_1
Maskless Aligner
RMIT
VIC Node
Technique
Direct laser lithography
Description
Maskless Aligner
Related Information
Minimum Structure Size [μm]: 1 μm; Maximum Write Area [mm²]: 150 x 150; Alignment Accuracy*[3σ, nm] for 100 x 100 mm²: <=500.
Tool Contact
arnan.mitchell@rmit.edu.au
NanoScribe
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Direct laser lithography
Description
The NanoScribe Photic Professional GT2 (PPGT2) is a direct laser lithography system that uses two-photon polymerisation for additive 3D printing. A focal spot volume is defined by an IR femtosecond laser that concentrates light pulses and within this volume polymerisation occurs. The X-, Y- and Z-coordinate of a CAD model is defined by a focal spot volume, allowing for a CAD design to be printed as a 3D nanostructure layer-by-layer.
Related Information
Two-photon polymerization is based on the principle of photopolymerization. Here, targeted exposure to light triggers the polymerization, or the process to bring monomers together to create a polymer chain, of synthetic resins. This chain reaction causes the molecules to bond and harden, resulting in 3D models.
Tool Contact
mcn-enquiries@nanomelbourne.com
Electrocleaning DigitalMatrix PMT
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Cleaning
Description
It is an instrument for electrocleaning and passivation layer formation which is one of the the process steps for fabricating a copy of the Master mould (Ni shim). Passivation layer will make it easy for separation/un-zipping of the two Ni metal shims after electroforming.
Related Information
The instrument uses highly alkalline based electrolyte and runs automated electrocleaning and passivation anodic/cathodic cycles to clean the sample surface first to form a passivating thin oxide layer.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
He Ion Microscope
No need for conductive coatings traditionally required by SEM
Melbourne Centre for Nanofabrication
VIC Node
Description
Gas field ion source based equipment for nanofabrication and high resolution imaging
Related Information
He/Ne beam for nano-scale milling
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
ABM Stand Alone UV Exposure System
UV flood exposure source
Melbourne Centre for Nanofabrication
VIC Node
Description
A versatile system that floods the exposure chamber with UV light.
Related Information
This equipment can produce features that measure ~2 µm in size.A 7-inch sample well allows for versatility and processing of relatively large or abnormally shaped substrates and samples.Most substrate materials can be used.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Thermal Scanning Probe Lithography-NanoFrazor
Thermal Scanning Probe Lithography (t-SPL) system
Melbourne Centre for Nanofabrication
VIC Node
Description
Operates at ambient temperature, pressure, low voltage, and under N2 atmosphere.Not reliant on ion gun or electron beam which is good when processing sensitive materials and devices.
Related Information
Uses a 1,000°C cantilever tip to sublimate PPA resist.Sub -10nm resolution, <2nm vertical accuracy
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Combination Spinner/Hotplate
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
High uniformity coating of 4 inch wafers with photoresist, with hotplate attached
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
HG Programmable Hotplate
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Programmable hotplate, 3 programmes, 5 ramps.
Related Information
High temperature titanium hotplate up to 600°C, 230V, without regulator, antimagnetic and rustproof, 2000W, plate size 280x200 mm, with cover
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Laminator Sky 325R6
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Laminator with programmable temperature and speed control.
Related Information
The SKY laminator is used to apply SU8 dry films, to silicon wafers. These films are thicknesses ranging from 100 µm to more than 500 µm, and are thus a preferred alternative to spinning thick films of liquid SU8 resist.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Lithography Track System
Automated spin-coating and wafer developing system
Melbourne Centre for Nanofabrication
VIC Node
Description
A fully automated system for wafer processing which includes spin coating, HMDS application, baking, and development.The system is well suited to batch scale production, providing high process performance and consistency in coating and development.
Related Information
Substrate size - 4 and 6 inch wafers. Batch process size - up to 25 wafers at a time. Resist system used - AZ 1512 and AZ 4562 photoresists to coat wafers and AZ 400K for development.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Pico Track Automatic spin coater and developer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
PCT-150RRE is capable of running wafer sizes of 4 inch and 6 inch diameter with no change-over requirements. Comprised of numerous spin modules, the system can adapt to virtually all photolithography processes with precision and produce patterned wafers with extremely high uniformity. The track system automates all steps continuously including adhesion promoter, pre-baking, resist coating, edge-bead removal (EBR), development, and post-baking.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Spinner SUSS 6 inch wafer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
High uniformity coating of 6 inch wafers with photoresist
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Suss Delta RC80+ Spin Coater
Spin coater
Melbourne Centre for Nanofabrication
VIC Node
Description
Spin coater set up to process 4-inch wafers and also features a hot plate.
Related Information
high uniformity spin coater.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Suss RC8 Gyrosett Spinner
Spin coater
Melbourne Centre for Nanofabrication
VIC Node
Description
Spin coater
Related Information
Wafer size: Pieces and up to 4 inch wafers; Spin speed: 6000RPM (based on a ø100mm silicon wafer).
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
EVG 620 Mask Aligner with UV Nanoprint
Mask aligner and resist exposure system with NIL capability
Melbourne Centre for Nanofabrication
VIC Node
Description
A high-resolution mask aligner with split-field microscopes that is capable of handling multiple wafer sizes with quick change-over time. Features back side alignment capability for mask aligning.
Related Information
Used for a variety of applications to transfer multiple layers of nanoscale patterns into photoresist films.Provides a minimum feature size of approximately 1 µm.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Displacement Talbot Lithography
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The PhableR tool provides unprecedented ability to print high resolution periodic structures in a low-cost, table-top system.Structures such as sub-micron period linear gratings and 2D patterns such as hexagonal and square lattices are printed with high uniformity and fidelity.
Related Information
The PhableR-100C uses DUV for patterning at high resolution below 300nm pitch and exposures are non-contact, protecting wafers and masks from physical contact and contamination.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Mask Aligner
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
SUSS MA6 allow for aligning multi layer features using multiple masks. This means that multiple layers can be built up on a single device by using appropriate alignment markers in the mask design.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Mask Aligner/UV NIL EVG
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
EVG 6200 allow for aligning multi layer features using multiple masks. This means that multiple layers can be built up on a single device by using appropriate alignment markers in the mask design. In addition to backside alignment capability
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Direct Write Heidelberg MLA150
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Maskless aligner MLA150 is a photlolithography tool that provides non-contact exposure, outstanding
ease of use, and high speed, making it the ideal tool in rapid prototyping environments, for
low- to mid-volume production, and Research & Development.
Related Information
The MLA150 is equipped with both 405nm and 375nm solid state laser sources. It is equipped with write mode I and is capable of producing minimum structure size of 0.6um. The system comes equipped with an automated handling unit which can support batch direct-write lithography on standard size wafers such as 6in and 4in substrates as well as 5in mask plates.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Intelligent Micropatterning SF100 XPRESS
Maskless micropatterning system
Melbourne Centre for Nanofabrication
VIC Node
Description
A maskless photolithography system capable of writing features down to 1 μm, that offers speed and cost benefits over masked systems.
Related Information
A wide range of materials can be processed, and provides great control in writing and aligning fine features on smaller substrates. The process us non-contact, which reduces risk of damaged samples. Commonly used to quickly and accurately create photomasks.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
EVG 520 Wafer System
Hot embossing tool
Melbourne Centre for Nanofabrication
VIC Node
Description
Can emboss wafers and perform bonding such as anodic bonding, fusion bonding, eutectic bonding and epoxy bonding.
Related Information
Used for controlled embossing into polycarbonate and COC substrates of up to 6 inches in diameter.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
FEI Helios NanoLab 600 Dual Beam FIB-SEM
Scanning electron microscope with focused ion beam for milling (FIB-SEM)
Melbourne Centre for Nanofabrication
VIC Node
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and maskless ion beam direct lithography.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6-inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface. Ion beam patterning with 30 kV accelerating voltage and variable currents.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Electron Beam Lithography (EBL) System
Electron beam lithography (EBL) system
Melbourne Centre for Nanofabrication
VIC Node
Description
EBL that is capable of exposing thick layers of e-beam resist of up to several micrometres with small forward scattering.Fully automated equipment features a laser height measurement for automatic focus adjustment.
Related Information
Can produces ~10nm structures.Metrology functions for self-calibration.Operates at up to 100 keV acceleration voltage.The electron beam spot can be focused to less than 5 nm in diameter. A wide range of beam currents (200 pA – 150 nA) are available for high-throughput as well as high-resolution exposures. 6-inch wafers and mask blanks measuring up to 5 × 5 inches can be processed.Rapid exposure with 50 MHz pattern generator.A laser-guided substrate stage provides 15 nm field stitching error.Maximum writing field of 1 x 1 mm.The overlay accuracy is below 20nm.For the conversion of the CAD patterns into machine specific format, including proximity effect correction (PEC), special software, TRACER and BEAMER from GenIsys GmbH are used.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Direct Write Laser- Heidelberg MLA150_1
Maskless Aligner
Melbourne Centre for Nanofabrication
VIC Node
Description
Maskless Aligner
Related Information
Minimum Structure Size [μm]: 1 μm; Maximum Write Area [mm²]: 150 x 150; Alignment Accuracy*[3σ, nm] for 100 x 100 mm²: <=500.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
NanoScribe
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The NanoScribe Photic Professional GT2 (PPGT2) is a direct laser lithography system that uses two-photon polymerisation for additive 3D printing. A focal spot volume is defined by an IR femtosecond laser that concentrates light pulses and within this volume polymerisation occurs. The X-, Y- and Z-coordinate of a CAD model is defined by a focal spot volume, allowing for a CAD design to be printed as a 3D nanostructure layer-by-layer.
Related Information
Two-photon polymerization is based on the principle of photopolymerization. Here, targeted exposure to light triggers the polymerization, or the process to bring monomers together to create a polymer chain, of synthetic resins. This chain reaction causes the molecules to bond and harden, resulting in 3D models.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Electrocleaning DigitalMatrix PMT
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
It is an instrument for electrocleaning and passivation layer formation which is one of the the process steps for fabricating a copy of the Master mould (Ni shim). Passivation layer will make it easy for separation/un-zipping of the two Ni metal shims after electroforming.
Related Information
The instrument uses highly alkalline based electrolyte and runs automated electrocleaning and passivation anodic/cathodic cycles to clean the sample surface first to form a passivating thin oxide layer.
