Mr Kai-Yu Liu received his Master’s degree in Microelectronics Engineering in 2000 from Nanyang Technological University (NTU) of Singapore. After graduation, he continued working in the same school at NTU, where he was a Senior Engineer and Team Leader of the Nanyang Nanofabrication Centre in NTU and was in charge of process integration, device characterisation …

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Ethel has extensive experience in photolithography, as well expertise in wet processing and microfluidic fabrication. As Process Engineer: Optical Lithography at ANFF-NSW University of Sydney, she is responsible for the photolithography tools.


Mrs Leonie Hold is a Senior Research Assistant within the ANFF-Qld and Queensland Micro- and Nanotechnology Centre at the Queensland Microtechnology Facility, Griffith University. She joined Griffith in 2005 and has had previous micro-technology fabrication experience in Fraunhofer Institutes in Germany. Her current specialisation is in plasma etching and the deposition of silicon carbide on …

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Jacky is responsible for the electron-beam lithography system and has expertise in a variety of nanofabrication techniques. As a process engineer at ANFF-NSW University of Sydney, he has expertise in CAD design, e-beam and photolithography, thin-film deposition, and wet chemical processes.


Mark Gross is a Senior Technical Officer. He has worked for more than 35 years in the areas of plasma physics, thin film processing and semiconductor process engineering. He currently provides a range of skills including equipment maintenance and operation, optical characterization, plasma processing and tool design and modification. Mark received a PhD in experimental …

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Josiah is a process engineer with a special interest in microfabrication of biomedical devices utilising deep plasma etch processes (DRIE), plasma deposition (sputtering, PECVD) and metallization techniques including PVD and electroplating. He started his time at UNSW with an undergraduate degree in electrical engineering (photonics) followed by a PhD fabricating a prototype device to investigate …

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Hazem is responsible for wet etching benches in the cleanroom and managing the biochemistry, PC2, Industrial labs.