ACT Node - Australian National Fabrication Facility Limited

ANFF ACT

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Overview

ANFF-ACT facility provides a range of capabilities and services for the micro/nanofabrication of photonic and related devices as well as the fabrication of waveguides and photonic crystals.

The node, located at the Australian National University, specialises in photonic/electronic materials growth, and the processing and fabrication of devices including micro electro-mechanical systems (MEMS). These capabilities provide a range of services for the fabrication of photonic and related devices as well as the production of waveguides and photonic crystals.

ANFF-ACT works closely with two renowned research groups based at ANU’s Laser Physics Centre and the Department of Electronic Materials Engineering. These groups bring expertise in the capabilities of high-energy ion implantation, Si-etching, optical characterisation and two metal organic chemical vapour deposition (MOCVD) reactors for the growth of III-V compound semiconductor multilayers based on: GaAs, AIGaAs, InGaAs, InP, InGaAsP, InAlGaAs, GaSb, InSb, InGaAsN. These reactors enable the fabrication of nanowires, quantum dots, quantum wells, strained layers and devices.

ANFF-ACT facilities provide a dynamic, exciting and collaborative atmosphere where researchers can get the most from their ideas with the best possible support and world class equipment.

Services include the scale-up prototyping of devices such as organic solar cells, organic light emitting diodes, organic circuit elements, microfluidic devices, bioassay platforms, biomaterial scaffolds, microbioreactors and production of materials for microelectronics to semiconductor-industry standards.

Node Competencies

Specialist fields: micro/nano fabrication of photonic and related devices; fabrication of waveguides and photonic crystals; Micro electro-mechanical systems (MEMS).

Flagship facilities: Electron beam lithography (EBL); sputtering system for metal and dielectric multi-layer deposition; Cluster tool for dry etching and deposition; Dual beam focused ion beam; Nano imprint lithography.

Contact

Node Director: Prof Hoe Tan
Email: Hoe.Tan@anu.edu.au
Phone: +61 2 6125 0363

Facility Manager: Dr Horst Punzmann
Email: horst.punzmann@anu.edu.au
Phone: +61 2 6125 0001

Booking System Visti Website

Location

Australian National University (ANU)

Address

Research School of Physics
building #160, Level 3, End of Mills Road
The Australian National University
Canberra ACT 2601
+61 2 6125 0001

Equipment

Experts

Ms Sue Berkeley

Node Administrator

Sue is in charge of liaising with users, billing, editing the website and producing the ANFF ACT Newsletter.

Australian National University (ANU)

Contact Ms Sue Berkeley

02 6125 2495

Prof Rob Elliman

Director of Ion Implantation Node (iiLab)

Rob Elliman is an Emeritus Professor of Physics in the Research School of Physics at the Australian National University (ANU) and Director of the ANU ion-implantation Laboratory (iiLab), a node of the NCRIS Heavy Ion Accelerator Capability. His fields of research include: nanotechnology; semiconductor materials science, oxide-based electronics, memristive-switching in transition-metal oxides, ion-implantation and ion-beam modification of materials. For information on the new Ion Implantation Lab, please click on the following link. ANU ion implantation Lab (iilab.edu.au)

Materials Synthesis and Modification, Modelling and Design, Testing and validation

Australian National University (ANU)

Contact Prof Rob Elliman

02 6125 0511

Mr Deon Hickey

Optomechanical Engineer

Deon joined ANFF OptoFab ACT in September 2023 as an Optomechanical Engineer. He graduated from the Australian National University in 2019 with a BSc (Honours) in Physics and Astronomy. Before joining ANFF he worked in OzGrav as a research technician developing Newtonian Noise sensors for gravitational wave detection. He is responsible for the Ion Beam Sputtering system at ANU, as well the design and manufacturing of bespoke instrumentation for optical fabrication. With his focus on large scale optomechanics he has worked on high profile projects such as coating the LIGO Beam Splitters.

Deposition, Laboratory Infrastructure, Manufacturing and machining, Modelling and Design, Testing and validation

ACT Node

Contact Mr Deon Hickey

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