Micro-electro-mechanical systems (MEMS)
MEMS, or micro-electro-mechanical systems, is a broad class of technologies that make use of micromachined structures, sensors, and moving parts. They often perform tasks that range from detecting changes in temperature or pressure, to tuning light sensors or manoeuvring mirrors. MEMS often feature incredibly intricate designs with part dimensions between 100 nm to 100 µm. …