Direct laser lithography
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Direct laser lithography

Laser processing uses a highly controlled and focused beam of high-energy photons of the same wavelength to burn away material. These processes are repeatable, scalable and cheap, but can induce thermal stresses on the substrate, and resolutions tend to be in the micrometre regime. Laser processing is often used within ANFF to create masks for later lithography steps, but it can also be used to create patterns directly into the substrate itself, skipping several ordinary fabrication steps.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
3D Microprinting, Nanoscribe PPGT2
ANFF NSW USYD
3D Printing, NanoScribe
ANFF VIC MCN
Direct Write Laser, Dilase 650
ANFF SA
Direct Write Laser, Heidelberg 66+
ANFF NSW USYD
Direct write laser, Heidelberg MLA150
ANFF ACT
Direct write laser, Heidelberg MLA150
ANFF QLD UQ - AIBN
Direct write laser, Heidelberg MLA150
ANFF QLD Griffith
Direct write laser, Heidelberg MLA150
ANFF SA
Direct write laser, Heidelberg MLA150
ANFF VIC RMIT
Direct write laser, Heidelberg MLA150
ANFF VIC MCN
Maskless Direct Write System, Heidelberg MLA150
ANFF WA
Nanno 3D printer, Nanoscribe Photonic Professional GT
ANFF QLD UQ - AIBN
TOOL MAKE AND MODEL
LOCATION
3D Printing, NanoScribe
Description
The NanoScribe Photic Professional GT2 (PPGT2) is a direct laser lithography system that uses two-photon polymerisation for additive 3D printing. A focal spot volume is defined by an IR femtosecond laser that concentrates light pulses and within this volume polymerisation occurs. The X-, Y- and Z-coordinate of a CAD model is defined by a focal spot volume, allowing for a CAD design to be printed as a 3D nanostructure layer-by-layer.
Related Information
Two-photon polymerisation is based on the principle of photopolymerisation. Here, targeted exposure to light triggers the polymerisation, or the process to bring monomers together to create a polymer chain, of synthetic resins. This chain reaction causes the molecules to bond and harden, resulting in 3D models.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Direct Write Laser, Dilase 650
Direct laser lithography system
Description
This equipment offers the possibility to work with one or two writing lasers, to be focused into one to two beam sizes ranging from 1µm to 50 µm. Writes over a surface area as large as 6 x 6 inches.
Related Information
Used for direct write rapid prototyping and mask fabrication. Writing is possible on any type of substrate, including: photomasks, semiconductors, glass, polymers, crystals, flexible films. Direct laser lithography system
Tool Contact
anff-sa@adelaide.edu.au
TOOL MAKE AND MODEL
LOCATION
Direct Write Laser, Heidelberg 66+
Direct laser lithography system
Description
Direct write laser lithography system capable of high resolution and grayscale patterning
Related Information
375 nm laser wavelength, multiple write modes. Capable of achieving sub 500 nm features with highest resolution, alignment, maximum write area 200 x 200 mm Direct laser lithography system
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
LOCATION
Direct write laser, Heidelberg MLA150
Direct-write photolithography tool
Description
The Heidelberg MLA150 is an advanced maskless aligner designed for direct-write laser lithography. It is ideal for research and development, rapid prototyping, and small production volumes. The MLA150 eliminates the need for traditional photomasks by directly writing the design onto the photoresist-coated substrate using a laser. This approach significantly reduces cycle times and allows for quick design modifications by simply changing the CAD layout.
Related Information
The ubstrate size is 6” x 6” with a max. write area 150 x 150 mm², substrate thickness 0.1 to 12 mm, laser wavelength 375 nm providing a min. feature size of 1 μm.
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
LOCATION
Direct write laser, Heidelberg MLA150
Description
The Heidelberg MLA150 is an advanced maskless aligner designed for direct-write laser lithography. It is ideal for research and development, rapid prototyping, and small production volumes. The MLA150 eliminates the need for traditional photomasks by directly writing the design onto the photoresist-coated substrate using a laser. This approach significantly reduces cycle times and allows for quick design modifications by simply changing the CAD layout.