Tool Contact
mcn-enquiries@nanomelbourne.com
Manufacturing and machining
Lab scale staple yarn spinning
More information to come.
Deakin University
VIC Node
Technique
Yarn Spinning
Description
In ring spinning, a continuous band of fibers is drawn out from the sliver and twisted into yarn by a rotating spindle, which is encircled by a ring of traveler. For the small scale production of a yarn from short staple of fibres (6 spindle heads, 30 g-500 g short staple fiber)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Open End Spinning
More information to come.
Deakin University
VIC Node
Technique
Yarn Spinning
Description
For spinning yarns using a rapidly rotating open-ended rotor, typically faster and cheaper than ring spinning but lower strength and quality (96 spindles, >500 g of short staple fibre).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Ring Spinning
More information to come.
Deakin University
VIC Node
Technique
Yarn Spinning
Description
In ring spinning, a continuous band of fibers is drawn out from the sliver and twisted into yarn by a rotating spindle, which is encircled by a ring of traveller. For the pilot production of yarns from short staple fibres (96 spindles, >500 g of short staple fibre)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Fibre covering – direct cover
More information to come.
Deakin University
VIC Node
Technique
Yarn Processing
Description
Wrapping of a yarn with another.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Fibre twisting – direct Twist
More information to come.
Deakin University
VIC Node
Technique
Yarn Processing
Description
Twisting one or more yarns together.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Large wet spinning line- Dissol
More information to come.
Deakin University
VIC Node
Technique
Wet Spinning
Description
Wet spinning is a process where a polymer is dissolved in a spinning solvent where it is extruded out through a spinneret submerged in a coagulation bath composed of nonsolvents. The coagulation bath causes the polymer to precipitate in fiber form. Acrylic, rayon, aramid, modacrylic, and spandex are produced via this process. The large wet spinning line is capable of spinning solutions from 50 ml to 1 L, temperatures up to 90 degrees, and any non-flammable solvent.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Small wet spinning line- Dissol
More information to come.
Deakin University
VIC Node
Technique
Wet Spinning
Description
Wet spinning is a process where a polymer is dissolved in a spinning solvent where it is extruded out through a spinneret submerged in a coagulation bath composed of nonsolvents. The coagulation bath causes the polymer to precipitate in fiber form. Acrylic, rayon, aramid, modacrylic, and spandex are produced via this process. The small wet spinning line is capable of spinning solutions from 2 ml up to 50 ml and any non-flammable solvent.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Weaving Machine – Heavy
More information to come.
Deakin University
VIC Node
Technique
Weaving
Description
For weaving heavy yarns into textile up to 30 cm wide and 3 meters long (>500g of continuous or short staple yarn).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Weaving Machine – Light
More information to come.
Deakin University
VIC Node
Technique
Weaving
Description
For weaving lightweight yarns into textile up to 30 cm wide and 3 meters long (minimum 500g)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Laser machining system
UV laser milling machine
RMIT
VIC Node
Technique
UV laser micromilling
Description
UV Precision Processing System. It can be used for various applications, such as circuit structuring, drilling, cutting, marking, and etching. The system has a UV laser source with a wavelength of 355 nm and a power of 10 W. The system can achieve high precision and speed, as well as low cost and environmental impact. The system is suitable for processing different kinds of PCBs, especially those with high dimensional accuracy and impedance sensitivity, such as RF and microwave PCBs.
Related Information
Wave Length: 355 nm, Avg output: 17W@30 KHz, Spot size: 17 um.
Tool Contact
arnan.mitchell@rmit.edu.au
Silk Screen
Screen printer
RMIT
VIC Node
Technique
Screen printing
Description
Screen printer
Related Information
Maximum Part Size: 6 inch x 6 inch; Printe to Print accuracy: ±0.01mm; Minimum Line Width/Space: 100 μm.
Tool Contact
arnan.mitchell@rmit.edu.au
Non-woven Line
More information to come.
Deakin University
VIC Node
Technique
Non-Woven
Description
For the creation non-wovens textile from short staple of fibres (50 cm x 3 m)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Multi-material 3D printer- Ceradrop ceramic
More information to come.
RMIT
VIC Node
Technique
Multi-material printing
Description
All-in-one State-of-the-art Digital Materials Deposition Platform for process development in Printed Electronics and Smart 3D Printing.
Related Information
More information to come.
Tool Contact
arnan.mitchell@rmit.edu.au
Green tape stacker/aligner
Multilayer stacker
RMIT
VIC Node
Technique
Multilayer stacking
Description
Stacking with high accuracy multiple layers of unfired ceramic circuits
Related Information
Maximum size of a green ceramic layer: 6 inch x 6 inch; Maximum height of stack: 15 mm.
Tool Contact
arnan.mitchell@rmit.edu.au
Lab scale melt spinning line
More information to come.
Deakin University
VIC Node
Technique
Melt Spinning
Description
Melt spinning is a manufacturing process used to produce fibers by melting a polymer resin and then extruding it through a single hole to form continuous filaments. The small melt spinning line is capable of producing fibres from 5g to 20 g of pellets of thermoplastic polymer, 1-5 mm in diameter.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Large melt spinning line- Hills
More information to come.
Deakin University
VIC Node
Technique
Melt Spinning
Description
Melt spinning is a manufacturing process used to produce fibers by melting a polymer resin and then extruding it through small holes or spinnerets to form continuous filaments. The large melt spinning line is capable of producing fibres from 5000 g of pellets of thermoplastic polymer, 1-5 mm in diameter. It is capable of bicomponent spinning in an range of fibre geometries.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Polymer blending line- Wayne
More information to come.
Deakin University
VIC Node
Technique
Melt Spinning
Description
The polymer blending line is capable of preparing thermoplastic polymers (>500g) into pellets for melt extrusion. The blending line is capable of blending two polymers or materials in powder, fibre or pellets.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Small melt spinning line- Wayne
More information to come.
Deakin University
VIC Node
Technique
Melt Spinning
Description
Melt spinning is a manufacturing process used to produce fibers by melting a polymer resin and then extruding it through small holes or spinnerets to form continuous filaments. The small melt spinning line is capable of producing fibres from 20-200 g of pellets of thermoplastic polymer, 1-5 mm in diameter.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Knitting Suite
More information to come.
Deakin University
VIC Node
Technique
Knitting
Description
For the production of knitted textiles in tube (10 or 25 cm diameter), small garment prototype (scarf, socks, gloves etc. or large panel (50 cm) From continuous or short staple yarns (>50 m yarn).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Electrospinning rig- Holmark
More information to come.
Deakin University
VIC Node
Technique
Electro Spinning
Description
It is used to make nano and micro fibers ranging from 50nm to 5 microns in diameter. Many kind of polymers like Protein nanofibers, carbon nanotubes, inorganic nanofibers and synthetic polymers etc. can be synthesized using our nano fiber electrospinning unit. The unit is capable of bicomponent spinning and producing materials up to 30 cm2.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Lab made electro spinning rig
More information to come.
Deakin University
VIC Node
Technique
Electro Spinning
Description
The lab madeelectrospinning rig is used to make nano and micro fibers ranging from 50nm to 5 microns in diameter. Many kind of polymers like Protein nanofibers, carbon nanotubes, inorganic nanofibers and synthetic polymers etc. can be synthesized at small scale (<5 ml solution).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Green tape trimmer
Green tape trimmer
RMIT
VIC Node
Technique
Ceramic tape cutting
Description
Greentape Cutting Machine
Related Information
Maximum Part Size: 8 inch x 8 inch; Blade Length: 0 - 8 inch; Maximum Part Thickness: 0.25 inch.
Tool Contact
arnan.mitchell@rmit.edu.au
Isostatic press
Isostatic Laminator
RMIT
VIC Node
Technique
Ceramic Isostatic Laminating
Description
Isostatic Laminator
Related Information
Cavity Dimension: 8 inch x 12 inch x 3 inch; Maximum Temp: 90 C; Maximum Pressure: 8000 psi.
Tool Contact
arnan.mitchell@rmit.edu.au
Multimaterial Inkjet 3D Printer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Plastic printing
Description
Multimaterial polymer 3D printer.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Ball Mill (micro powder)
PQ series planetary ball mills are designed for mixing, homogenizing, fine grinding, mechanical alloying, cell disruption, small volume high-tech material production and even colloidal grinding.
RMIT
VIC Node
Technique
Other milling
Description
PQ-N2 4x500mL Gear-Drive Plenatary Ball Mill
Related Information
4x500mL Plenatary Ball Mill
Tool Contact
arnan.mitchell@rmit.edu.au
Bead Mill (nano powder)
Bead mill for continuous superfine grinding and dispersing of solids in liquids, appropriate for batch- and multi-passage operation.
RMIT
VIC Node
Technique
Other milling
Description
For continuous superfine grinding and dispersing of solids in liquids, appropriate for batch- and multi-passage operation.
Related Information
The mill is suitable for a product quantity of 140 - 500 ml.
Tool Contact
arnan.mitchell@rmit.edu.au
NanoScribe
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Direct laser lithography
Description
The NanoScribe Photic Professional GT2 (PPGT2) is a direct laser lithography system that uses two-photon polymerisation for additive 3D printing. A focal spot volume is defined by an IR femtosecond laser that concentrates light pulses and within this volume polymerisation occurs. The X-, Y- and Z-coordinate of a CAD model is defined by a focal spot volume, allowing for a CAD design to be printed as a 3D nanostructure layer-by-layer.
