X-ray scanning provides non-destructive imaging of complex internal structures, offering insight into deeply buried micro and nanostructures that may be unobservable with 2D imaging techniques such as optical microscopy, SEM and AFM. These capabilities, in particular micro and nanotomography, enable highly efficient examination of components during development or when analysing a fault. For life sciences, the equipment can be used to inspect the internal structure of biological specimens, such as bone, soft tissue, and biomedical devices with resolution down to 50 nm on some tools.

Laser scanning can be used to record a three-dimensional computer model of an object, often for CAD modelling, but also for part inspection or defect monitoring. A laser is used to take spot measurements in three dimensional space of an object. This can be done using a handheld or mounted scanner that revolves around the object while it is stationary. Once scanned, a computer file is created that can be used for 3D printing, further CAD work, or other digital steps.