HF Etching
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HF Etching

HF etching is a dry vapor (plasma-less) etch process to remove sacrificial oxide layers, primarily used to release silicon MEMS structures.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Porous Silicon Etching
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Microporous silicon and silicon nanoparticles are fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon (PS) has gained wide-spread attention over the last decade for its interesting material properties, including nanometer features and extremely high specific surface area. Applications are, amongst others, humidity sensors, particle filters, optical elements and biochemical matrices. Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage.
Tool Contact
mcn-enquiries@nanomelbourne.com
Small Etching Cell
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon in small batches
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Porous Silicon Etching
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Microporous silicon and silicon nanoparticles are fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon (PS) has gained wide-spread attention over the last decade for its interesting material properties, including nanometer features and extremely high specific surface area. Applications are, amongst others, humidity sensors, particle filters, optical elements and biochemical matrices. Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Small Etching Cell
More information to come.
Melbourne Centre for Nanofabrication VIC Node
Description
Microporous silicon is fabricated by etching silicon in HF-based solutions under applied voltage. It is a complete solution for porous silicon formation and electro-polishing of silicon.
Related Information
Porous silicon in small batches
Tool Contact
mcn-enquiries@nanomelbourne.com