Annealing
Annealing
Annealing is a process that can reduce residual stress in a substrate that has accumulated during prior processes such as deposition. The material is heated to high temperatures and allowed to cool at a controlled rate. This allows the material’s crystal structure to relax into a less intrinsically stressed state, and to settle into a more desirable microstructure as it cools.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
Annealing Furnace, Labec HTF 60
ANFF WA
Four Tube Furnace, (Doping/Oxidation/Nitride)
ANFF VIC MCN
Furnace, Heraeus T6060 Medium Oven (300C)
ANFF OPTOFAB ANU
Furnace, Thermco clean silicon annealing
ANFF NSW UNSW
General Purpose Furnace, MTI VBF-1200X-H8
ANFF VIC MCN
Generanl purpose furnace, Thermco annealing
ANFF NSW UNSW
Lamp annealer, ULVAC MILA5000
ANFF NSW USYD
Rapid Thermal Annealer, Anealsys Minilock Phantom
ANFF WA
Rapid Thermal Annealer, Jipelec JetFirst - (RTA 1)
ANFF ACT
Rapid Thermal Annealer, Jipelec JetFirst (RTA 2)
ANFF ACT
Rapid Thermal Processing/Annealing System (RTP) Accut
ANFF QLD Griffith
Thermal Annealer, Jipelec Jetfirst
ANFF NSW UNSW
Thermal Processing, Cascade Tek low vacuum medium oven (300C)
ANFF OPTOFAB ANU
Thermal Processing, CSIRO High Vacuum oven (600C)
ANFF OPTOFAB ANU
Thermal Processing, Nabertherm Large Oven (600C)
ANFF OPTOFAB ANU
UV-LED Curing Station, Powatec UV-200
ANFF WA
Vacuum Furnace, R.D. Webb Red Devil
ANFF SA
Vacuum Oven, Thermoline Low Medium (200C)
ANFF OPTOFAB ANU
Vacuum oven, Thermo Scientific VT 6060 M
ANFF VIC La Trobe