Related Information
Two-photon polymerization is based on the principle of photopolymerization. Here, targeted exposure to light triggers the polymerization, or the process to bring monomers together to create a polymer chain, of synthetic resins. This chain reaction causes the molecules to bond and harden, resulting in 3D models.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Lab scale staple yarn spinning
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
In ring spinning, a continuous band of fibers is drawn out from the sliver and twisted into yarn by a rotating spindle, which is encircled by a ring of traveler. For the small scale production of a yarn from short staple of fibres (6 spindle heads, 30 g-500 g short staple fiber)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Open End Spinning
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For spinning yarns using a rapidly rotating open-ended rotor, typically faster and cheaper than ring spinning but lower strength and quality (96 spindles, >500 g of short staple fibre).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Ring Spinning
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
In ring spinning, a continuous band of fibers is drawn out from the sliver and twisted into yarn by a rotating spindle, which is encircled by a ring of traveller. For the pilot production of yarns from short staple fibres (96 spindles, >500 g of short staple fibre)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fibre covering – direct cover
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Wrapping of a yarn with another.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fibre twisting – direct Twist
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Twisting one or more yarns together.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Large wet spinning line- Dissol
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Wet spinning is a process where a polymer is dissolved in a spinning solvent where it is extruded out through a spinneret submerged in a coagulation bath composed of nonsolvents. The coagulation bath causes the polymer to precipitate in fiber form. Acrylic, rayon, aramid, modacrylic, and spandex are produced via this process. The large wet spinning line is capable of spinning solutions from 50 ml to 1 L, temperatures up to 90 degrees, and any non-flammable solvent.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Small wet spinning line- Dissol
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Wet spinning is a process where a polymer is dissolved in a spinning solvent where it is extruded out through a spinneret submerged in a coagulation bath composed of nonsolvents. The coagulation bath causes the polymer to precipitate in fiber form. Acrylic, rayon, aramid, modacrylic, and spandex are produced via this process. The small wet spinning line is capable of spinning solutions from 2 ml up to 50 ml and any non-flammable solvent.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Weaving Machine – Heavy
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For weaving heavy yarns into textile up to 30 cm wide and 3 meters long (>500g of continuous or short staple yarn).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Weaving Machine – Light
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For weaving lightweight yarns into textile up to 30 cm wide and 3 meters long (minimum 500g)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Laser machining system
UV laser milling machine
Melbourne Centre for Nanofabrication
VIC Node
Description
UV Precision Processing System. It can be used for various applications, such as circuit structuring, drilling, cutting, marking, and etching. The system has a UV laser source with a wavelength of 355 nm and a power of 10 W. The system can achieve high precision and speed, as well as low cost and environmental impact. The system is suitable for processing different kinds of PCBs, especially those with high dimensional accuracy and impedance sensitivity, such as RF and microwave PCBs.
Related Information
Wave Length: 355 nm, Avg output: 17W@30 KHz, Spot size: 17 um.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Silk Screen
Screen printer
Melbourne Centre for Nanofabrication
VIC Node
Description
Screen printer
Related Information
Maximum Part Size: 6 inch x 6 inch; Printe to Print accuracy: ±0.01mm; Minimum Line Width/Space: 100 μm.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Non-woven Line
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For the creation non-wovens textile from short staple of fibres (50 cm x 3 m)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Multi-material 3D printer- Ceradrop ceramic
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
All-in-one State-of-the-art Digital Materials Deposition Platform for process development in Printed Electronics and Smart 3D Printing.
Related Information
More information to come.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Green tape stacker/aligner
Multilayer stacker
Melbourne Centre for Nanofabrication
VIC Node
Description
Stacking with high accuracy multiple layers of unfired ceramic circuits
Related Information
Maximum size of a green ceramic layer: 6 inch x 6 inch; Maximum height of stack: 15 mm.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Lab scale melt spinning line
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Melt spinning is a manufacturing process used to produce fibers by melting a polymer resin and then extruding it through a single hole to form continuous filaments. The small melt spinning line is capable of producing fibres from 5g to 20 g of pellets of thermoplastic polymer, 1-5 mm in diameter.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Large melt spinning line- Hills
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Melt spinning is a manufacturing process used to produce fibers by melting a polymer resin and then extruding it through small holes or spinnerets to form continuous filaments. The large melt spinning line is capable of producing fibres from 5000 g of pellets of thermoplastic polymer, 1-5 mm in diameter. It is capable of bicomponent spinning in an range of fibre geometries.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Polymer blending line- Wayne
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The polymer blending line is capable of preparing thermoplastic polymers (>500g) into pellets for melt extrusion. The blending line is capable of blending two polymers or materials in powder, fibre or pellets.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Small melt spinning line- Wayne
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Melt spinning is a manufacturing process used to produce fibers by melting a polymer resin and then extruding it through small holes or spinnerets to form continuous filaments. The small melt spinning line is capable of producing fibres from 20-200 g of pellets of thermoplastic polymer, 1-5 mm in diameter.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Knitting Suite
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For the production of knitted textiles in tube (10 or 25 cm diameter), small garment prototype (scarf, socks, gloves etc. or large panel (50 cm) From continuous or short staple yarns (>50 m yarn).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Electrospinning rig- Holmark
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
It is used to make nano and micro fibers ranging from 50nm to 5 microns in diameter. Many kind of polymers like Protein nanofibers, carbon nanotubes, inorganic nanofibers and synthetic polymers etc. can be synthesized using our nano fiber electrospinning unit. The unit is capable of bicomponent spinning and producing materials up to 30 cm2.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Lab made electro spinning rig
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The lab madeelectrospinning rig is used to make nano and micro fibers ranging from 50nm to 5 microns in diameter. Many kind of polymers like Protein nanofibers, carbon nanotubes, inorganic nanofibers and synthetic polymers etc. can be synthesized at small scale (<5 ml solution).
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Green tape trimmer
Green tape trimmer
Melbourne Centre for Nanofabrication
VIC Node
Description
Greentape Cutting Machine
Related Information
Maximum Part Size: 8 inch x 8 inch; Blade Length: 0 - 8 inch; Maximum Part Thickness: 0.25 inch.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Isostatic press
Isostatic Laminator
Melbourne Centre for Nanofabrication
VIC Node
Description
Isostatic Laminator
Related Information
Cavity Dimension: 8 inch x 12 inch x 3 inch; Maximum Temp: 90 C; Maximum Pressure: 8000 psi.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Multimaterial Inkjet 3D Printer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Multimaterial polymer 3D printer.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Ball Mill (micro powder)
PQ series planetary ball mills are designed for mixing, homogenizing, fine grinding, mechanical alloying, cell disruption, small volume high-tech material production and even colloidal grinding.
Melbourne Centre for Nanofabrication
VIC Node
Description
PQ-N2 4x500mL Gear-Drive Plenatary Ball Mill
Related Information
4x500mL Plenatary Ball Mill
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Bead Mill (nano powder)
Bead mill for continuous superfine grinding and dispersing of solids in liquids, appropriate for batch- and multi-passage operation.
Melbourne Centre for Nanofabrication
VIC Node
Description
For continuous superfine grinding and dispersing of solids in liquids, appropriate for batch- and multi-passage operation.
Related Information
The mill is suitable for a product quantity of 140 - 500 ml.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
NanoScribe
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The NanoScribe Photic Professional GT2 (PPGT2) is a direct laser lithography system that uses two-photon polymerisation for additive 3D printing. A focal spot volume is defined by an IR femtosecond laser that concentrates light pulses and within this volume polymerisation occurs. The X-, Y- and Z-coordinate of a CAD model is defined by a focal spot volume, allowing for a CAD design to be printed as a 3D nanostructure layer-by-layer.
Related Information
Two-photon polymerization is based on the principle of photopolymerization. Here, targeted exposure to light triggers the polymerization, or the process to bring monomers together to create a polymer chain, of synthetic resins. This chain reaction causes the molecules to bond and harden, resulting in 3D models.
Tool Contact
mcn-enquiries@nanomelbourne.com
Materials Synthesis and Modification
UV/Ozone Cleaner
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Surface treatment
Description
A UV/Ozone Cleaner is a device used to clean surfaces through a combination of ultraviolet (UV) light and ozone gas
Related Information
This device clean surfaces through a combination of ultraviolet (UV) light and ozone gas. This process generates highly reactive oxygen species that break down organic contaminants and sterilize surfaces effectively. UV/Ozone cleaners are commonly utilised in semiconductor manufacturing, research laboratories, and cleanroom environments for thorough and efficient surface cleaning and sterilisation.
Tool Contact
mcn-enquiries@nanomelbourne.com
Materials Discovery Platform Glovebox
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Material synthesis
Description
Fully automated materials discovery platform aimed at rapid screening/optimisation of thin-film PVs and batteries
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Critical Point Dryer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Purification and drying
Description
Critical point drying is a process used to dry Micro-electromechanical Systems (MEMs). Forces from the changing of liquid to gaseous phase in traditional drying techniques can destroy a device. The use of supercritical fluid bypasses this phase change, protecting the device in the drying process.
Related Information
MCN's critical point dryer is the Quorum K850WM. The dryer is optimised for MEM drying and can hold 4 and 6-inch wafers. The dryer can also be used for SEM preparation.
Tool Contact
mcn-enquiries@nanomelbourne.com
Marangoni IPA Wafer Cassette Dryer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Purification and drying
Description
The system is well-suited to drying applications using planar substrates and can operate with up to 6 cassettes in one batch- batch processing is efficient and faster
Related Information
The IPA aerosol vapour dryer creates an 2-propanol (IPA) aerosol which condenses into microscopic droplets above the substrate surface, creating the differential surface tension for drying without any need for heaters or substrate rotation.
Tool Contact
mcn-enquiries@nanomelbourne.com
Firing furnace
Tube furnace
RMIT
VIC Node
Technique
Furnaces
Description
1200C Tube furnaces (3-zone)
Related Information
1200C Tube furnace (3-zone)
Tool Contact
arnan.mitchell@rmit.edu.au
Furnace – Thermal (Wet/Dry)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Furnaces
Description
Wet and dry oxidation furnace.
Related Information
Supports up to 150mm in diameter and can deposit up to 50 wafers in one run.
Tool Contact
mcn-enquiries@nanomelbourne.com
Four Tube Furnace (Doping/Oxidation/Nitride)
Furnace for atmospheric pressure diffusion, annealing, and LPCVD
Melbourne Centre for Nanofabrication
VIC Node
Technique
Annealing
Description
The SVCS four-tube horizontal furnace system with a HEPA controlled loading station with small batch processing options. The four processing tubes cater for atmospheric pressure diffusion, atmospheric pressure annealing and the low-pressure chemical vapour deposition of low strain and stoichiometric silicon nitride.
Related Information
Atmospheric pressure diffusion furnaces - phosphorous and boron doping. Atmospheric pressure annealing/oxidizing (dry) furnace for Si/SiO2 only. LPCVD furnace for silicon nitride with controlled film stress. Batch process - up to 50 wafers. Substrate size - up to 6" wafers
Tool Contact
mcn-enquiries@nanomelbourne.com
General Purpose Furnace
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Annealing
Description
General-purpose furnace is used for calcining, annealing samples (up to 6” diameter wafer) under vacuum, or various other gas atmospheres (Ar, N2, O2 or forming gas) with a temperature up to 1100°C.
