Lithography

Szymanska

Joanna Szymanska is the process engineer responsible for technical management of semiconductor processing within ANFF Facility. Responsible for provision of training, and new microfabrication process development. As area supervisor she’s also responsible for operation and maintenance of upper east and west part of the ANFF Facility. Her area of expertise is EBL -Raith 150TWO system, […]

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Su

Sophia has a research background in the field of microelectromechanical systems (MEMS) and previously worked at the Taiwan Semiconductor Research Institute (TSRI) for three years. During her time in TSRI, she was responsible for the development and fabrication of pressure sensors and gas sensors. Sophia joined ANFF in 2021 as a Nanofabrication Technologist and focuses

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Stuiber

Dr. Michael Stuiber joined the MCN as the new team member of the nanolithography and characterisation team in November 2019 with a primary focus on supporting the electron beam lithography capability. Prior to joining the MCN, Michael worked as a research assistant and teaching support fellow in the School of Physics at the University of

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Smith

Dan’s role is a secondment from the University of Melbourne and he is based at the MCN primarily to support users from the University of Melbourne, though he is also available to all users, both academic and from industry. He brings over 25 years of experience in micro/nanofabrication and MEMS and semiconductor manufacturing.

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Si

Guangyuan manages the focused ion beam, electron beam lithography, filmetrics thin film mapper and scanning electron microscope at the MCN.

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See

Andrew is the Facility Projects Manger at ANFF-NSW. He is former Senior Process Engineer, and his areas of expertise include UV photolithography and electron beam lithography. As an joint area supervisor, he is responsible for the operations in the lower east cleanroom facility.

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Schubert

Ute Schubert (Env.and Chem Eng. Fachschule Technik, Germany) is a process engineer at ANFF-NSW and Co-LEAF coordinator for ANFF-NSW UNSW’s hub. Among other admin and safety responsibilities, she is responsible for providing training and developing processes for microfabrication. She extensive experience in process engineering previously working in the Si and GaAs photovoltaics sectors at CSG

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Qiu

Gloria received her PhD in Materials Science and Engineering from the University of Houston, USA. Her expertise is in magnetic thin film deposition and nanostructure patterning for bit-patterned media application. She has also worked extensively on magnetic biosensors. As Senior Process Engineer at ANFF-NSW University of Sydney, Gloria is responsible for the deposition and dry

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Pai

Mike has a research background in microfluidic design and micro / nano fabrication and extensive experience in manufacturing and product development. Focusing on the development of the multiplex biosensing method, Mike received his PhD in Engineering in 2014, from University of South Australia. He joined ANFF-SA in 2015 as a Nanofabrication Technologist and is experienced

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Moody

Steve’s expertise is in characterisation, having come to us from a role with Microscopy Australia. As Senior Technical Officer: Characterisation at ANFF-NSW University of Sydney, he is particularly focused ion beam (cross-sectioning, manipulation, lift-out) and multi-beam nanofabrication.

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Michaux

Pierrette Michaux is a Process Engineer specialising in Nanofabrication. Pierrette completed an Advanced Diploma in Chemistry in 2002, then in 2005 a Master degree in Materials Science at the Engineering College of Industrial Ceramics in France. Pierrette started her career in the Science of Ceramic Processes and Surface Treatment Laboratory, a division of the French

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Lim

Yang is the thin film deposition team lead responsible for the thin film deposition suites. She also works on dicing saw, wire bonders, direct mask writer and polymer glovebox.

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