Electron Beam Evaporation (E-Beam Evaporation)
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Electron Beam Evaporation (E-Beam Evaporation)

Electron-beam evaporation is a physical vapour deposition method for depositing thin films of metals, oxides and semiconductors in a high vacuum environment. Ultra high purity coating material is placed inside a vacuum chamber, typically as pellets in a crucible. Electron energy is used to heat these pellets, causing the coating material to enter the gas phase. Due to the vacuum environment, the evaporated particles can travel to the substrate without colliding with foreign particles, where they then condense on the substrate surface in a thin film. Electron beam evaporation is used to deposit electronic and optical films for the semiconductor industry and has applications in displays and photovoltaics. High melting point materials can be deposited at high deposition rates, making this a preferred process for refractory metal and ceramic films.

List of available equipment
TOOL MAKE AND MODEL
LOCATION
e-Beam evaporator HHV ATS500
ANFF QLD Griffith
E-Beam / thermal evaporator, AJA ATC-1800-E
ANFF NSW USYD
Electron Beam Evaporator, Angstrom engineering Nexdep Amod
ANFF VIC MCN
Electron Beam Evaporator, Edwards Auto 500
ANFF WA
Electron Beam Evaporator, Intlvac Nanochrome II
ANFF VIC MCN
Electron Beam Evaporator, Kurt J. Lesker PVD75
ANFF VIC RMIT
Electron Beam Evaporator, Scientific Vacuum Systems V6000
ANFF WA
Electron Beam Evaporator, Temescal BJD2000
ANFF ACT
Electron Beam Evaporator, ULVAC ei-5
ANFF VIC MCN
Intellivation Metallisation System
ANFF MATERIALS Newcastle
Ion Assisted E-Beam Evaporator, CSIRO DB600
ANFF OPTOFAB ANU
PVD, Kurt J Lesker 75 (Si)
ANFF NSW UNSW
PVD, Kurt J Lesker PVD75 (GP)
ANFF NSW UNSW
Thermal and E-Beam evaporator, Temescal Systems FC-2000
ANFF QLD UQ - AIBN