Related Information
General-purpose furnace has a 7.5" ID x 13.4"L quartz tube chamber placed horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of few millitorr using a 2-stage rotary vane pump. It is integrated with a 4-channer gas mixing station, which pre-mix the inlet gases before supplying to the furnace.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
UV/Ozone Cleaner
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
A UV/Ozone Cleaner is a device used to clean surfaces through a combination of ultraviolet (UV) light and ozone gas
Related Information
This device clean surfaces through a combination of ultraviolet (UV) light and ozone gas. This process generates highly reactive oxygen species that break down organic contaminants and sterilize surfaces effectively. UV/Ozone cleaners are commonly utilised in semiconductor manufacturing, research laboratories, and cleanroom environments for thorough and efficient surface cleaning and sterilisation.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Materials Discovery Platform Glovebox
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Fully automated materials discovery platform aimed at rapid screening/optimisation of thin-film PVs and batteries
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Critical Point Dryer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Critical point drying is a process used to dry Micro-electromechanical Systems (MEMs). Forces from the changing of liquid to gaseous phase in traditional drying techniques can destroy a device. The use of supercritical fluid bypasses this phase change, protecting the device in the drying process.
Related Information
MCN's critical point dryer is the Quorum K850WM. The dryer is optimised for MEM drying and can hold 4 and 6-inch wafers. The dryer can also be used for SEM preparation.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Marangoni IPA Wafer Cassette Dryer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The system is well-suited to drying applications using planar substrates and can operate with up to 6 cassettes in one batch- batch processing is efficient and faster
Related Information
The IPA aerosol vapour dryer creates an 2-propanol (IPA) aerosol which condenses into microscopic droplets above the substrate surface, creating the differential surface tension for drying without any need for heaters or substrate rotation.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Firing furnace
Tube furnace
Melbourne Centre for Nanofabrication
VIC Node
Description
1200C Tube furnaces (3-zone)
Related Information
1200C Tube furnace (3-zone)
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Furnace – Thermal (Wet/Dry)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Wet and dry oxidation furnace.
Related Information
Supports up to 150mm in diameter and can deposit up to 50 wafers in one run.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Four Tube Furnace (Doping/Oxidation/Nitride)
Furnace for atmospheric pressure diffusion, annealing, and LPCVD
Melbourne Centre for Nanofabrication
VIC Node
Description
The SVCS four-tube horizontal furnace system with a HEPA controlled loading station with small batch processing options. The four processing tubes cater for atmospheric pressure diffusion, atmospheric pressure annealing and the low-pressure chemical vapour deposition of low strain and stoichiometric silicon nitride.
Related Information
Atmospheric pressure diffusion furnaces - phosphorous and boron doping. Atmospheric pressure annealing/oxidizing (dry) furnace for Si/SiO2 only. LPCVD furnace for silicon nitride with controlled film stress. Batch process - up to 50 wafers. Substrate size - up to 6" wafers
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
General Purpose Furnace
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
General-purpose furnace is used for calcining, annealing samples (up to 6” diameter wafer) under vacuum, or various other gas atmospheres (Ar, N2, O2 or forming gas) with a temperature up to 1100°C.
Related Information
General-purpose furnace has a 7.5" ID x 13.4"L quartz tube chamber placed horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of few millitorr using a 2-stage rotary vane pump. It is integrated with a 4-channer gas mixing station, which pre-mix the inlet gases before supplying to the furnace.
Tool Contact
mcn-enquiries@nanomelbourne.com
Modelling and Device Design
Micro-CT System- Zeiss
More information to come.
CSIRO
VIC Node
Technique
X-ray scanning
Description
The X-ray Micro-CT system (micro-computed-tomography) at CSIRO Manufacturing in Clayton is part of the X-ray Science team's facilities. The instrument is a Zeiss Xradia Versa 515 and is capable of 3D imaging of a wide range of samples with resolution to below a micron. The team can also facilitate synchrotron micro-CT experiments and has expertise in software development and 3D image analysis of micro-CT datasets.
Related Information
More information to come.
Tool Contact
sherman.wong@csiro.au
3D scanning- Artec Spyder_1
Handheld 3D scanner
Melbourne Centre for Nanofabrication
VIC Node
Technique
Laser scanning
Description
A versatile handheld scanner that is used for product design and quality control applications.
Related Information
Provides high pinpoint accuracy of 50 µm and a 3D resolution of 100 µm when scanning objects
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Micro-CT System- Zeiss
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The X-ray Micro-CT system (micro-computed-tomography) at CSIRO Manufacturing in Clayton is part of the X-ray Science team's facilities. The instrument is a Zeiss Xradia Versa 515 and is capable of 3D imaging of a wide range of samples with resolution to below a micron. The team can also facilitate synchrotron micro-CT experiments and has expertise in software development and 3D image analysis of micro-CT datasets.
Related Information
More information to come.
Tool Contact
sherman.wong@csiro.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
3D scanning- Artec Spyder_1
Handheld 3D scanner
Melbourne Centre for Nanofabrication
VIC Node
Description
A versatile handheld scanner that is used for product design and quality control applications.
Related Information
Provides high pinpoint accuracy of 50 µm and a 3D resolution of 100 µm when scanning objects
Tool Contact
mcn-enquiries@nanomelbourne.com
Packaging
Oven Vacuum EVDO
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Drying Thermo-Sensitive Materials
Description
Vaccum oven is designed for drying of material which is thermo-sensitive or decompounded and oxidative easily.
Related Information
The vacuum oven comes with a programmable temperature controller which allows users to set their desired temperature and bake duration.
Tool Contact
mcn-enquiries@nanomelbourne.com
Oven Vacuum Heraeus
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Drying Thermo-Sensitive Materials
Description
Vacuum Oven
Related Information
Vacuum Oven capable of temperatures up to 200C.
Tool Contact
mcn-enquiries@nanomelbourne.com
Micro Transfer Printer- X Display (XDC) MTP
More information to come.
RMIT
VIC Node
Technique
Component Integration
Description
Thin (~10 microns) chips, dubbed x-chips, are lifted and transferred from donor wafers to CMOS or other target surfaces, providing wafer-level integration.
Related Information
More information to come.
Tool Contact
arnan.mitchell@rmit.edu.au
Wire Bonder Ball/Deep-access Wedge
Wire bonder with pull head and general upgrades
Melbourne Centre for Nanofabrication
VIC Node
Technique
Wire bonding
Description
Deep access wire bonder suitable for wedge bonding.. Deep access wedge allows for the bonding of devices with tight and constricted geometries.
Related Information
Allows for stitch bonding as well as programmable bond maps. Uses Al-Si or gold wire, or gold ribbon.
Tool Contact
mcn-enquiries@nanomelbourne.com
Femtosecond Laser System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Wafer dicing
Description
fs-Carbide laser with 40W power, 3 wavelengths; 343nm, 515nm and 1030nm
Related Information
These systems generate laser pulses with durations on the order of femtoseconds (10^-15 seconds), enabling precise control over laser interactions with matter at extremely short timescales. Femtosecond lasers are utilized for a wide range of applications including micromachining, spectroscopy, nonlinear optics, and ultrafast imaging, among others.
Tool Contact
mcn-enquiries@nanomelbourne.com
Wafer Dicing Saw
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Wafer dicing
Description
The DAD3350 is capable of handling a maximum size of 8in diameter substrate and a maximum thickness of 5mm. The dicing saw is also capable of performing circle cut, trimming down circular shape samples and chopper cut
During this process, water is circulated over the cutting surface to cool the blade and prevent the liberation of dangerous particulates into the air.
Related Information
A precision, high-speed, diamond impregnated blade is used to mill narrow grooves between the devices either partially or completely through the wafer.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Oven Vacuum EVDO
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Vaccum oven is designed for drying of material which is thermo-sensitive or decompounded and oxidative easily.
Related Information
The vacuum oven comes with a programmable temperature controller which allows users to set their desired temperature and bake duration.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Oven Vacuum Heraeus
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Vacuum Oven
Related Information
Vacuum Oven capable of temperatures up to 200C.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Micro Transfer Printer- X Display (XDC) MTP
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Thin (~10 microns) chips, dubbed x-chips, are lifted and transferred from donor wafers to CMOS or other target surfaces, providing wafer-level integration.
Related Information
More information to come.
Tool Contact
arnan.mitchell@rmit.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Wire Bonder Ball/Deep-access Wedge
Wire bonder with pull head and general upgrades
Melbourne Centre for Nanofabrication
VIC Node
Description
Deep access wire bonder suitable for wedge bonding.. Deep access wedge allows for the bonding of devices with tight and constricted geometries.
Related Information
Allows for stitch bonding as well as programmable bond maps. Uses Al-Si or gold wire, or gold ribbon.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Femtosecond Laser System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
fs-Carbide laser with 40W power, 3 wavelengths; 343nm, 515nm and 1030nm
Related Information
These systems generate laser pulses with durations on the order of femtoseconds (10^-15 seconds), enabling precise control over laser interactions with matter at extremely short timescales. Femtosecond lasers are utilized for a wide range of applications including micromachining, spectroscopy, nonlinear optics, and ultrafast imaging, among others.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Wafer Dicing Saw
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The DAD3350 is capable of handling a maximum size of 8in diameter substrate and a maximum thickness of 5mm. The dicing saw is also capable of performing circle cut, trimming down circular shape samples and chopper cut
During this process, water is circulated over the cutting surface to cool the blade and prevent the liberation of dangerous particulates into the air.
Related Information
A precision, high-speed, diamond impregnated blade is used to mill narrow grooves between the devices either partially or completely through the wafer.
Tool Contact
mcn-enquiries@nanomelbourne.com
Testing and validation
Confocal Raman – Renishaw inVia Qontor
Mapping and Live Focus/topographt tracking
University of Melbourne
VIC Node
Technique
Vibrational Spectroscopy
Description
Vibrational spectroscopy that provides detailed chemical and structural characterisation of a wide range of materials with applications in Life Sciences (cells, tissues, plant biology), Material Sciences (Carbon, semiconductors, photovoltaics, batteries), Chemical Sciences (Pharmaceuticals, polymers,catalysis), Earth Sciences (Geology), Analytical Sciences (Art and heritage, forensics, contamination).
