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Thermal evaporation
Thermal evaporation
Thermal Evaporation is one of the simplest forms of physical vapor deposition (PVD). It uses heat to evaporate a high purity source material that moves through a vacuum chamber and deposits a thin film on a substrate. Thermal evaporation can be used to deposit metals, organic, and inorganic polymers. In this method, electrical energy is used to heat a filament which in turn heats a deposition material to the point of evaporation. The process can be performed at very high levels of vacuum to eliminate collisions with foreign particles and therefore fewer tendencies to introduce film impurities. High deposition rates can be achieved and lower energy particles can reduce substrate damage. Thermal evaporation is widely used when creating polymer solar cells and flexible electronics.
List of available equipment
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Angstrom co-thermal/co-sputter system
Thermal and sputtering deposition for chalcogenide,SiO2,Te,Er,etc
Australian National University (ANU)
Optofab Node
Description
Co Thermal and Co sputtering deposition system
Related Information
Thermal deposition,sputtering of chalcogenide materials,semiconductor materials. The Angstrom system is primarily used for photonics films applications and has six Radak resistively heated evaporation sources installed using quartz, ceramic, or metal crucibles, and a further baffled boat option as well. Each source has its own quartz microbalance rate monitor enabling the system to monitor the deposition rate through software. The machine is capable of co-evaporation of different materials and so far two kind chalcogenide glasses deposition is well established process for three layers deposition without any vacuum break. The following materials are evaporated and sputtered using this tool:Ge11As24.5Se64.5, Ge11As24.5S64.5, Sb2S3, As2Se3, Ge, Ga, Se, S, SiO2, TeO2, GLS, Er2S3 etc.
Tool Contact
stephen.madden@anu.edu.au
Custom Dual Chamber Thermal Evaporator
Custom dual chamber system for multi-material thermal evaporation
University of Western Australia
WA Node
Description
Custom made dual chamber thermal evaporator for deposition of metal and non-metal materials with high deposition rate and high purity.
Related Information
Materials: Cr, Au, Al, Ag, MgF₂, Ge, and certain other materials upon request.
Tool Contact
anff-wa@uwa.edu.au
Custom Indium Thermal Evaporator
Custom system for Indium (In) thermal evaporation
University of Western Australia
WA Node
Description
Thermal evaporator designed for Indium deposition (In dedicated)
Related Information
Exclusively for Indium deposition for up to 2-inch wafer sizes
Tool Contact
anff-wa@uwa.edu.au
Custom Zinc Sulfide Thermal Evaporator
Custom system for Zinc sulfide (ZnS) thermal evaporation
University of Western Australia
WA Node
Description
Thermal evaporator designed for Zinc Sulfide deposition
Related Information
Exclusively for Zinc Sulfide (ZnS) deposition
Tool Contact
anff-wa@uwa.edu.au
e-beam evaporator- non-organic
Thermal evaporator for depositing metals
QLD Node
University of Queensland
Description
Evaporates non-organic materials within a controlled N2 glovebox
Related Information
System only used for non-organic materials.
Tool Contact
anff@uq.edu.au
e-beam evaporator- Organic
Thermal evaporator for depositing organic materials
QLD Node
University of Queensland
Description
Evaporates organic materials within a controlled N2 glovebox
Related Information
System only used for organic materials.
Tool Contact
anff@uq.edu.au
Edwards 306 thermal evaporator
Thermal evaporator with angled and cold evaporation stages
NSW Node
University of New South Wales
Description
thermal evaporator, angled evaporation stage, cold evaporation stage
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
Kurt Lesker Nano36
Thermal evaporator for depositing Au, Cu, Zn, etc.
ACT Node
Australian National University (ANU)
Description
Thermal deposition of various materials.
Related Information
A large choice of metals is allowed. However, no toxic material's are permitted.
Tool Contact
horst.punzmann@anu.edu.au
Lesker thermal evaporator
Thermal evaporator
NSW Node
University of New South Wales
Description
thermal evaporator, general purpose
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
Octal thermal evaporator
Thermal evaporation of Chalcogenide(As2S3,Ge11.5As24Se64.5)
Australian National University (ANU)
Optofab Node
Description
Thermal evaporation system, the Octal Thermal evaporation system is restricted to depositing very low optical loss sulphur based chalcogenide films for which it is the “production” tool. The system can handle four wafers of 4 inch circular size at a time.
Related Information
dedicated thermal evaporation for As2S3
Tool Contact
stephen.madden@anu.edu.au
Therma Evaporator- Angstrom Covap II
Thermal evaporator
Flinders University
SA Node
Description
Thermal evaporator housed in an inert atmosphere glovebox.
