The NSW Node of ANFF is split between the University of New South Wales (UNSW) and the University of Sydney.
The core area of expertise for ANFF’s activities at UNSW includes nanoelectronics, with both Si-MOS and GaAs devices with sub-50 nm feature sizes routinely produced using the hub’s suite of high-resolution EBL systems within a 600 m2 laboratory complex providing cleanrooms with particle counts equivalent to ISO5, ISO6 and ISO7. The full range of research disciplines regularly supported by ANFF NSW @ UNSW is broad, encompassing quantum computing, biomedical devices, nanophotonics, medical detectors and photovoltaics.
ANFF NSW equipment at the University of Sydney forms part of the Research and Prototype Foundry (RPF), a Core Research Facility based at the Sydney Nanoscience Hub. The RPF enables the development of optical chips, electronic devices and new quantum science and technology via outstanding lithography, etching, deposition and metrology capabilities.
Specialist fields: nanoelectronics (Si-MOS and GaAs); semiconductor device processing; optics; quantum technologies; photovoltaics.
Flagship facilities: high resolution EBL systems, including the flagship Raith 150TWO; UV lithography equipment; a range of deposition systems and etching tools; high temperature silicon oxidation, diffusion and annealing furnaces; wet chemical process lines; a suite of metrology tools; device packaging and bonding tools.
Node Director: Prof. François Ladouceur
Phone: +61 2 9385 6311
Facility Manager: Matthew Boreland
Phone: +61 2 9385 7845
Level 3 Newton Building
The University of New South Wales
Sydney NSW 2052
Sydney Nanoscience Hub
University of Sydney