Related Information
The design is loaded in GDS2 format which controls the stage movement and pixel exposure.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
LOCATION
Direct write laser, Heidelberg MLA150
Description
The Heidelberg MLA150 is an advanced maskless aligner designed for direct-write laser lithography. It is ideal for research and development, rapid prototyping, and small production volumes. The MLA150 eliminates the need for traditional photomasks by directly writing the design onto the photoresist-coated substrate using a laser. This approach significantly reduces cycle times and allows for quick design modifications by simply changing the CAD layout.
Related Information
Tool Contact
glenn.walker@griffith.edu.au
TOOL MAKE AND MODEL
LOCATION
Direct write laser, Heidelberg MLA150
Lab-on-a-chip, Microfluidic chip fabrication, integration and interfacing
Description
The Heidelberg MLA150 is an advanced maskless aligner designed for direct-write laser lithography. It is ideal for research and development, rapid prototyping, and small production volumes. The MLA150 eliminates the need for traditional photomasks by directly writing the design onto the photoresist-coated substrate using a laser. This approach significantly reduces cycle times and allows for quick design modifications by simply changing the CAD layout.
Related Information
Used for direct write rapid prototyping and mask fabrication. Writing is possible on any type of substrate, including: photomasks, semiconductors, glass, polymers, crystals, flexible films. Lab-on-a-chip, Microfluidic chip fabrication, integration and interfacing
Tool Contact
anff-sa@adelaide.edu.au
TOOL MAKE AND MODEL
LOCATION
Direct write laser, Heidelberg MLA150
Maskless Aligner
Description
The Heidelberg MLA150 is an advanced maskless aligner designed for direct-write laser lithography. It is ideal for research and development, rapid prototyping, and small production volumes. The MLA150 eliminates the need for traditional photomasks by directly writing the design onto the photoresist-coated substrate using a laser. This approach significantly reduces cycle times and allows for quick design modifications by simply changing the CAD layout.
Related Information
Minimum Structure Size [μm]: 1 μm; Maximum Write Area [mm²]: 150 x 150; Alignment Accuracy*[3σ, nm] for 100 x 100 mm²: <=500. Maskless Aligner
Tool Contact
mnrf@rmit.edu.au
TOOL MAKE AND MODEL
LOCATION
Direct write laser, Heidelberg MLA150
Description
The Heidelberg MLA150 is an advanced maskless aligner designed for direct-write laser lithography. It is ideal for research and development, rapid prototyping, and small production volumes. The MLA150 eliminates the need for traditional photomasks by directly writing the design onto the photoresist-coated substrate using a laser. This approach significantly reduces cycle times and allows for quick design modifications by simply changing the CAD layout.
Related Information
The MLA150 is equipped with both 405nm and 375nm solid state laser sources. It is equipped with write mode I and is capable of producing minimum structure size of 0.6um. The system comes equipped with an automated handling unit which can support batch direct-write lithography on standard size wafers such as 6in and 4in substrates as well as 5in mask plates.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
LOCATION
Maskless Direct Write System, Heidelberg MLA150
Maskless direct write system
Description
The Heidelberg MLA150 is an advanced maskless aligner designed for direct-write laser lithography. It is ideal for research and development, rapid prototyping, and small production volumes. The MLA150 eliminates the need for traditional photomasks by directly writing the design onto the photoresist-coated substrate using a laser. This approach significantly reduces cycle times and allows for quick design modifications by simply changing the CAD layout.
Related Information
Maskless lithography is an alternative to the traditional mask aligner that exposes the pattern directly onto the substrate surface with a spatial light modulator (SLM). The MLA 150 offers flexibility, throughput, and performance for fast prototyping on various substrates. The minimum feature size is 0.6 micron. Maskless direct write system
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
LOCATION
Nanno 3D printer, Nanoscribe Photonic Professional GT
100-nanometre resolution 3D printer
Description
3D Printing with a minimum voxel size of 100 x 350 nm. The dual photon technology is used to construct high resolution and complex structures in polymers (such as AZ resist, SU8 and proprietary IP resists from Nanoscribe).
Related Information
Uses a IR femto second laser to concentrate pulses to within a small polymerisation volume equivalent to UV light. Within this volume polymerisation occurs to create nanoscale 3D structures. Resists sensitive to UV light can be used. Substrates can be up to 5 inch square. 100-nanometre resolution 3D printer
Tool Contact
anff@uq.edu.au