HF Etching
HF Etching
HF etching is a dry vapor (plasma-less) etch process to remove sacrificial oxide layers, primarily used to release silicon MEMS structures.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
HF Vapour Etcher, SPTS uEtch
ANFF QLD Griffith
Porous Silicon Etching, AMMT Porous Silicon System MPSB
ANFF VIC MCN
Small Etching Cell, HF fumehoods
ANFF VIC MCN