Related Information
Equiped with 532, 633, 785nm lasers and Linkam hot/cold cell (-150 to +600 Celsius degree)
Tool Contact
elena.taran@unimelb.edu.au
Burst Tester
More information to come.
Deakin University
VIC Node
Technique
Textile Tester
Description
Testing the burst strength of textiles and films.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Lab dye machine- Ahiba Ir Pro
More information to come.
Deakin University
VIC Node
Technique
Textile Tester
Description
For testing the dyeability of fibres and textiles
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Porometer- 3GZH Quantachrome
More information to come.
Deakin University
VIC Node
Technique
Textile Tester
Description
For characterising the widest variety of materials. Uses liquid expulsion to measure pore size distributions through pores of a membrane. Generates gas permeability information from the pressure and flow rate data. The pressure capability of up to 500 psi allows pore sizes from 500 µm to as small as 18nm to be measured
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Tensile analyser- Sifan 4
More information to come.
Deakin University
VIC Node
Technique
Textile Tester
Description
For tensile testing of single fibers and visual imaging of the fibers behaviour.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Thermal regulation analyser- Sweating Guarded Hotplate
More information to come.
Deakin University
VIC Node
Technique
Textile Tester
Description
To measure the thermal regulation of a textile at least 30 cm2.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Automated carbon fibre tensile tester- Favimat
More information to come.
Deakin University
VIC Node
Technique
Tensile Testing
Description
For automated tensile testing of single carbon fibres and precursor PAN white fiber.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Automated Yarn tensile tester- Uster- tensorapid 4
More information to come.
Deakin University
VIC Node
Technique
Tensile Testing
Description
For automated tensile testing of bundle of yarns.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
General tensile testing machine- Instron 30kN
More information to come.
Deakin University
VIC Node
Technique
Tensile Testing
Description
For general tensile testing of fibers or yarns (500N to 30kN)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Single fibre tensile tester- Aglient UTM150
More information to come.
Deakin University
VIC Node
Technique
Tensile Testing
Description
For testing single fibres weaker than 50 N.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Quartz Crystal Microbalance with Dissipation- Q-Sense Analyser
Electrochemical cell and potentiostat, open cell, window cell, humidity cell and QCM/ellipsometry integration module
Swinburne University of Technology
VIC Node
Technique
Quartz Crystal Microbalance
Description
Uses a quartz crystal to determine adsorption/desorption ocurring at the solution/solid interface. It is tyipcally used to study processes such as thin film deposition, layer by layer assembly and protein/bacteria/cell adhesion.
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
Nanosizer (Dynamic Light Scattering)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Particle characterisation
Description
Malvern Zetasizer offers particle size, particle charge (zeta potential) and molecular weight analysis.
Related Information
Dynamic light scattering (DLS) is a non-invasive, well-established technique for measuring the size and size distribution of molecules and particles ranges from 0.3nm-10um. This instrument also measures zetapotential of particles (size range: 3.8nm-100um) and molecoular weights.
Tool Contact
mcn-enquiries@nanomelbourne.com
Particle analysis – NanoSight NS300
Rapid analysis of the size distribution and concentration of nanoparticles
University of Melbourne
VIC Node
Technique
Particle characterisation
Description
High resolution nanoparticle size and concentration analysis
Related Information
Analysis of all types of particles from 0.01 to 1 micromiters
Tool Contact
elena.taran@unimelb.edu.au
AFM s-SNOM and nano-FTIR
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
NeaSNOM
Description
The neaSNOM microscope combined with imaging & spectroscopy systems allow us to study chemical, structural and electronic properties of a sample at a spatial resolution of 20nm.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Microscope Polarised- Metallurgical Nikon
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Metallurgical Miscroscopy
Description
Upright Microscope with Reflected Darkfield Imaging option and polarised light option for metallurgical applications with a digital camera system attached to it.
Related Information
Metallurgical Research to inspect qualities of Silicon wafer products
Tool Contact
mcn-enquiries@nanomelbourne.com
Confocal Raman Microscope
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Laser Microscope
Description
Hyperspectral image generation with the information of a complete Raman spectrum at every image pixel
Related Information
Hyperspectral image generation with the information of a complete Raman spectrum at every image pixel
Tool Contact
mcn-enquiries@nanomelbourne.com
He Ion Microscope
No need for conductive coatings traditionally required by SEM
University of Melbourne
VIC Node
Technique
He Ion Microscope (HIM) Etching
Description
Gas field ion source based equipment for nanofabrication and high resolution imaging
Related Information
He/Ne beam for nano-scale milling
Tool Contact
elena.taran@unimelb.edu.au
Fibre diameter analyser- OFDA
More information to come.
Deakin University
VIC Node
Technique
Fibre Diameter Analyser
Description
For measuring the diameter distribution of a bundle of fibres.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
Electrokinetic Analyser-Zeta Potential
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Zeta potential analysis
Description
Surface potential analyser with a variety of sample fixtures used primarily for measurement of zeta potential of solid surfaces
Related Information
SurPASS electrokinetic analyzers employ the classic streaming potential and streaming current method for a direct analysis of the surface zeta potential. The zeta potential is related to the surface charge at a solid/liquid interface and is a key parameter for understanding surface properties and developing new specialized materials.
Tool Contact
mcn-enquiries@nanomelbourne.com
Micro-CT System- Zeiss
More information to come.
CSIRO
VIC Node
Technique
X-ray scanning
Description
The X-ray Micro-CT system (micro-computed-tomography) at CSIRO Manufacturing in Clayton is part of the X-ray Science team's facilities. The instrument is a Zeiss Xradia Versa 515 and is capable of 3D imaging of a wide range of samples with resolution to below a micron. The team can also facilitate synchrotron micro-CT experiments and has expertise in software development and 3D image analysis of micro-CT datasets.
Related Information
More information to come.
Tool Contact
sherman.wong@csiro.au
Stylus Profilometer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Stylus profilometry
Description
Instrument utilises a microscale stylus for tological and step height profiling
Related Information
A precision measurement instrument used to characterize surface topography by scanning a sharp stylus across a sample's surface. As the stylus moves, it records variations in height, producing a profile of the surface's roughness and texture. This technique is commonly employed in quality control, surface metrology, and materials research to assess surface finish, wear patterns, and other surface properties with high resolution and accuracy.
Tool Contact
mcn-enquiries@nanomelbourne.com
Spectroscopic Ellipsometer- J.A. Woollam M-2000-XI
Heated stage, liquid cell and QCM/Ellipsometry integration module. Regular analysis size 3 mm but can be reduced to 120 μm with focus probes
Swinburne University of Technology
VIC Node
Technique
Spectroscopic ellipsometry
Description
Characterises the optical properties of thin films to provide information on a variety of properties such as thickness and refractive index
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
Thin Film Wafer Mapper
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spectroscopic ellipsometry
Description
Motorised thin film mapping tool capable of measuring dielectric and photoresist film thickness over 4" and 6" samples
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Variable Angle Spectroscopic Ellipsometer (VASE)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spectroscopic ellipsometry
Description
Ellipsometric thin film characterisation
Related Information
The J. A. Woollam M-2000 DI spectroscopic ellipsometer provides fast and accurate thin film characterization over a wide spectroscopic range.
Tool Contact
mcn-enquiries@nanomelbourne.com
Nikon Instruments Ti-U Inverted Microscope
Highly sensitive spectral imaging with a mechanical slit down to 1µm.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spectrophotometry
Description
Inverted microscope for material research and biological research
Related Information
Used to image nanoparticles, cells, metal films, general dielectric materials. Meterial Studies and Biological Research application
Tool Contact
mcn-enquiries@nanomelbourne.com
Spectrometer Fluorescence PerkinElmer LS
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spectrophotometry
Description
Fluorescence spectrometer
Related Information
Fluorescence spectroscopy (also known as fluorimetry or spectrofluorometry) is a type of electromagnetic spectroscopy that analyzes fluorescence from a sample.
Tool Contact
mcn-enquiries@nanomelbourne.com
Spectroscope Hyperspectral Imaging Microscope
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spectrophotometry
Description
Hyperspectral Imaging spectral meter
Related Information
Hyper spectral informatoin
Tool Contact
mcn-enquiries@nanomelbourne.com
Spectroscope Light-Field
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spectrophotometry
Description
UV/VIS/NIS Spectrophotometer is combined with a Princeton Instrument Isoplane 320 High performance Spectrograph as well as a Deep Cooled EMCCD camera. It offers transmitted and reflected brightfield illumination and transmitted darkfield illumination.Choice of three gratings to cater for long range or high resolution spectral imaging. Can provides transmission, reflection and darkfield images of samples.
Related Information
Aqurie specific point spectral information
Tool Contact
mcn-enquiries@nanomelbourne.com
UV/VIS Spectrophotometer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Spectrophotometry
Description
Agilent UV VIS Cary 60 Spectrophotometer measures small volumes and precious samples accurately and reproducibly with a highly focused beam image. Scan the entire wavelength range (190 to 1100 nm) in under three seconds and collect data from single or multiple wavelengths at 80 data points per second.
Related Information
UV-Vis spectroscopy is an analytical technique that measures the amount of discrete wavelengths of UV or visible light that are absorbed by or transmitted through a sample in comparison to a reference or blank sample.
Tool Contact
mcn-enquiries@nanomelbourne.com
Desktop SEM
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Scanning Electron Microscopy (SEM)
Description
motorized stage upgrade
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Electron Microscope – Hitachi Flex
Variable pressure SEM able to image both conductive and insulating samples
University of Melbourne
VIC Node
Technique
Scanning Electron Microscopy (SEM)
Description
Variable pressure SEM with EDX
Related Information
Secondary electron and back scattered electron detectors; ultravariable detector for high resoulution imaging at low vacuum and cathodoluminescence (CL)
Tool Contact
elena.taran@unimelb.edu.au
High-resolution FEG-SEM (Apreo)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Scanning Electron Microscopy (SEM)
Description
Ultra-high resolution three dimensional imaging for versatile, high performance materials imaging and analysis. Insulators, beam sensitive or magnetic materials can all be imaged with ease thanks to Apreo's unique optics, detection and beam control options.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
High-resolution FEG-SEM (Nova)
Field Emission Gun Scanning Electron Microscope (FEG-SEM)
Melbourne Centre for Nanofabrication
VIC Node
Technique
Scanning Electron Microscopy (SEM)
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and metrology purposes in order to assess the quality of fabrication of devices and any defects.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6 inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface.
