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Stylus profilometry
Stylus profilometry
Stylus profilometry is a direct form of profilometry that can be used to characterise the surface steps and the roughness of a material. A stylus profilometer drags a metal tip along the surface of a sample and measuring the distance traced by the stylus tip and its deflection along the vertical axis to register slight changes in the surface height of a material. This measurement is then converted into a cross-sectional plot and can be used to resolve steps as small as 10nm. Optical profilometry employs phase-shifting and/or vertical scanning interferometry to resolve the topology of complex 3D structures. The technique marries precision z-axis control with interference based techniques to resolve features from the angstrom to millimetre scale. The technique lends itself well to die-based measurements for ISO/QA and large area mapping.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Bruker ContourGT-K
High precision surface profiler
Optofab Node
University of Adelaide
Description
This instrument performs non-contact 3D surface metrology measurements for laboratory research and production process control.
Related Information
Specifications: Maximum scan range: up to 10 mm; Vertical resolution: less than 0.01 nm.
Tool Contact
optofab@adelaide.edu.au
Bruker Dektak XT
Stylus profilometer
ACT Node
Australian National University (ANU)
Description
Instrument used to measure height steps, typically after lithography or etching
Related Information
System accuracy down to 10 nm
Tool Contact
horst.punzmann@anu.edu.au
DektakXT
More information to come.
NSW Node
University of New South Wales
Description
Stylus Profilometer
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
Stylus Profiler- Bruker Dektak XT
Stylus profilometer
Flinders University
SA Node
Description
Stylus profilometer
Related Information
Allows for 2D scans across a surface up to 156 x 156 mm. Height measurement range from 1 nm to 1 mm. Force range from 0.03 mg to 15 mg. Can measure surfaces on both rigid and flexible substrates, and samples up to 50 mm thick. Solid and vacuum stages are available. Installed software allows for simple and quick data analysis.
Tool Contact
Jason.Gascooke@flinders.edu.au
Stylus profilometer- Bruker Dektak XT
Stylus profilometer
NSW Node
University of Sydney
Description
The Dektak XT profilometer is a stylus profiler capable of measuring step heights, film stress, and surface roughness. This tool has a 0.1 nm vertical resolution with a 6 inch automated stage.
Related Information
Sample size of up to 6 inch wafer. Single scan size of 55 mm. Vertical range of 1 mm
Tool Contact
rpf.queries@sydney.edu.au
Stylus Profilometer
More information to come.
Melbourne Centre for Nanofabrication
VIC Node
Description
Instrument utilises a microscale stylus for tological and step height profiling
Related Information
A precision measurement instrument used to characterize surface topography by scanning a sharp stylus across a sample's surface. As the stylus moves, it records variations in height, producing a profile of the surface's roughness and texture. This technique is commonly employed in quality control, surface metrology, and materials research to assess surface finish, wear patterns, and other surface properties with high resolution and accuracy.
Tool Contact
mcn-enquiries@nanomelbourne.com
Surface Profilometer- Bruker Dektak XT-S
Stylus profilometer
Materials Node
University of Newcastle
Description
Used to measure the surface roughness of samples or to determine film thickness.
Related Information
55 mm scan length
Tool Contact
anff@newcastle.edu.au
Veeco Dektak 150 stylus profiler
Contact surface profilometer
University of Western Australia
WA Node
Description
Measures thin film thickness, stress, surface roughness and form
Related Information
Large z-range of 1 mm enables larger step measurements. Stylus profilometers use a probe to detect the surface, physically moving a probe along the surface in order to acquire the surface height. This is done mechanically with a feedback loop that monitors the force from the sample pushing up against the probe as it scans along the surface.
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Bruker ContourGT-K
High precision surface profiler
University of Western Australia
WA Node
Description
This instrument performs non-contact 3D surface metrology measurements for laboratory research and production process control.
Related Information
Specifications: Maximum scan range: up to 10 mm; Vertical resolution: less than 0.01 nm.
Tool Contact
optofab@adelaide.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Bruker Dektak XT
Stylus profilometer
University of Western Australia
WA Node
Description
Instrument used to measure height steps, typically after lithography or etching
Related Information
System accuracy down to 10 nm
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
DektakXT
More information to come.
University of Western Australia
WA Node
Description
Stylus Profilometer
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Stylus Profiler- Bruker Dektak XT
Stylus profilometer
University of Western Australia
WA Node
Description
Stylus profilometer
Related Information
Allows for 2D scans across a surface up to 156 x 156 mm. Height measurement range from 1 nm to 1 mm. Force range from 0.03 mg to 15 mg. Can measure surfaces on both rigid and flexible substrates, and samples up to 50 mm thick. Solid and vacuum stages are available. Installed software allows for simple and quick data analysis.
Tool Contact
Jason.Gascooke@flinders.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Stylus profilometer- Bruker Dektak XT
Stylus profilometer
University of Western Australia
WA Node
Description
The Dektak XT profilometer is a stylus profiler capable of measuring step heights, film stress, and surface roughness. This tool has a 0.1 nm vertical resolution with a 6 inch automated stage.
Related Information
Sample size of up to 6 inch wafer. Single scan size of 55 mm. Vertical range of 1 mm
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Stylus Profilometer
More information to come.
University of Western Australia
WA Node
Description
Instrument utilises a microscale stylus for tological and step height profiling
Related Information
A precision measurement instrument used to characterize surface topography by scanning a sharp stylus across a sample's surface. As the stylus moves, it records variations in height, producing a profile of the surface's roughness and texture. This technique is commonly employed in quality control, surface metrology, and materials research to assess surface finish, wear patterns, and other surface properties with high resolution and accuracy.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Surface Profilometer- Bruker Dektak XT-S
Stylus profilometer
University of Western Australia
WA Node
Description
Used to measure the surface roughness of samples or to determine film thickness.
Related Information
55 mm scan length
Tool Contact
anff@newcastle.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Veeco Dektak 150 stylus profiler
Contact surface profilometer
University of Western Australia
WA Node
Description
Measures thin film thickness, stress, surface roughness and form
Related Information
Large z-range of 1 mm enables larger step measurements. Stylus profilometers use a probe to detect the surface, physically moving a probe along the surface in order to acquire the surface height. This is done mechanically with a feedback loop that monitors the force from the sample pushing up against the probe as it scans along the surface.
Tool Contact
anff-wa@uwa.edu.au