Related Information
Capable of depositing thin films of up to four metals and/or powders onto a substrate.
Tool Contact
Jason.Gascooke@flinders.edu.au
Thermal Evaporator- Emitech 975K
Thermal evaporator
SA Node
University of South Australia
Description
A thermal evaporator with two evaporation sources
Related Information
Can deposit metals including Au, Cr, Mo
Tool Contact
Simon.Doe@unisa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Angstrom co-thermal/co-sputter system
Thermal and sputtering deposition for chalcogenide,SiO2,Te,Er,etc
SA Node
University of South Australia
Description
Co Thermal and Co sputtering deposition system
Related Information
Thermal deposition,sputtering of chalcogenide materials,semiconductor materials. The Angstrom system is primarily used for photonics films applications and has six Radak resistively heated evaporation sources installed using quartz, ceramic, or metal crucibles, and a further baffled boat option as well. Each source has its own quartz microbalance rate monitor enabling the system to monitor the deposition rate through software. The machine is capable of co-evaporation of different materials and so far two kind chalcogenide glasses deposition is well established process for three layers deposition without any vacuum break. The following materials are evaporated and sputtered using this tool:Ge11As24.5Se64.5, Ge11As24.5S64.5, Sb2S3, As2Se3, Ge, Ga, Se, S, SiO2, TeO2, GLS, Er2S3 etc.
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Dual Chamber Thermal Evaporator
Custom dual chamber system for multi-material thermal evaporation
SA Node
University of South Australia
Description
Custom made dual chamber thermal evaporator for deposition of metal and non-metal materials with high deposition rate and high purity.
Related Information
Materials: Cr, Au, Al, Ag, MgF₂, Ge, and certain other materials upon request.
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Indium Thermal Evaporator
Custom system for Indium (In) thermal evaporation
SA Node
University of South Australia
Description
Thermal evaporator designed for Indium deposition (In dedicated)
Related Information
Exclusively for Indium deposition for up to 2-inch wafer sizes
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Custom Zinc Sulfide Thermal Evaporator
Custom system for Zinc sulfide (ZnS) thermal evaporation
SA Node
University of South Australia
Description
Thermal evaporator designed for Zinc Sulfide deposition
Related Information
Exclusively for Zinc Sulfide (ZnS) deposition
Tool Contact
anff-wa@uwa.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
e-beam evaporator- non-organic
Thermal evaporator for depositing metals
SA Node
University of South Australia
Description
Evaporates non-organic materials within a controlled N2 glovebox
Related Information
System only used for non-organic materials.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
e-beam evaporator- Organic
Thermal evaporator for depositing organic materials
SA Node
University of South Australia
Description
Evaporates organic materials within a controlled N2 glovebox
Related Information
System only used for organic materials.
Tool Contact
anff@uq.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Edwards 306 thermal evaporator
Thermal evaporator with angled and cold evaporation stages
SA Node
University of South Australia
Description
thermal evaporator, angled evaporation stage, cold evaporation stage
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Kurt Lesker Nano36
Thermal evaporator for depositing Au, Cu, Zn, etc.
SA Node
University of South Australia
Description
Thermal deposition of various materials.
Related Information
A large choice of metals is allowed. However, no toxic material's are permitted.
Tool Contact
horst.punzmann@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Lesker thermal evaporator
Thermal evaporator
SA Node
University of South Australia
Description
thermal evaporator, general purpose
Related Information
More information to come.
Tool Contact
anff@unsw.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Octal thermal evaporator
Thermal evaporation of Chalcogenide(As2S3,Ge11.5As24Se64.5)
SA Node
University of South Australia
Description
Thermal evaporation system, the Octal Thermal evaporation system is restricted to depositing very low optical loss sulphur based chalcogenide films for which it is the “production” tool. The system can handle four wafers of 4 inch circular size at a time.
Related Information
dedicated thermal evaporation for As2S3
Tool Contact
stephen.madden@anu.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Therma Evaporator- Angstrom Covap II
Thermal evaporator
SA Node
University of South Australia
Description
Thermal evaporator housed in an inert atmosphere glovebox.
Related Information
Capable of depositing thin films of up to four metals and/or powders onto a substrate.
Tool Contact
Jason.Gascooke@flinders.edu.au
TOOL MAKE AND MODEL
KEY DIFFERENTIATOR
LOCATION
Thermal Evaporator- Emitech 975K
Thermal evaporator
SA Node
University of South Australia
Description
A thermal evaporator with two evaporation sources
Related Information
Can deposit metals including Au, Cr, Mo
Tool Contact
Simon.Doe@unisa.edu.au