Tool Contact
mcn-enquiries@nanomelbourne.com
Thin Film Stress Measurement System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Physical property analysis
Description
The FLX-2320-R is a thin film stress measurement instrument. It accurately measures the changes in the radius of curvature of the substrate caused by the deposition of a stressed thin film on the substrate.
Related Information
The intrinsic stress of a film is mainly caused by the atomic structure mismatch between the film and substrate at the deposition temperature. FLX 2320-R uses a laser interferometer to measure the curvature of a wafer with and without film deposition, which is then used in the calculation of the stress in the film deposited on the wafer. FLX 2320-R has two LASER wavelengths - 670 nm and 750 nm.
Tool Contact
mcn-enquiries@nanomelbourne.com
Multidetection Plate Reader
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Photometric readers
Description
Synergy MX Multi-Detection Micropla
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
3D-optical Profilometer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Optical profilometry
Description
Bruker Cotour GTI Optical Profiler is a benchtop system for fast, non-contact 3D surface metrology. Its proprietary tip/tilt in the head provides unmatched user flexibility for production setup and inspection. By coupling the auto tip/tilt functionality with the optical path in the microscope head, it has coupled the point of inspection to the line of sight independent of tilt
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Laser Doppler Vibrometer (MSA-400)
Laser Doppler Vibrometer (LDV) with stroboscopic and planar motion analysis
Melbourne Centre for Nanofabrication
VIC Node
Technique
Laser Doppler Vibrometry (LDV)
Description
The Micro System Analyser (MSA)-400 is a Laser doppler vibrometer that allows the researcher to analyse and visualise structural vibrations in MEMS devices.
Related Information
Measuring frequencies - up to 26MHz. Capable of characterising out of plane vibrations using scanning laser doppler vibrometry and in plane vibrations using stroboscopic video microscopy.
Tool Contact
mcn-enquiries@nanomelbourne.com
Laser Doppler Vibrometer (UHF-120)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Laser Doppler Vibrometry (LDV)
Description
The Micro System Analyser (MSA)-400 is a Laser doppler vibrometer that allows the researcher to analyse and visualise structural vibrations in MEMS devices.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
IR Spectrometer- Bruker Matrix-MF
More information to come.
Swinburne University of Technology
VIC Node
Technique
Fourier Transform Infrared (FTIR) spectroscopy
Description
In-Situ characterisation of plasma polymer film deposition in a specially designed reactor
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
Spectrometer-FTIR Perkin Elmer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Fourier Transform Infrared (FTIR) spectroscopy
Description
FTIR spectral imaging instrument
Related Information
Material research with spectral information
Tool Contact
mcn-enquiries@nanomelbourne.com
AutoLab Potentiostat
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electrical characterisation
Description
Precision potentiostat for electrochemical measurements
Related Information
A potentiostat is an analytical instrument designed to control the working electrode's potential in a multiple electrode electrochemical cell.
Tool Contact
mcn-enquiries@nanomelbourne.com
Four-Point Probe
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electrical characterisation
Description
Jandel multi-height probe stand provides a solution for a wide variety of measurements such as sheet and bulk resistance of the sample. The probe mechanism can be raised and lowered meaning that samples ranging in thickness from thin films to large ingots can be measured.
Related Information
Jandel Engineering Limited offers the RM3000 for use in making four point probe measurements. The RM3000 can supply constant currents between 10nA and 99.99mA, and measure voltages from 0.01mV to 1250mV. For sheet resistance measurements the quoted range is 1 milliohm/square to 5 x 10 (8) ohms/square. For volume (bulk) resistivity measurements the quoted range is 1 milliohm.cm to 1 x 10(6) ohm.cm.
Tool Contact
mcn-enquiries@nanomelbourne.com
Microelectronics/RF Probe Station
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electrical characterisation
Description
Microelectronics chacterisation probe station and microscope w/ RF probes
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
Network analyser
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electrical characterisation
Description
Network/spectrum analsyer- 9 KHz to 13.6 GHz
Related Information
The R&S ZVL is a compact, powerful, and future-proof network analyser which combine the functions of a network analyzer, spectrum analyzer, and power meter in a single box, and thus tremendously increase work efficiency.
Tool Contact
mcn-enquiries@nanomelbourne.com
Parameter Analyser
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Electrical characterisation
Description
The 4200A-SCS is a customizable and fully-integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V characterization.
Related Information
The highest performance parameter analyzer, the 4200A-SCS accelerates semiconductor, materials, and process development. The 4200A-SCS ClariusTM GUI-based Software provides clear, uncompromised measurement and analysis capability. Furnished with embedded measurement expertise and hundreds of ready-to-use application tests, Clarius Software enables to dig deeper into R & D with speed and confidence. The 4200A-SCS Parameter Analyzer is completely customizable and fully upgradable, so one can add the instruments one's need now – or later.
Tool Contact
mcn-enquiries@nanomelbourne.com
Tensionmeter DataPhysics OCA-20
Optical contact angle analyser
University of Melbourne
VIC Node
Technique
Contact angle analysis
Description
Video-based contact angle measurement.
Related Information
Maximum sample size (L x W x H): 220 x ∞ x 70 mm, 8-inch wafer on WT 200M/E.Size of sample stage: 100 x 100 mmRange of contact angle: 0 - 180°, ±0.1° measuring accuracy of the video system
Tool Contact
elena.taran@unimelb.edu.au
Confocal laser scanning microscope – Nikon A1R+
Fluorescence Lifetime Image Microscopy (FLIM) capability
University of Melbourne
VIC Node
Technique
Confocal microscopy
Description
Confocal LSM with 405, 488, 561 and 642nm lasers; FLIM technology
Related Information
20x, 40x, 60x, and 100x objectives and 405nm, 488nm, 561nm and 642nm lasers
Tool Contact
elena.taran@unimelb.edu.au
Laser Scanning Confocal Microscope
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Confocal microscopy
Description
Laser Scanning Confocal Imaging microscope
Related Information
3D imaging of materials and biological samples with flourescence based imaging techniques.
Tool Contact
mcn-enquiries@nanomelbourne.com
Asylum Research MFP3D-BIO
Atomic force microscope (AFM) with inverted optical microscope
La Trobe University
VIC Node
Technique
Atomic Force Microscopy (AFM)
Description
General use Atomic Force Microscope (AFM) built on a Nikon inverted microscope base for integrated scanning-probe and optical microscopy.Modes available; Kelvin force probe/adhesion and stiffness maps, conductivity maps and single molecule spectroscopy, viscoelastic mapping, magnetic force mapping.
Related Information
Large substrate size can be handled. Topological map of 90 µm x 90 µm with sub-nanometre resolution in Z.Accessories: closed fluid cell, electrochemistry fluid cell, temperature-controlled fluid exchange, polymer heater.
Tool Contact
p.pigram@latrobe.edu.au
Asylum Research MFP3D-SA
Atomic force microscope (AFM)
La Trobe University
VIC Node
Technique
Atomic Force Microscopy (AFM)
Description
A versatile AFM mounted on an active-damping vibration-isolation table in an acoustic-isolation enclosure to improve resolution.Operating Modes: contact and non-contact (AC) AFM, EFM, MFM, lateral force microscopy (LFM), conductive AFM, KPFM, and nanolithography.
Related Information
90 μm X-Y raster scanningAccessory features: closed fluid cell, electrochemistry fluid cell, temperature-controlled fluid exchange (BioHeater™), and polymer heater.
Tool Contact
p.pigram@latrobe.edu.au
Atomic Force Microscope – Cypher
Environmental Control & Blue Drive; Piezo Force Microscopy, Mechanical & Electrical properties investigations
University of Melbourne
VIC Node
Technique
Atomic Force Microscopy (AFM)
Description
AFM with Blue Drive and Environmental control
Related Information
Travel: X, Y=30um, Z=7um
Tool Contact
elena.taran@unimelb.edu.au
Atomic Force Microscope – MFP3D
AFM integrated with a inverted microscope and a camera for top and bottom views
University of Melbourne
VIC Node
Technique
Atomic Force Microscopy (AFM)
Description
AFM integrated with optical microscopy
Related Information
Travel: X, Y=90um, Z=14um
Tool Contact
elena.taran@unimelb.edu.au
Bio-AFM
Atomic force microscope (AFM) for biological samples
Melbourne Centre for Nanofabrication
VIC Node
Technique
Atomic Force Microscopy (AFM)
Description
AFM with cell adhesion module, suitable for live cell imaging built on a Nikon inverted microscope base.
Related Information
Large substrate size can be handled. Topological map of 90 µm x 90 µm with sub-nanometre resolution in Z.
Tool Contact
mcn-enquiries@nanomelbourne.com
Cleanroom AFM (Dimension Icon)
Atomic force microscope (AFM) with various condition control and usability modules
Melbourne Centre for Nanofabrication
VIC Node
Technique
Atomic Force Microscopy (AFM)
Description
The Dimension Icon AFM features a number of application modules such as ScanAsyst, Peak Force QNMTM (PFQNM), electrical characterisation and heating and cooling studies. The ScanAsyst imaging mode performs automatic image optimisation by controlling the tip-sample interaction force for faster and more consistent imaging results. The PFQNM mode analyses tip-sample interaction forces and generates quantitative nanoscale maps of mechanical properties, including modulus, adhesion, deformation, and dissipation. PFQNM operates over an extremely wide range to characterise a large variety of sample types. The AFM executes temperature control and thermal analysis on samples from -35°C to 250°C while scanning in various AFM modes.
Related Information
Features a large sample platform.
Tool Contact
mcn-enquiries@nanomelbourne.com
Cleanroom AFM (Icon PFTUNA)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Technique
Atomic Force Microscopy (AFM)
Description
The Dimension Icon AFM features a number of application modules such as ScanAsyst, Peak Force QNMTM (PFQNM) and electrical characterisations such as Kelvin Probe Force Microscopy (KPFM), Scanning Capacitance Microscopy (SCM), Tunneling Current AFM (TUNA), and Piezo Response Force Microscopy (PFM). KPFM measures material work function as well as surface charge. SCM is one of the primary techniques for doping profile mapping in semiconductor industry. PeakForce TUNA is an ideal method for probing conductivity of fragile samples such as organic photovoltaics, conductive nanotubes, and nanoparticles. PFTUNA provides direct, precise force control and eliminates lateral forces. TUNA can measure material’s electrical conductivity with wide range of current from fA-uA. PFM enables high-resolution nanoscale characterization of piezoresponsive materials and topographical imaging using Contact Mode scanning.
