Plasma etching
Plasma etching
Plasma etching uses a finely controlled plasma to selectively remove material from a substrate.
List of available equipment
TOOL MAKE AND MODEL
LOCATION
Atmospheric Plasma, Diener PlasmaBeam
ANFF VIC Swinburne
Barrel etcher, PVA Tepla 400
ANFF OPTOFAB ANU
Barrel Etcher, PVA Tepla Gigabatch 300
ANFF ACT
Barrel Plasma Asher, March Instruments PM-600
ANFF WA
Benchtop Plasma Asher, Harrick
ANFF VIC MCN
CI Etcher, Trion Minilock Phantom
ANFF NSW UTS
Etcher, XeF2
ANFF QLD UQ - AIBN
ICP Etcher, Oxford Instruments ICP-100
ANFF OPTOFAB ANU
ICP Plasma Etcher, STS Multiplex
ANFF QLD Griffith
Ion Beam Etcher, IntlVac Nanoquest I
ANFF NSW UTS
Large Plasma Asher, Alpha Plasma Q235
ANFF VIC MCN
Microwave Ashing system, PVA Tepla
ANFF QLD UQ - AIBN
O2 Plasma asher, Glow
ANFF NSW USYD
O2 plasma cleaner, Tergeo Benchtop
ANFF QLD UQ - AIBN
Plasma Cleaner, Tergeo Tabletop
ANFF QLD UQ - Long Pocket
RIE Etching, South Bay RIE3000
ANFF NSW USYD