Wetbench
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Wetbench

A wetbench is a potentially automated process tool that is used to carry out wet etching or cleaning steps of a fabrication process.

List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Amerimade Automated Wetbench Suite
Set of wet benches for wet processing
Melbourne Centre for Nanofabrication VIC Node
Description
The automated wet-bench suite is comprised of three custom made instruments – a manual wet processing deck, a semi-automated chemical cleaning station and an IPA aerosol vapour dryer. All three wetbench instruments are designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. The wetbench suite significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management systems.
Related Information
Manual wet processing baths - KOH, Cr etcher, 5% H2SO4, IPA and DI water. Semi-automated chemical cleaning station (enclosed, exhausted) baths - piranha, SC-2, buffered oxide etch (BOE), DI water and ultrasonic acetone de-scum station. The IPA aerosol vapour dryer dries without any need for heaters or rotation. Substrate size - Up to 6 ". Batch processing - Up to 25 wafers.
Tool Contact
mcn-enquiries@nanomelbourne.com
Reynolds Tech Hotplate Tower
Stacked Hotplate tower
NSW Node University of Sydney
Description
Exhausted stacked hotplates for baking during solvent based processes
Related Information
Includes 4 hotplates dedicated to different temperature ranges - used for baking/outgassing purposes
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench – Acid
Wet Bench for general purpose acid processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of general purpose acids
Related Information
Includes integrated stirring hotplate, heated and filtered process tank and cascading tank for batch processing
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench – Caustic Develop
Wet Bench for caustic development processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of caustic based chemicals - primarily TMAH based developers
Related Information
Includes automated spin process unit for development of wafers up to 7 inches squared.
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench – Chromium etch
Wet Bench for Chromium etch processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of chromium etch chemicals
Related Information
Includes automated spin process unit for etching of wafers up to 7 inches squared.
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench – EBL Resist Coating
Wet Bench for electron beam lithography resist coating processes
NSW Node University of Sydney
Description
Exhausted wet bench used for resist coating processes dedicated to EBL resists
Related Information
Includes two spinners dedicated to PMMA and CSAR/ZEP processes
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench – General Purpose
Wet Bench for general purpose caustic etch processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of general purpose caustic based chemicals
Related Information
Includes integrated stirring hotplate, heated and filtered process tank and cascading tank for batch processing
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench – Hydrofluric acid
Wet bench for Hydrofluoric acid processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of hydrofluoric acid
Related Information
Includes heated process tank and cascading tank for rinsing.
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench – Photolithography Resist coating
Wet Bench for photolithography resist coating processes
NSW Node University of Sydney
Description
Exhausted wet bench used for resist coating processes dedicated to thicker photolithography based resists
Related Information
Includes three spinners dedicated to positive, negative and thick resist processes
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench -Lift-off process
Wet bench for solvent based lift-off processes
NSW Node University of Sydney
Description
Exhausted wet bench used for solvent based metal lift-off and cleaning processes
Related Information
Includes three heated ultrasonic tanks, an ambient filtered tank, and a cascading tank
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench -Solvent Develop
Wet bench for solvent based development processes
NSW Node University of Sydney
Description
Exhausted wet bench used for solvent based development processes
Related Information
Includes cold plate for cold development processes
Tool Contact
rpf.queries@sydney.edu.au
Reynolds Tech Wet Bench
Wet Bench for general purpose acid processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of general purpose acids
Related Information
Includes two integrated stirring hotplates and a cascading tank for rinsing
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Amerimade Automated Wetbench Suite
Set of wet benches for wet processing
NSW Node University of Sydney
Description
The automated wet-bench suite is comprised of three custom made instruments – a manual wet processing deck, a semi-automated chemical cleaning station and an IPA aerosol vapour dryer. All three wetbench instruments are designed to accommodate 25 wafers processing at a time resulting in high throughput and large volume of chemical ensure repeatable results. The wetbench suite significantly reduces the risk of using dangerous chemical by eliminating beakers and safe waste management systems.
Related Information
Manual wet processing baths - KOH, Cr etcher, 5% H2SO4, IPA and DI water. Semi-automated chemical cleaning station (enclosed, exhausted) baths - piranha, SC-2, buffered oxide etch (BOE), DI water and ultrasonic acetone de-scum station. The IPA aerosol vapour dryer dries without any need for heaters or rotation. Substrate size - Up to 6 ". Batch processing - Up to 25 wafers.
Tool Contact
mcn-enquiries@nanomelbourne.com
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Hotplate Tower
Stacked Hotplate tower
NSW Node University of Sydney
Description
Exhausted stacked hotplates for baking during solvent based processes
Related Information
Includes 4 hotplates dedicated to different temperature ranges - used for baking/outgassing purposes
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench – Acid
Wet Bench for general purpose acid processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of general purpose acids
Related Information
Includes integrated stirring hotplate, heated and filtered process tank and cascading tank for batch processing
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench – Caustic Develop
Wet Bench for caustic development processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of caustic based chemicals - primarily TMAH based developers
Related Information
Includes automated spin process unit for development of wafers up to 7 inches squared.
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench – Chromium etch
Wet Bench for Chromium etch processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of chromium etch chemicals
Related Information
Includes automated spin process unit for etching of wafers up to 7 inches squared.
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench – EBL Resist Coating
Wet Bench for electron beam lithography resist coating processes
NSW Node University of Sydney
Description
Exhausted wet bench used for resist coating processes dedicated to EBL resists
Related Information
Includes two spinners dedicated to PMMA and CSAR/ZEP processes
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench – General Purpose
Wet Bench for general purpose caustic etch processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of general purpose caustic based chemicals
Related Information
Includes integrated stirring hotplate, heated and filtered process tank and cascading tank for batch processing
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench – Hydrofluric acid
Wet bench for Hydrofluoric acid processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of hydrofluoric acid
Related Information
Includes heated process tank and cascading tank for rinsing.
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench – Photolithography Resist coating
Wet Bench for photolithography resist coating processes
NSW Node University of Sydney
Description
Exhausted wet bench used for resist coating processes dedicated to thicker photolithography based resists
Related Information
Includes three spinners dedicated to positive, negative and thick resist processes
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench -Lift-off process
Wet bench for solvent based lift-off processes
NSW Node University of Sydney
Description
Exhausted wet bench used for solvent based metal lift-off and cleaning processes
Related Information
Includes three heated ultrasonic tanks, an ambient filtered tank, and a cascading tank
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench -Solvent Develop
Wet bench for solvent based development processes
NSW Node University of Sydney
Description
Exhausted wet bench used for solvent based development processes
Related Information
Includes cold plate for cold development processes
Tool Contact
rpf.queries@sydney.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Reynolds Tech Wet Bench
Wet Bench for general purpose acid processes
NSW Node University of Sydney
Description
Exhausted wet bench used for handling of general purpose acids
Related Information
Includes two integrated stirring hotplates and a cascading tank for rinsing
Tool Contact
rpf.queries@sydney.edu.au