Related Information
Peak Force TUNA is an ideal method for probing conductivity of fragile samples such as organic photovoltaics, conductive nanotubes, and nanoparticles. It overcomes the limitations of traditional contact-mode-based conductive AFM techniques, which are severely restricted by sample damage or probe tip contamination from CAFM lateral forces. PeakForce TUNA provides direct, precise force control and eliminates lateral forces. This enables routine highsensitivity and high-resolution current imaging.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Confocal Raman – Renishaw inVia Qontor
Mapping and Live Focus/topographt tracking
Melbourne Centre for Nanofabrication
VIC Node
Description
Vibrational spectroscopy that provides detailed chemical and structural characterisation of a wide range of materials with applications in Life Sciences (cells, tissues, plant biology), Material Sciences (Carbon, semiconductors, photovoltaics, batteries), Chemical Sciences (Pharmaceuticals, polymers,catalysis), Earth Sciences (Geology), Analytical Sciences (Art and heritage, forensics, contamination).
Related Information
Equiped with 532, 633, 785nm lasers and Linkam hot/cold cell (-150 to +600 Celsius degree)
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Burst Tester
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Testing the burst strength of textiles and films.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Lab dye machine- Ahiba Ir Pro
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For testing the dyeability of fibres and textiles
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Porometer- 3GZH Quantachrome
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For characterising the widest variety of materials. Uses liquid expulsion to measure pore size distributions through pores of a membrane. Generates gas permeability information from the pressure and flow rate data. The pressure capability of up to 500 psi allows pore sizes from 500 µm to as small as 18nm to be measured
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Tensile analyser- Sifan 4
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For tensile testing of single fibers and visual imaging of the fibers behaviour.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Thermal regulation analyser- Sweating Guarded Hotplate
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
To measure the thermal regulation of a textile at least 30 cm2.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Automated carbon fibre tensile tester- Favimat
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For automated tensile testing of single carbon fibres and precursor PAN white fiber.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Automated Yarn tensile tester- Uster- tensorapid 4
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For automated tensile testing of bundle of yarns.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
General tensile testing machine- Instron 30kN
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For general tensile testing of fibers or yarns (500N to 30kN)
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Single fibre tensile tester- Aglient UTM150
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For testing single fibres weaker than 50 N.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Quartz Crystal Microbalance with Dissipation- Q-Sense Analyser
Electrochemical cell and potentiostat, open cell, window cell, humidity cell and QCM/ellipsometry integration module
Melbourne Centre for Nanofabrication
VIC Node
Description
Uses a quartz crystal to determine adsorption/desorption ocurring at the solution/solid interface. It is tyipcally used to study processes such as thin film deposition, layer by layer assembly and protein/bacteria/cell adhesion.
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Nanosizer (Dynamic Light Scattering)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Malvern Zetasizer offers particle size, particle charge (zeta potential) and molecular weight analysis.
Related Information
Dynamic light scattering (DLS) is a non-invasive, well-established technique for measuring the size and size distribution of molecules and particles ranges from 0.3nm-10um. This instrument also measures zetapotential of particles (size range: 3.8nm-100um) and molecoular weights.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Particle analysis – NanoSight NS300
Rapid analysis of the size distribution and concentration of nanoparticles
Melbourne Centre for Nanofabrication
VIC Node
Description
High resolution nanoparticle size and concentration analysis
Related Information
Analysis of all types of particles from 0.01 to 1 micromiters
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AFM s-SNOM and nano-FTIR
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The neaSNOM microscope combined with imaging & spectroscopy systems allow us to study chemical, structural and electronic properties of a sample at a spatial resolution of 20nm.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Microscope Polarised- Metallurgical Nikon
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Upright Microscope with Reflected Darkfield Imaging option and polarised light option for metallurgical applications with a digital camera system attached to it.
Related Information
Metallurgical Research to inspect qualities of Silicon wafer products
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Confocal Raman Microscope
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Hyperspectral image generation with the information of a complete Raman spectrum at every image pixel
Related Information
Hyperspectral image generation with the information of a complete Raman spectrum at every image pixel
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
He Ion Microscope
No need for conductive coatings traditionally required by SEM
Melbourne Centre for Nanofabrication
VIC Node
Description
Gas field ion source based equipment for nanofabrication and high resolution imaging
Related Information
He/Ne beam for nano-scale milling
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Fibre diameter analyser- OFDA
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
For measuring the diameter distribution of a bundle of fibres.
Related Information
More information to come.
Tool Contact
dylan.hegh@deakin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Electrokinetic Analyser-Zeta Potential
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Surface potential analyser with a variety of sample fixtures used primarily for measurement of zeta potential of solid surfaces
Related Information
SurPASS electrokinetic analyzers employ the classic streaming potential and streaming current method for a direct analysis of the surface zeta potential. The zeta potential is related to the surface charge at a solid/liquid interface and is a key parameter for understanding surface properties and developing new specialized materials.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Micro-CT System- Zeiss
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The X-ray Micro-CT system (micro-computed-tomography) at CSIRO Manufacturing in Clayton is part of the X-ray Science team's facilities. The instrument is a Zeiss Xradia Versa 515 and is capable of 3D imaging of a wide range of samples with resolution to below a micron. The team can also facilitate synchrotron micro-CT experiments and has expertise in software development and 3D image analysis of micro-CT datasets.
Related Information
More information to come.
Tool Contact
sherman.wong@csiro.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Stylus Profilometer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Instrument utilises a microscale stylus for tological and step height profiling
Related Information
A precision measurement instrument used to characterize surface topography by scanning a sharp stylus across a sample's surface. As the stylus moves, it records variations in height, producing a profile of the surface's roughness and texture. This technique is commonly employed in quality control, surface metrology, and materials research to assess surface finish, wear patterns, and other surface properties with high resolution and accuracy.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Spectroscopic Ellipsometer- J.A. Woollam M-2000-XI
Heated stage, liquid cell and QCM/Ellipsometry integration module. Regular analysis size 3 mm but can be reduced to 120 μm with focus probes
Melbourne Centre for Nanofabrication
VIC Node
Description
Characterises the optical properties of thin films to provide information on a variety of properties such as thickness and refractive index
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Thin Film Wafer Mapper
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Motorised thin film mapping tool capable of measuring dielectric and photoresist film thickness over 4" and 6" samples
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Variable Angle Spectroscopic Ellipsometer (VASE)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Ellipsometric thin film characterisation
Related Information
The J. A. Woollam M-2000 DI spectroscopic ellipsometer provides fast and accurate thin film characterization over a wide spectroscopic range.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Nikon Instruments Ti-U Inverted Microscope
Highly sensitive spectral imaging with a mechanical slit down to 1µm.
Melbourne Centre for Nanofabrication
VIC Node
Description
Inverted microscope for material research and biological research
Related Information
Used to image nanoparticles, cells, metal films, general dielectric materials. Meterial Studies and Biological Research application
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Spectrometer Fluorescence PerkinElmer LS
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Fluorescence spectrometer
Related Information
Fluorescence spectroscopy (also known as fluorimetry or spectrofluorometry) is a type of electromagnetic spectroscopy that analyzes fluorescence from a sample.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Spectroscope Hyperspectral Imaging Microscope
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Hyperspectral Imaging spectral meter
Related Information
Hyper spectral informatoin
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Spectroscope Light-Field
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
UV/VIS/NIS Spectrophotometer is combined with a Princeton Instrument Isoplane 320 High performance Spectrograph as well as a Deep Cooled EMCCD camera. It offers transmitted and reflected brightfield illumination and transmitted darkfield illumination.Choice of three gratings to cater for long range or high resolution spectral imaging. Can provides transmission, reflection and darkfield images of samples.
Related Information
Aqurie specific point spectral information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
UV/VIS Spectrophotometer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Agilent UV VIS Cary 60 Spectrophotometer measures small volumes and precious samples accurately and reproducibly with a highly focused beam image. Scan the entire wavelength range (190 to 1100 nm) in under three seconds and collect data from single or multiple wavelengths at 80 data points per second.
Related Information
UV-Vis spectroscopy is an analytical technique that measures the amount of discrete wavelengths of UV or visible light that are absorbed by or transmitted through a sample in comparison to a reference or blank sample.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Desktop SEM
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
motorized stage upgrade
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Electron Microscope – Hitachi Flex
Variable pressure SEM able to image both conductive and insulating samples
Melbourne Centre for Nanofabrication
VIC Node
Description
Variable pressure SEM with EDX
Related Information
Secondary electron and back scattered electron detectors; ultravariable detector for high resoulution imaging at low vacuum and cathodoluminescence (CL)
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
High-resolution FEG-SEM (Apreo)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Ultra-high resolution three dimensional imaging for versatile, high performance materials imaging and analysis. Insulators, beam sensitive or magnetic materials can all be imaged with ease thanks to Apreo's unique optics, detection and beam control options.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
High-resolution FEG-SEM (Nova)
Field Emission Gun Scanning Electron Microscope (FEG-SEM)
Melbourne Centre for Nanofabrication
VIC Node
Description
Ultra-high resolution three dimensional imaging for topography, surface morphology and metrology purposes in order to assess the quality of fabrication of devices and any defects.
Related Information
Ultra-high resolution imaging of samples of all sizes up to 6 inch wafers. The 5-axis stage and 100mm stage movement add flexibility to this equipment. Choice of Secondary Electrons (SE) detector best for topography images and Back-Scattered Electrons (BSE) detector for studies of features deep beneath the surface.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Thin Film Stress Measurement System
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The FLX-2320-R is a thin film stress measurement instrument. It accurately measures the changes in the radius of curvature of the substrate caused by the deposition of a stressed thin film on the substrate.
Related Information
The intrinsic stress of a film is mainly caused by the atomic structure mismatch between the film and substrate at the deposition temperature. FLX 2320-R uses a laser interferometer to measure the curvature of a wafer with and without film deposition, which is then used in the calculation of the stress in the film deposited on the wafer. FLX 2320-R has two LASER wavelengths - 670 nm and 750 nm.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Multidetection Plate Reader
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Synergy MX Multi-Detection Micropla
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
3D-optical Profilometer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Bruker Cotour GTI Optical Profiler is a benchtop system for fast, non-contact 3D surface metrology. Its proprietary tip/tilt in the head provides unmatched user flexibility for production setup and inspection. By coupling the auto tip/tilt functionality with the optical path in the microscope head, it has coupled the point of inspection to the line of sight independent of tilt
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Laser Doppler Vibrometer (MSA-400)
Laser Doppler Vibrometer (LDV) with stroboscopic and planar motion analysis
Melbourne Centre for Nanofabrication
VIC Node
Description
The Micro System Analyser (MSA)-400 is a Laser doppler vibrometer that allows the researcher to analyse and visualise structural vibrations in MEMS devices.
Related Information
Measuring frequencies - up to 26MHz. Capable of characterising out of plane vibrations using scanning laser doppler vibrometry and in plane vibrations using stroboscopic video microscopy.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Laser Doppler Vibrometer (UHF-120)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The Micro System Analyser (MSA)-400 is a Laser doppler vibrometer that allows the researcher to analyse and visualise structural vibrations in MEMS devices.
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
IR Spectrometer- Bruker Matrix-MF
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
In-Situ characterisation of plasma polymer film deposition in a specially designed reactor
Related Information
More information to come.
Tool Contact
kljarvis@swin.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Spectrometer-FTIR Perkin Elmer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
FTIR spectral imaging instrument
Related Information
Material research with spectral information
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
AutoLab Potentiostat
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Precision potentiostat for electrochemical measurements
Related Information
A potentiostat is an analytical instrument designed to control the working electrode's potential in a multiple electrode electrochemical cell.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Four-Point Probe
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Jandel multi-height probe stand provides a solution for a wide variety of measurements such as sheet and bulk resistance of the sample. The probe mechanism can be raised and lowered meaning that samples ranging in thickness from thin films to large ingots can be measured.
Related Information
Jandel Engineering Limited offers the RM3000 for use in making four point probe measurements. The RM3000 can supply constant currents between 10nA and 99.99mA, and measure voltages from 0.01mV to 1250mV. For sheet resistance measurements the quoted range is 1 milliohm/square to 5 x 10 (8) ohms/square. For volume (bulk) resistivity measurements the quoted range is 1 milliohm.cm to 1 x 10(6) ohm.cm.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Microelectronics/RF Probe Station
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Microelectronics chacterisation probe station and microscope w/ RF probes
Related Information
More information to come.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Network analyser
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Network/spectrum analsyer- 9 KHz to 13.6 GHz
Related Information
The R&S ZVL is a compact, powerful, and future-proof network analyser which combine the functions of a network analyzer, spectrum analyzer, and power meter in a single box, and thus tremendously increase work efficiency.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Parameter Analyser
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The 4200A-SCS is a customizable and fully-integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V characterization.
Related Information
The highest performance parameter analyzer, the 4200A-SCS accelerates semiconductor, materials, and process development. The 4200A-SCS ClariusTM GUI-based Software provides clear, uncompromised measurement and analysis capability. Furnished with embedded measurement expertise and hundreds of ready-to-use application tests, Clarius Software enables to dig deeper into R & D with speed and confidence. The 4200A-SCS Parameter Analyzer is completely customizable and fully upgradable, so one can add the instruments one's need now – or later.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Tensionmeter DataPhysics OCA-20
Optical contact angle analyser
Melbourne Centre for Nanofabrication
VIC Node
Description
Video-based contact angle measurement.
Related Information
Maximum sample size (L x W x H): 220 x ∞ x 70 mm, 8-inch wafer on WT 200M/E.Size of sample stage: 100 x 100 mmRange of contact angle: 0 - 180°, ±0.1° measuring accuracy of the video system
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Confocal laser scanning microscope – Nikon A1R+
Fluorescence Lifetime Image Microscopy (FLIM) capability
Melbourne Centre for Nanofabrication
VIC Node
Description
Confocal LSM with 405, 488, 561 and 642nm lasers; FLIM technology
Related Information
20x, 40x, 60x, and 100x objectives and 405nm, 488nm, 561nm and 642nm lasers
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Laser Scanning Confocal Microscope
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Laser Scanning Confocal Imaging microscope
Related Information
3D imaging of materials and biological samples with flourescence based imaging techniques.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Asylum Research MFP3D-BIO
Atomic force microscope (AFM) with inverted optical microscope
Melbourne Centre for Nanofabrication
VIC Node
Description
General use Atomic Force Microscope (AFM) built on a Nikon inverted microscope base for integrated scanning-probe and optical microscopy.Modes available; Kelvin force probe/adhesion and stiffness maps, conductivity maps and single molecule spectroscopy, viscoelastic mapping, magnetic force mapping.
Related Information
Large substrate size can be handled. Topological map of 90 µm x 90 µm with sub-nanometre resolution in Z.Accessories: closed fluid cell, electrochemistry fluid cell, temperature-controlled fluid exchange, polymer heater.
Tool Contact
p.pigram@latrobe.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Asylum Research MFP3D-SA
Atomic force microscope (AFM)
Melbourne Centre for Nanofabrication
VIC Node
Description
A versatile AFM mounted on an active-damping vibration-isolation table in an acoustic-isolation enclosure to improve resolution.Operating Modes: contact and non-contact (AC) AFM, EFM, MFM, lateral force microscopy (LFM), conductive AFM, KPFM, and nanolithography.
Related Information
90 μm X-Y raster scanningAccessory features: closed fluid cell, electrochemistry fluid cell, temperature-controlled fluid exchange (BioHeater™), and polymer heater.
Tool Contact
p.pigram@latrobe.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Atomic Force Microscope – Cypher
Environmental Control & Blue Drive; Piezo Force Microscopy, Mechanical & Electrical properties investigations
Melbourne Centre for Nanofabrication
VIC Node
Description
AFM with Blue Drive and Environmental control
Related Information
Travel: X, Y=30um, Z=7um
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Atomic Force Microscope – MFP3D
AFM integrated with a inverted microscope and a camera for top and bottom views
Melbourne Centre for Nanofabrication
VIC Node
Description
AFM integrated with optical microscopy
Related Information
Travel: X, Y=90um, Z=14um
Tool Contact
elena.taran@unimelb.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Bio-AFM
Atomic force microscope (AFM) for biological samples
Melbourne Centre for Nanofabrication
VIC Node
Description
AFM with cell adhesion module, suitable for live cell imaging built on a Nikon inverted microscope base.
Related Information
Large substrate size can be handled. Topological map of 90 µm x 90 µm with sub-nanometre resolution in Z.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Cleanroom AFM (Dimension Icon)
Atomic force microscope (AFM) with various condition control and usability modules
Melbourne Centre for Nanofabrication
VIC Node
Description
The Dimension Icon AFM features a number of application modules such as ScanAsyst, Peak Force QNMTM (PFQNM), electrical characterisation and heating and cooling studies. The ScanAsyst imaging mode performs automatic image optimisation by controlling the tip-sample interaction force for faster and more consistent imaging results. The PFQNM mode analyses tip-sample interaction forces and generates quantitative nanoscale maps of mechanical properties, including modulus, adhesion, deformation, and dissipation. PFQNM operates over an extremely wide range to characterise a large variety of sample types. The AFM executes temperature control and thermal analysis on samples from -35°C to 250°C while scanning in various AFM modes.
Related Information
Features a large sample platform.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Cleanroom AFM (Icon PFTUNA)
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
The Dimension Icon AFM features a number of application modules such as ScanAsyst, Peak Force QNMTM (PFQNM) and electrical characterisations such as Kelvin Probe Force Microscopy (KPFM), Scanning Capacitance Microscopy (SCM), Tunneling Current AFM (TUNA), and Piezo Response Force Microscopy (PFM). KPFM measures material work function as well as surface charge. SCM is one of the primary techniques for doping profile mapping in semiconductor industry. PeakForce TUNA is an ideal method for probing conductivity of fragile samples such as organic photovoltaics, conductive nanotubes, and nanoparticles. PFTUNA provides direct, precise force control and eliminates lateral forces. TUNA can measure material’s electrical conductivity with wide range of current from fA-uA. PFM enables high-resolution nanoscale characterization of piezoresponsive materials and topographical imaging using Contact Mode scanning.
Related Information
Peak Force TUNA is an ideal method for probing conductivity of fragile samples such as organic photovoltaics, conductive nanotubes, and nanoparticles. It overcomes the limitations of traditional contact-mode-based conductive AFM techniques, which are severely restricted by sample damage or probe tip contamination from CAFM lateral forces. PeakForce TUNA provides direct, precise force control and eliminates lateral forces. This enables routine highsensitivity and high-resolution current imaging.
Tool Contact
mcn-enquiries@nanomelbourne.com
Experts
Dr Hazem Abdelmaksoud
Process Engineer/IDR
Hazem is responsible for wet etching benches in the cleanroom and managing the biochemistry, PC2, Industrial labs.
Read More
Melbourne Centre for Nanofabrication
Contact Dr Hazem Abdelmaksoud
Dr Vahid Adineh
Process Engineer
Vahid joined MCN in November 2017 having obtained his PhD from the Faculty of Engineering at Monash University. Vahid previously worked as a lecturer in the Department of Mechanical Engineering, IAU-Saveh Branch, Saveh, Iran. At MCN, Vahid is a part of thin film deposition team and is responsible for the diamond deposition and atomic layer deposition tools as well as Ellipsometry and Dicing equipment. His principal areas of research comprise the use of advanced nanofabrication and novel microscopy methods for multidimensional nanoscale imaging and characterisation of insulated and biological materials, particularly cellular imaging targeting antibiotic resistance.
Read More
Melbourne Centre for Nanofabrication
Contact Dr Vahid Adineh
Dr Sarmad Aslam
Research Engineer
Sarmad is a skilled professional in the field of fibres & textiles, with a PhD that underscores a deep understanding coupled with hands-on industry experience. Through a career that bridges both academia and industrial sector, he has collaborated on cutting edge projects, bringing innovation to produce textile products with enhanced aesthetics and performance, reduced cost and with minimum negative impact on our environment. His areas of interest are textile raw materials, Industrial engineering, yarn manufacturing, fabric manufacturing, fabric processing and textile testing & characterisation.
Read More
Deakin University
Contact Dr Sarmad Aslam
